title: High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths.
abstract: Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency, even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property, however, depends critically on the ability to create a structure with near atomic perfection. In this Letter we report on a method to produce these structures. We report measurements that show, for a 5000l/mm grating diffracting in the third order, a diffraction efficiency of 37.6% at a wavelength of 13.6nm. This work now shows a direct route to achieving high diffraction efficiency in high order at wavelengths throughout the soft x-ray energy range.
authors.affiliation: Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA. dlvoronov@lbl.gov
authors.forename: Dmitriy L
authors.initials: DL
authors.lastname: Voronov
authors.forename: Minseung
authors.initials: M
authors.lastname: Ahn
authors.forename: Erik H
authors.initials: EH
authors.lastname: Anderson
authors.forename: Rossana
authors.initials: R
authors.lastname: Cambie
authors.forename: Chih-Hao
authors.initials: CH
authors.lastname: Chang
authors.forename: Eric M
authors.initials: EM
authors.lastname: Gullikson
authors.forename: Ralf K
authors.initials: RK
authors.lastname: Heilmann
authors.forename: Farhad
authors.initials: F
authors.lastname: Salmassi
authors.forename: Mark L
authors.initials: ML
authors.lastname: Schattenburg
authors.forename: Tony
authors.initials: T
authors.lastname: Warwick
authors.forename: Valeriy V
authors.initials: VV
authors.lastname: Yashchuk
authors.forename: Lucas
authors.initials: L
authors.lastname: Zipp
authors.forename: Howard A
authors.initials: HA
authors.lastname: Padmore