Video microscope with submicrometer resolution.
We have constructed and evaluated a video microscope with a 150- x 150-microm field of view for performing measurements of optical fiber geometry. The microscope consists of a frame transfer video camera, condensing and filtering optics, a 40x, 0.65 N.A. microscope objective, and frame digitizing electronics. Using simple digital algorithms, we measure distance with a random uncertainty of approximately 40 nm across the full field of view, but width measurements suffer from a systematic error between 0.1 and 0.2 microm.
Mechels
S
S
Young
M
M