EUV efficiency of a 6000-grooves mm(-1) diffraction grating.
We present measurements of the efficiency and large-angle scattering of a very high line density, mechanically ruled,planar, uniform line-space diffraction grating at extreme ultraviolet wavelengths.
Hurwitz
M
M
Bowyer
S
S
Edelstein
J
J
Harada
T
T
Kita
T
T