Spectral reflectance measurements using a precision multiple reflectometer in the UV and VUV range.
An imaging folded cavity is used to make an instrument for measuring absolute reflectivity in the UV and VUV spectral range (110-300 nm) with an accuracy of <5 x 10(-3) and a precision of <5 x 10(-4). This method operates over an incident angle between 5 and 70 degrees and can be used to measure transmissivity as well.
Zhuang
D K
DK
Yang
T L
TL