Surface optical coatings by ion assisted deposition techniques: study of uniformity.
Uniformity of layers produced by IAD strongly depends on the characteristics of the ion beam: optical characterization is made by guided wave measurements. The thickness and refractive index including anisotropy must be considered separately to interpret the measured uniformity.
Flory
F
F
Pelletier
E
E
Albrand
G
G
Hu
Y
Y