Cylindrical fly's eye lens for intensity redistribution of an excimer laser beam.
An excimer laser beam has a 1-D Gaussian intensity profile [I(g) = A exp(-Y(2)/sigma(2))]. The fly's eye lens composed of cylindrical lenses is designed to convert the Gaussian intensity profile into a uniform intensity profile. Effects of magnification and lens width of the cylindrical lenses on optical efficiency eta and uniform intensity width 2Y(u) are investigated. The cylindrical fly's eye lens system with eta = 82% and Y(u)= 4sigma is obtained by changing each cylindrical lens magnification. An experimental result shows that the cylindrical fly's eye lens is a useful optical element for redistributing a Gaussian profile.
Ozaki
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Takamoto
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