title: Sub-15 nm beam confinement by two crossed x-ray waveguides.
abstract: We have combined two high transmission planar x-ray waveguides glued onto each other in a crossed geometry to form an effective quasi-point source. From measurements of the far-field diffraction pattern, the phase and amplitude of the near-field distribution is retrieved using the error-reduction algorithm. In agreement with finite difference field simulations (forward calculation), the reconstructed exit wave intensity distribution (inverse calculation) exhibits a full width at half maximum (FWHM) below 15 nm in both dimensions. Finally, holographic imaging is successfully demonstrated for the crossed waveguide device by translation of a lithographic test structure through the waveguide beam.
authors.affiliation: Institut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, Göttingen, Germany. skruege@gwdg.de
authors.forename: S P
authors.initials: SP
authors.lastname: Krüger
authors.forename: K
authors.initials: K
authors.lastname: Giewekemeyer
authors.forename: S
authors.initials: S
authors.lastname: Kalbfleisch
authors.forename: M
authors.initials: M
authors.lastname: Bartels
authors.forename: H
authors.initials: H
authors.lastname: Neubauer
authors.forename: T
authors.initials: T
authors.lastname: Salditt
mesh_terms: D003198:Computer Simulation; D004867:Equipment Design; D006696:Holography / Q000295:instrumentation* / Q000379:methods*; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods; D011874:Radiometry / Q000295:instrumentation* / Q000379:methods*; D014965:X-Rays