title: Characterization of optical coatings with backscattering spectrometry.
abstract: We present three examples to illustrate the use of backscattering spectrometry to determine film stoichiometry, areal density, and impurity levels in optical coatings. Helium-ion beams with energies in the 1.5-5.0-MeV range were used to analyze (1) a magnesium fluoride coating, (2) a tungsten/silicon multilayer soft x-ray mirror, and (3) a trilayer optical data storage film.
authors.forename: J A
authors.initials: JA
authors.lastname: Leavitt
authors.forename: L C
authors.initials: LC
authors.lastname: McIntyre
authors.forename: M D
authors.initials: MD
authors.lastname: Ashbaugh
authors.forename: B
authors.initials: B
authors.lastname: Dezfouly-Arjomandy
authors.forename: J G
authors.initials: JG
authors.lastname: Oder