Sub-15 nm beam confinement by two crossed x-ray waveguides.
We have combined two high transmission planar x-ray waveguides glued onto each other in a crossed geometry to form an effective quasi-point source. From measurements of the far-field diffraction pattern, the phase and amplitude of the near-field distribution is retrieved using the error-reduction algorithm. In agreement with finite difference field simulations (forward calculation), the reconstructed exit wave intensity distribution (inverse calculation) exhibits a full width at half maximum (FWHM) below 15 nm in both dimensions. Finally, holographic imaging is successfully demonstrated for the crossed waveguide device by translation of a lithographic test structure through the waveguide beam.
Krüger
S P
SP
Institut für Röntgenphysik, Universität Göttingen, Friedrich-Hund-Platz 1, Göttingen, Germany. skruege@gwdg.de
Giewekemeyer
K
K
Kalbfleisch
S
S
Bartels
M
M
Neubauer
H
H
Salditt
T
T
D003198:Computer Simulation; D004867:Equipment Design; D006696:Holography / Q000295:instrumentation* / Q000379:methods*; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods; D011874:Radiometry / Q000295:instrumentation* / Q000379:methods*; D014965:X-Rays