Note: Exciting higher-order flexural modes of freestanding microstructures with square wave driving signals.
We examine using the harmonics of low fundamental frequency (f(1)) square waveforms to electrostatically excite higher-order flexural modes of a micromechanical structure in higher (>f(1)) frequency regimes. Square wave signals swept between a fundamental frequency range of approximately 0-333 kHz demonstrated an effective high magnitude spectral excitation of approximately 0-1 MHz. This enabled optical heterodyne detection of structural resonant frequencies above 333 kHz. Low frequency square wave signals were also used to selectively excite modes at higher frequencies.
Chow
Jacky
J
Department of Mechanical and Materials Engineering, Queen's University, Kingston, Ontario K7L 3N6, Canada.
Lai
Yongjun
Y