title: Fabrication of a focusing grating mirror by electron beam lithography.
abstract: A focusing grating mirror (FGM), which is a new computer generated holographic grating with functions of focusing lens and diffraction grating mirror, is proposed and fabricated, we believe, for the first time. A high speed and accurate electron beam writing system, based on a multitask minicomputer, 16-bit D/A converters with 64K-word static memories, and a scanning electron beam microscope, is developed and used to fabricate the FGMs comprising grating corrugations with chirp and bend structures. Excellent properties of the FGM are obtained, giving almost diffraction-limited spot size and the expected wavelength dispersion. The fabricated FGM is combined with a laser diode as an external cavity mirror to confirm the functions of direct optical feedback and wavelength selection, and the fundamental operation of an external-cavity laser is demonstrated.
authors.forename: Y
authors.initials: Y
authors.lastname: Hori
authors.forename: F
authors.initials: F
authors.lastname: Sogawa
authors.forename: H
authors.initials: H
authors.lastname: Asakure
authors.forename: M
authors.initials: M
authors.lastname: Kato
authors.forename: H
authors.initials: H
authors.lastname: Serizawa