title: Fabry-Perot measurement of 2-D spectral distribution in a KrF laser beam.
abstract: A technique to measure the spectral distribution in a cross section of a KrF laser beam is described. Two dimensional distribution, pulse-by-pulse fluctuation, and long term variation of the spectrum of the laser beam are measured with this method.
authors.forename: T
authors.initials: T
authors.lastname: Yagi
authors.forename: K
authors.initials: K
authors.lastname: Ohta