Vapor-liquid-solid growth of silicon nanowires using organosilane as precursor.
Utilizing monophenylsilane as the precursor and liquid injection chemical vapor deposition (LICVD) as the fabrication method offers a novel synthetic approach for the facile, ambient pressure, and continuous vapor-liquid-solid (VLS) synthesis of high quality Si nanowires.
Yang
Hong-Jie
HJ
Department of Chemical Engineering, National Tsing Hua University, 101, Section 2, Kuang-Fu Road, Hsinchu, Taiwan 30013, ROC.
Yuan
Fang-Wei
FW
Tuan
Hsing-Yu
HY
D004867:Equipment Design; D006046:Gold / Q000737:chemistry; D008855:Microscopy, Electron, Scanning; D046529:Microscopy, Electron, Transmission; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods*; D053770:Nanowires / Q000737:chemistry*; D010316:Particle Size; D044367:Phase Transition; D012821:Silanes / Q000737:chemistry*; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties; D013696:Temperature; D014835:Volatilization
D012821:Silanes; D006046:Gold; D012825:Silicon