Performance of multilayer coated diffraction gratings in the EUV.
Performance of multilayer coated diffraction gratings has been evaluated in the extreme UV. The application of multilayer coatings to two blazed gratings has produced a significant enhancement in grating efficiency in the 300-A spectral region in first order.
Keski-Kuha
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RA
Thomas
R J
RJ
Gum
J S
JS
Condor
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CE