title: Low loss shallow-ridge silicon waveguides.
abstract: We demonstrate low loss shallow-ridge silicon waveguides with an average propagation loss of 0.274 + or - 0.008 dB/cm in the C-band (1530 nm - 1565 nm). These waveguides have a cross section of 0.25 microm by 2 microm and are fabricated by standard photolithography and dry etching. We also investigate a compact double-level taper which adiabatically couples light from these waveguides to silicon strip waveguides enabling tight bends.
authors.affiliation: Kotura Inc., 2630 Corporate Place, Monterey Park, CA 91754, USA. pdong@kotura.com
authors.forename: Po
authors.initials: P
authors.lastname: Dong
authors.forename: Wei
authors.initials: W
authors.lastname: Qian
authors.forename: Shirong
authors.initials: S
authors.lastname: Liao
authors.forename: Hong
authors.initials: H
authors.lastname: Liang
authors.forename: Cheng-Chih
authors.initials: CC
authors.lastname: Kung
authors.forename: Ning-Ning
authors.initials: NN
authors.lastname: Feng
authors.forename: Roshanak
authors.initials: R
authors.lastname: Shafiiha
authors.forename: Joan
authors.initials: J
authors.lastname: Fong
authors.forename: Dazeng
authors.initials: D
authors.lastname: Feng
authors.forename: Ashok V
authors.initials: AV
authors.lastname: Krishnamoorthy
authors.forename: Mehdi
authors.initials: M
authors.lastname: Asghari