title: Plasma diagnostics for unraveling process chemistry.
abstract: This review focuses on the use of diagnostic tools to examine plasma processing chemistry, primarily plasma species energetics, dynamics, and molecule-surface reactions. We describe the use of optical diagnostic tools, mass spectrometry, and Langmuir probes in measuring species densities, rotational and kinetic energies, and plasma-surface reactions. Molecule-surface interactions for MX(n) species (M = C, Si, N; X = H, F, Cl) are presented and interpreted with respect to the molecule's electronic configuration and dipole moments.
authors.affiliation: Department of Chemistry, Colorado State University, Fort Collins, 80523-1872, USA. jstill@lamar.colostate.edu
authors.forename: Joshua M
authors.initials: JM
authors.lastname: Stillahn
authors.forename: Kristina J
authors.initials: KJ
authors.lastname: Trevino
authors.forename: Ellen R
authors.initials: ER
authors.lastname: Fisher