Site-controlled self-assembled InAs quantum dots grown on GaAs substrates.
Atomically-flat surfaces are obtained after thin GaAsSb buffer layer growth on GaAs substrates with regular-distributed nano-holes formed after oxide desorption of the local atomic-force-microscopy anode oxidation. Different from the samples with GaAsSb buffer layers, increasing surface root-mean-square roughness is observed for the GaAs-buffered samples with increasing GaAs buffer layer thickness. The phenomenon is attributed to the enhanced adatom migration resulting from the incorporation of Sb atoms. By using the substrates with nano-holes after buffer layer growth, site-controlled self-assembled InAs quantum dots (QDs) are observed with the deposition of a below-critical-thickness InAs coverage of 1.3 monolayer (ML).
Lin
Shih-Yen
SY
Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan. shihyen@gate.sinica.edu.tw
Tseng
Chi-Che
CC
Chung
Tung-Hsun
TH
Liao
Wen-Hsuan
WH
Chen
Shu-Han
SH
Chyi
Jen-Inn
JI