title: Possibilities for projection x-ray lithography using holographic optical elements.
abstract: The use of a single flat grazing incidence reflector on which a computer-generated hologram has been written is proposed for projection x-ray lithography.
authors.forename: M R
authors.initials: MR
authors.lastname: Howells
authors.forename: C
authors.initials: C
authors.lastname: Jacobsen