title: Nanoscale imaging using deep ultraviolet digital holographic microscopy.
abstract: A deep ultraviolet off-axis digital holographic microscope (DHM) is presented. The microscope has been arranged with as least as possible optical elements in the imaging path to avoid aberration due to the non-perfect optical elements. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. To examine the resolution of the system a nano-structured template has been designed and the result confirms the submicron and nanoscale resolution of the arranged DHM setup.
authors.affiliation: Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, Stuttgart, Germany. faridian@ito.uni-stuttgart.de
authors.forename: Ahmad
authors.initials: A
authors.lastname: Faridian
authors.forename: David
authors.initials: D
authors.lastname: Hopp
authors.forename: Giancarlo
authors.initials: G
authors.lastname: Pedrini
authors.forename: Ulrike
authors.initials: U
authors.lastname: Eigenthaler
authors.forename: Michael
authors.initials: M
authors.lastname: Hirscher
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Osten
mesh_terms: D004867:Equipment Design; D006046:Gold; D006696:Holography / Q000295:instrumentation* / Q000379:methods*; D021621:Imaging, Three-Dimensional; D008860:Microscopy, Ultraviolet / Q000295:instrumentation* / Q000379:methods*; D053758:Nanoparticles; D012822:Silicon Dioxide
chemical_list: D006046:Gold; D012822:Silicon Dioxide