Nanoscale imaging using deep ultraviolet digital holographic microscopy.
A deep ultraviolet off-axis digital holographic microscope (DHM) is presented. The microscope has been arranged with as least as possible optical elements in the imaging path to avoid aberration due to the non-perfect optical elements. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. To examine the resolution of the system a nano-structured template has been designed and the result confirms the submicron and nanoscale resolution of the arranged DHM setup.
Faridian
Ahmad
A
Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, Stuttgart, Germany. faridian@ito.uni-stuttgart.de
Hopp
David
D
Pedrini
Giancarlo
G
Eigenthaler
Ulrike
U
Hirscher
Michael
M
Osten
Wolfgang
W
D004867:Equipment Design; D006046:Gold; D006696:Holography / Q000295:instrumentation* / Q000379:methods*; D021621:Imaging, Three-Dimensional; D008860:Microscopy, Ultraviolet / Q000295:instrumentation* / Q000379:methods*; D053758:Nanoparticles; D012822:Silicon Dioxide
D006046:Gold; D012822:Silicon Dioxide