title: Layer uniformity obtained by vacuum evaporation: application to Fabry-Perot filters.
abstract: We show how we can measure with accuracy the distribution law of thicknesses deposited inside a vacuum chamber. These measurement techniques are applied to the simultaneous production of high rejection narrowband multiple halfwave Fabry-Perot filters. To prevent any alteration of the filters' optical properties, we must control the variations vs time of the evaporant distribution.
authors.forename: C
authors.initials: C
authors.lastname: Grezes-Besset
authors.forename: R
authors.initials: R
authors.lastname: Richier
authors.forename: E
authors.initials: E
authors.lastname: Pelletier