title: Chip-scale nanofabrication of single spins and spin arrays in diamond.
abstract: We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100-nm length scales. Secondary ion mass spectroscopy measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.
authors.affiliation: Center for Spintronics and Quantum Computation, University of California, Santa Barbara, California 93106, USA.
authors.forename: David M
authors.initials: DM
authors.lastname: Toyli
authors.forename: Christoph D
authors.initials: CD
authors.lastname: Weis
authors.forename: Gregory D
authors.initials: GD
authors.lastname: Fuchs
authors.forename: Thomas
authors.initials: T
authors.lastname: Schenkel
authors.forename: David D
authors.initials: DD
authors.lastname: Awschalom