Absolute and random error analysis of the dynamic imaging microellipsometry technique.
A summary of the rapid high resolution full field ellipsometric imaging technique termed dynamic imaging microellipsometry is presented. The theoretical basis of a linear sensitivity coefficient approach to the coupling of individual error sources to ellipsometric absolute error is derived. Numerically computed sensitivity coefficient maps are presented with a discussion of their application to ellipsometric data calibration. An analysis of random error is presented and verified using comparisons between the theoretical estimations and system measurements.
Cohn
R F
RF
Wagner
J W
JW