title: Calibration requirements for Mirau and Linnik microscope interferometers.
abstract: In interferencem icroscopesr equiringo blique incidence illumination (i.e., Michelson, Mirau, and Linnik), the fringe spacing varies with illumination numerical aperture so that calibration is needed for accurate measurements.
authors.forename: J F
authors.initials: JF
authors.lastname: Biegen