Beam monitoring system for simultaneous measurement of near and far field patterns in high repetition rate KrF lasers.
A computer-controlled beam monitoring system for KrF excimer lasers was developed for simultaneous measurement of near and far field patterns and pointing stability of the laser beam at a 250 Hz repetition rate. The system and results obtained are described.
Yagi
T
T
Matsumi
Y
Y
Ohta
K
K
Bachar
J
J
Saito
H
H
Obara
M
M
Fujioka
T
T