title: Controlled positioning of large interfacial nanocavities via stress-engineered void localization.
authors.affiliation: Nanotechnology Group Institute of Microsystems Engineering (IMTEK), Albert-Ludwigs-University Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany.
authors.forename: Firat
authors.initials: F
authors.lastname: Güder
authors.forename: Yang
authors.initials: Y
authors.lastname: Yang
authors.forename: Silvana
authors.initials: S
authors.lastname: Goetze
authors.forename: Andreas
authors.initials: A
authors.lastname: Berger
authors.forename: Niranjan
authors.initials: N
authors.lastname: Ramgir
authors.forename: Dietrich
authors.initials: D
authors.lastname: Hesse
authors.forename: Margit
authors.initials: M
authors.lastname: Zacharias
mesh_terms: D046529:Microscopy, Electron, Transmission; D036103:Nanotechnology / Q000379:methods*; D053770:Nanowires / Q000737:chemistry* / Q000648:ultrastructure*; D015034:Zinc Oxide / Q000737:chemistry
chemical_list: D015034:Zinc Oxide