Intensity calibration of an EUV polarizer spectrometer detector system.
The absolute transmission and polarization of a polarizer and a Seya-Namioka monochromator are measured in the 50-120-nm wavelength range using spectrally dispersed synchrotron radiation. Grating illumination, astigmatism, and higher-order diffraction are taken into account. The efficiency of a channel electron multiplier is determined relative to a NBS calibrated A1(2)O(3) photodiode. The instruments are studied separately. The results are compared to other experimental and theoretical data where possible.
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