title: Beam monitoring system for simultaneous measurement of near and far field patterns in high repetition rate KrF lasers.
abstract: A computer-controlled beam monitoring system for KrF excimer lasers was developed for simultaneous measurement of near and far field patterns and pointing stability of the laser beam at a 250 Hz repetition rate. The system and results obtained are described.
authors.forename: T
authors.initials: T
authors.lastname: Yagi
authors.forename: Y
authors.initials: Y
authors.lastname: Matsumi
authors.forename: K
authors.initials: K
authors.lastname: Ohta
authors.forename: J
authors.initials: J
authors.lastname: Bachar
authors.forename: H
authors.initials: H
authors.lastname: Saito
authors.forename: M
authors.initials: M
authors.lastname: Obara
authors.forename: T
authors.initials: T
authors.lastname: Fujioka