title: EUV efficiency of a 6000-grooves mm(-1) diffraction grating.
abstract: We present measurements of the efficiency and large-angle scattering of a very high line density, mechanically ruled,planar, uniform line-space diffraction grating at extreme ultraviolet wavelengths.
authors.forename: M
authors.initials: M
authors.lastname: Hurwitz
authors.forename: S
authors.initials: S
authors.lastname: Bowyer
authors.forename: J
authors.initials: J
authors.lastname: Edelstein
authors.forename: T
authors.initials: T
authors.lastname: Harada
authors.forename: T
authors.initials: T
authors.lastname: Kita