title: High-throughput near-field optical nanoprocessing of solution-deposited nanoparticles.
abstract: The application of nanoscale electrical and biological devices will benefit from the development of nanomanufacturing technologies that are high-throughput, low-cost, and flexible. Utilizing nanomaterials as building blocks and organizing them in a rational way constitutes an attractive approach towards this goal and has been pursued for the past few years. The optical near-field nanoprocessing of nanoparticles for high-throughput nanomanufacturing is reported. The method utilizes fluidically assembled microspheres as a near-field optical confinement structure array for laser-assisted nanosintering and nanoablation of nanoparticles. By taking advantage of the low processing temperature and reduced thermal diffusion in the nanoparticle film, a minimum feature size down to approximately 100 nm is realized. In addition, smaller features (50 nm) are obtained by furnace annealing of laser-sintered nanodots at 400 degrees C. The electrical conductivity of sintered nanolines is also studied. Using nanoline electrodes separated by a submicrometer gap, organic field-effect transistors are subsequently fabricated with oxygen-stable semiconducting polymer.
authors.affiliation: Department of Mechanical Engineering University of California 6177 Etcheverry Hall, Mailstop 1740, Berkeley, CA 94720, USA.
authors.forename: Heng
authors.initials: H
authors.lastname: Pan
authors.forename: David J
authors.initials: DJ
authors.lastname: Hwang
authors.forename: Seung H
authors.initials: SH
authors.lastname: Ko
authors.forename: Tabitha A
authors.initials: TA
authors.lastname: Clem
authors.forename: Jean M J
authors.initials: JM
authors.lastname: Fréchet
authors.forename: Dieter
authors.initials: D
authors.lastname: Bäuerle
authors.forename: Costas P
authors.initials: CP
authors.lastname: Grigoropoulos
mesh_terms: D004553:Electric Conductivity; D004867:Equipment Design; D053758:Nanoparticles / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods*; D012996:Solutions / Q000737:chemistry
chemical_list: D012996:Solutions