SiC avalanche photodiode array with microlenses.
A simple technique to incorporate microlenes with small photodiode arrays is demonstrated and analyzed. Using this method, the fill factor was increased from 2.6% to 22.4% for a two by two array. Simulation results are also shown. The photocurrent with microlens was approximately 8.6 times larger than without the microlens, which is consistent with simulation results.
Li
Kejia
K
Department of Electrical and Computer Engineering, University of Virginia, 351 McCormick Road, Charlottesville, Virginia 22904, USA. kl7pb@virginia.edu
Liu
Han-Din
HD
Zhou
Qiugui
Q
McIntosh
Dion
D
Campbell
Joe C
JC
D017554:Carbon Compounds, Inorganic / Q000138:chemical synthesis*; D017076:Computer-Aided Design; D004867:Equipment Design; D007909:Lenses; D008904:Miniaturization; D010783:Photometry / Q000295:instrumentation*; D015203:Reproducibility of Results; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation*; D017655:Silicon Compounds / Q000138:chemical synthesis*; D018511:Systems Integration
D017554:Carbon Compounds, Inorganic; D017655:Silicon Compounds; C022088:silicon carbide