title: Blazed x-ray reflection gratings fabricated by electron beam lithography.
abstract: We show that blazed gratings with well-controlled extremely small vertical dimensions can be made in electronresist (PMMA) using electron beam lithography.
authors.forename: H
authors.initials: H
authors.lastname: Andersson
authors.forename: J
authors.initials: J
authors.lastname: Romijn
authors.forename: E
authors.initials: E
authors.lastname: van der Drift