title: Polarization insensitive resonance-domain blazed binary gratings.
abstract: Three variants of binary blazed gratings with subwavelength features are considered, which have high first-order efficiencies in the non-paraxial domain for arbitrarily polarized light. A combination of effective medium theory and further parametric optimization with the Fourier modal method are used in design. Experimental demonstration is provided by electron beam lithography on a structure etched in a Si3N4 layer on top of a SiO2 substrate, with period approximately 3.5lambda at lambda = 633 nm. The measured efficiency (81% for TE and 85% for TM polarization) agrees well with the calculated value, 84%.
authors.affiliation: Department of Physics and Mathematics, University of Eastern Finland, Joensuu, Finland. heikki.j.hyvarinen@joensuu.fi
authors.forename: Heikki J
authors.initials: HJ
authors.lastname: Hyvärinen
authors.forename: Petri
authors.initials: P
authors.lastname: Karvinen
authors.forename: Jari
authors.initials: J
authors.lastname: Turunen
mesh_terms: D002138:Calibration; D004583:Electrons; D004867:Equipment Design; D005583:Fourier Analysis; D008853:Microscopy / Q000379:methods*; D008855:Microscopy, Electron, Scanning; D008962:Models, Theoretical; D055095:Optics and Photonics / Q000379:methods*; D012822:Silicon Dioxide
chemical_list: D012822:Silicon Dioxide