Characterization of optical coatings with backscattering spectrometry.
We present three examples to illustrate the use of backscattering spectrometry to determine film stoichiometry, areal density, and impurity levels in optical coatings. Helium-ion beams with energies in the 1.5-5.0-MeV range were used to analyze (1) a magnesium fluoride coating, (2) a tungsten/silicon multilayer soft x-ray mirror, and (3) a trilayer optical data storage film.
Leavitt
J A
JA
McIntyre
L C
LC
Ashbaugh
M D
MD
Dezfouly-Arjomandy
B
B
Oder
J G
JG