Use of plasma-activated gases in synthesis of solid-state nitrides.
Basic properties of the plasma state are summarized, with the emphasis on low-pressure, non-isothermal, and cold plasma. The advantages of plasma activation in the synthesis of solid-state materials, especially nitrides, are discussed.
Vajenine
Grigori V
GV
Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, 70569, Stuttgart, Germany. G.Vajenine@fkf.mpg.de