title: Note: A low leakage liquid seal for micromachined gas valves.
abstract: We report a method for addressing gas leakage in micromachined valves. The valves used for evaluating the proposed concept utilize a silicon valve seat that is bonded to a glass substrate and actuated by a piezoelectric stack, all of which are assembled within a ceramic package. The sealing method uses the capillary forces of a liquid sealant on the valve seat to reduce gas leakage below measurable limits. The gas leak rates are compared in valves with and without the seal enhancement. For example, a valve closes against 13.5 kPa with 10 V actuation, compared to 40 V required without the enhancement. Leakage is also evaluated for liquid flow.
authors.affiliation: Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109, USA. evansall@umich.edu
authors.forename: Allan T
authors.initials: AT
authors.lastname: Evans
authors.forename: Yogesh B
authors.initials: YB
authors.lastname: Gianchandani
mesh_terms: D019840:2-Propanol; D000465:Algorithms; D002516:Ceramics; D004867:Equipment Design; D005740:Gases; D005898:Glass; D044085:Microfluidics / Q000295:instrumentation*; D055616:Microtechnology / Q000295:instrumentation*; D009584:Nitrogen; D011312:Pressure; D012825:Silicon; D014867:Water
chemical_list: D005740:Gases; D014867:Water; D009584:Nitrogen; D019840:2-Propanol; D012825:Silicon