A compact, sample-in-atmospheric-pressure soft x-ray microscope developed at Pohang Light Source.
A full-field transmission soft x-ray microscope (TXM) was developed at the Pohang Light Source. With a 2 mm diameter condenser zone plate and a 40 nm outermost-zone-width objective zone plate, the TXM's achieved spatial resolution is better than 50 nm at the photon energy of 500 eV (wavelength: 2.49 nm). The TXM is portable and mounted in tandem with a 7B1 spectroscopy end station. The sample position is outside the vacuum, allowing for quick sample changes and enhanced in situ experimental capability. In addition, the TXM is pinhole-free and easy to align, having commercial mounts located outside the vacuum components.
Lim
Jun
J
Pohang Accelerator Laboratory, POSTECH, San31, Pohang 790-784, Republic of Korea.
Shin
Hyun-Joon
HJ
Chae
Keun Hwa
KH
Hwang
Chan-Cuk
CC
Hwang
Han-Na
HN
Hong
Chung Ki
CK