Simultaneous determination of refractive index, its dispersion and depth-profile of magnesium oxide thin film by spectroscopic ellipsometry.
A new method of using the spectroscopic ellipsometry technique to determine (a) the true (or bulk) refractive index of the film material, (b) the dispersion of the above refractive index with wavelength, (c) the thickness of the film, and (d) the distribution of the voids in the film is presented.
Vedam
K
K
Kim
S Y
SY