Polarization insensitive resonance-domain blazed binary gratings.
Three variants of binary blazed gratings with subwavelength features are considered, which have high first-order efficiencies in the non-paraxial domain for arbitrarily polarized light. A combination of effective medium theory and further parametric optimization with the Fourier modal method are used in design. Experimental demonstration is provided by electron beam lithography on a structure etched in a Si3N4 layer on top of a SiO2 substrate, with period approximately 3.5lambda at lambda = 633 nm. The measured efficiency (81% for TE and 85% for TM polarization) agrees well with the calculated value, 84%.
Hyvärinen
Heikki J
HJ
Department of Physics and Mathematics, University of Eastern Finland, Joensuu, Finland. heikki.j.hyvarinen@joensuu.fi
Karvinen
Petri
P
Turunen
Jari
J
D002138:Calibration; D004583:Electrons; D004867:Equipment Design; D005583:Fourier Analysis; D008853:Microscopy / Q000379:methods*; D008855:Microscopy, Electron, Scanning; D008962:Models, Theoretical; D055095:Optics and Photonics / Q000379:methods*; D012822:Silicon Dioxide
D012822:Silicon Dioxide