The materials challenge in diffraction-unlimited direct-laser-writing optical lithography.
Fischer
Joachim
J
Institut für Angewandte Physik and DFG-Center for Functional, Nanostructures, Karlsruhe Institute of Technology, Wolfgang-Gaede-Strasse 1, D-76131 Karlsruhe, Germany. joachim.fi scher@kit.edu
von Freymann
Georg
G
Wegener
Martin
M
D000431:Ethanol / Q000737:chemistry; D005898:Glass / Q000737:chemistry; D007834:Lasers; D013050:Spectrometry, Fluorescence; D013053:Spectrophotometry; D044004:Xanthones / Q000737:chemistry*
D044004:Xanthones; D000431:Ethanol; C514852:isopropyl thioxanthone