Test of strip coating materials for protecting optics.
Four strip coating materials were tested by total integrated scattering measurements on silicon wafers that had been coated and stripped, and by x-ray photoelectron spectroscopy measurements of line shapes and abundances of elements on initial silicon and glass surfaces, surfaces coated with strip coating materials, and on the same surfaces after the coatings had been stripped. It was found that all strip coating materials left a residue of carbon contamination on silicon and glass surfaces that had been coated and stripped. However, one coating material removed some of the original carbon contamination from a glass surface. The thickness of an equivalent uniform layer of material remaining on the surfaces was estimated from the abundance of the carbon on the initial surfaces and on the coated and stripped surfaces. Since all the surfaces used for the study were reasonably clean, the experiment did not say how effective the strip coating materials are in removing large amounts of contaminants.
Bennett
J M
JM
Mattsson
L
L
Keane
M P
MP
Karlsson
L
L