title: SiC avalanche photodiode array with microlenses.
abstract: A simple technique to incorporate microlenes with small photodiode arrays is demonstrated and analyzed. Using this method, the fill factor was increased from 2.6% to 22.4% for a two by two array. Simulation results are also shown. The photocurrent with microlens was approximately 8.6 times larger than without the microlens, which is consistent with simulation results.
authors.affiliation: Department of Electrical and Computer Engineering, University of Virginia, 351 McCormick Road, Charlottesville, Virginia 22904, USA. kl7pb@virginia.edu
authors.forename: Kejia
authors.initials: K
authors.lastname: Li
authors.forename: Han-Din
authors.initials: HD
authors.lastname: Liu
authors.forename: Qiugui
authors.initials: Q
authors.lastname: Zhou
authors.forename: Dion
authors.initials: D
authors.lastname: McIntosh
authors.forename: Joe C
authors.initials: JC
authors.lastname: Campbell
mesh_terms: D017554:Carbon Compounds, Inorganic / Q000138:chemical synthesis*; D017076:Computer-Aided Design; D004867:Equipment Design; D007909:Lenses; D008904:Miniaturization; D010783:Photometry / Q000295:instrumentation*; D015203:Reproducibility of Results; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation*; D017655:Silicon Compounds / Q000138:chemical synthesis*; D018511:Systems Integration
chemical_list: D017554:Carbon Compounds, Inorganic; D017655:Silicon Compounds; C022088:silicon carbide