Exceeding conventional resolution limits in high-resolution transmission electron microscopy using tilted illumination and exit-wave restoration.
Tilted illumination exit-wave restoration is compared for two aberration-corrected instruments at different accelerating voltages. The experimental progress of this technique is also reviewed and the significance of off-axial aberrations examined. Finally, the importance of higher order aberration compensation combined with careful correction of the lower order aberrations is highlighted.
Haigh
Sarah J
SJ
Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom.
Sawada
Hidetaka
H
Takayanagi
Kunio
K
Kirkland
Angus I
AI