title: Polyimide optical waveguides fabricated with electron beam lithography.
abstract: Fabrication of PMMA clad polyimide waveguides by electron beam lithography creates very smooth sidewalls allowing production of narrow low loss waveguides on planar substrates.
authors.forename: M J
authors.initials: MJ
authors.lastname: Rooks
authors.forename: H V
authors.initials: HV
authors.lastname: Roussell
authors.forename: L M
authors.initials: LM
authors.lastname: Johnson