Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm.
This paper presents an all-silica miniature optical fiber pressure/acoustic sensor based on the Fabry-Perot (FP) interferometric principle. The endface of the etched optical fiber tip and silica thin diaphragm on it form the FP structure. The uniform and thin silica diaphragm was fabricated by etching away the silicon substrate from a commercial silicon wafer that has a thermal oxide layer. The thin film was directly thermally bonded to the endface of the optical fiber thus creating the Fabry-Perot cavity. Thin films with a thickness from 1microm to 3microm have been bonded successfully. The sensor shows good linearity and hysteresis during measurement. A sensor with 0.75 microm-thick diaphragm thinned by post silica etching was demonstrated to have a sensitivity of 11 nm/kPa. The new sensor has great potential to be used as a non-intrusive pressure sensor in a variety of sensing applications.
Wang
Wenhui
W
Department of Electrical and Computer Engineering, University of Massachusetts Lowell, University Ave., Lowell, MA 01854, USA.
Wu
Nan
N
Tian
Ye
Y
Niezrecki
Christopher
C
Wang
Xingwei
X