Ellipsometric monitor for process control.
A process monitor that uses ellipsometry is described. It is provided with simple automatic azimuth calibration and optical alignment mechanisms. Calibration way determines azimuth angle errors and corrects errors of psi and Delta derived from those errors after crude manual adjustment or a change in plane of incidence. The alignment method is also composed of manual adjustment and automatic correction. Performance tests were carried out and they indicated that the two correction methods have practically no problems although they use approximations.
Hayashi
Y
Y
Itoh
A
A