title: Stress, scatter, and structure dependence on composition of thin films of Si-YF(3) and ZnSe-SrF(2).
abstract: Composition dependent structural, optical, and mechanical properties of codeposited thin films were studied in the Si-YF(3) and ZnSe-SrF(2) systems. Intrinsic stress varies nonlinearly in both systems. In the Si-YF(3) system, the stress becomes slightly compressive for intermediate compositions, even though it is highly tensile in the pure constituent thin films. In the ZnSe-SrF(2) system, optical scatter and intrinsic stress exhibit abrupt changes at approximately 60-vol % SrF(2), accompanied by a change in the dominant crystalline orientation. Possible structure-property relationships and composition ranges for practical applications of thick films are also discussed.
authors.forename: H O
authors.initials: HO
authors.lastname: Sankur
authors.forename: J
authors.initials: J
authors.lastname: Denatale
authors.forename: W J
authors.initials: WJ
authors.lastname: Gunning