Stress, scatter, and structure dependence on composition of thin films of Si-YF(3) and ZnSe-SrF(2).
Composition dependent structural, optical, and mechanical properties of codeposited thin films were studied in the Si-YF(3) and ZnSe-SrF(2) systems. Intrinsic stress varies nonlinearly in both systems. In the Si-YF(3) system, the stress becomes slightly compressive for intermediate compositions, even though it is highly tensile in the pure constituent thin films. In the ZnSe-SrF(2) system, optical scatter and intrinsic stress exhibit abrupt changes at approximately 60-vol % SrF(2), accompanied by a change in the dominant crystalline orientation. Possible structure-property relationships and composition ranges for practical applications of thick films are also discussed.
Sankur
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Denatale
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Gunning
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