title: AlN/ZnO/diamond waveguiding layer acoustic wave structure: theoretical and experimental results.
abstract: We present a theoretical calculation and experimental results for a waveguiding layer acoustic wave (WLAW). The experimental device is modeled by the finite element method (FEM) for the AlN/ZnO/diamond structure. It was found that the AlN thickness must be at least larger than 3lambda/2 to obtain negligible surface displacement. In the same way, the ZnO thickness for a fixed value of AlN thickness at 2lambda must be larger than lambda/4 to confine the acoustic wave. The electromechanical coupling of the wave presents an optimum around lambda/2 for the ZnO layer thickness. A first experimental AlN/ZnO/diamond device has been developed and shows the WLAW at 412 MHz.
authors.affiliation: Institutdes Materiaux Jean Rouxel (IMN), Universite Nantes, Centre Nationalde la Recherche Scientifique, Nantes, France. laurent.lebrizoual@univ-nantes.fr
authors.forename: Laurent
authors.initials: L
authors.lastname: Le Brizoual
authors.forename: Omar
authors.initials: O
authors.lastname: Elmazria
authors.forename: Sergei
authors.initials: S
authors.lastname: Zhgoon
authors.forename: Akram
authors.initials: A
authors.lastname: Soussou
authors.forename: Frederic
authors.initials: F
authors.lastname: Sarry
authors.forename: Mohammed Abdou
authors.initials: MA
authors.lastname: Djouadi