title: Fabrication of holographic microlenses using a deep UV lithographed zone plate.
abstract: Holographic microlens arrays and elliptical zone plates are fabricated on holographic plates and photoresists by interference between the first- and second-order diffracted waves from an ion etched Fresnel zone plate, which is made by electron-beam scanning and deep UV lithography. This method of fabrication is simple, and a holographic lens with a large numerical aperture and short focal length is obtained. Experimental results of focusing and imaging by a lens array and an elliptical zone plate are given. Two methods of fabricating holographic zone plates for an IR or UV wavelength are also proposed.
authors.forename: H
authors.initials: H
authors.lastname: Ming
authors.forename: Y
authors.initials: Y
authors.lastname: Wu
authors.forename: J
authors.initials: J
authors.lastname: Xie
authors.forename: T
authors.initials: T
authors.lastname: Nakajima