title: Exceeding conventional resolution limits in high-resolution transmission electron microscopy using tilted illumination and exit-wave restoration.
abstract: Tilted illumination exit-wave restoration is compared for two aberration-corrected instruments at different accelerating voltages. The experimental progress of this technique is also reviewed and the significance of off-axial aberrations examined. Finally, the importance of higher order aberration compensation combined with careful correction of the lower order aberrations is highlighted.
authors.affiliation: Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom.
authors.forename: Sarah J
authors.initials: SJ
authors.lastname: Haigh
authors.forename: Hidetaka
authors.initials: H
authors.lastname: Sawada
authors.forename: Kunio
authors.initials: K
authors.lastname: Takayanagi
authors.forename: Angus I
authors.initials: AI
authors.lastname: Kirkland