Spatial filtering microscope for linewidth measurements.
High pass filtering has been relatively little used in microscopy, yet it may have application to linewidth measurement and visualization of phase objects. I have designed and built a spatial filtering microscope entirely of conventional microscope objectives. For linewidth measurement, the spatial filter has an optimum width that allows linewidths to be measured within a few percent. Phase lines can also be examined, but phase contrast microscopy may be more suited to weak phase objects such as integrated-optical waveguides.
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