Versatile methods for the fabrication of polyvinylidene fluoride microstructures.
Polyvinylidene fluoride (PVDF) microstructures are of interest for a number of BioMEMS applications both for their piezoelectric and biocompatible properties. In this work, simple soft lithography-based techniques were developed to fabricate PVDF microstructures with diverse geometries, including microarrays of pillars, lines, and wells. Four different microstructure configurations were created: freestanding, stamped discontinuous, stamped continuous and imprinted patterns. Features with lateral dimensions down to 1 μm were consistently reproduced on 2.5 cm diameter areas. Atomic force microscopy (AFM) measurements of poled PVDF microstructures confirmed a marked inverse piezoelectric behavior. The techniques presented here have a number of advantages over previously demonstrated PVDF micropatterning approaches.
Gallego-Perez
Daniel
D
Department of Biomedical Engineering, The Ohio State University, Columbus, OH 43210, USA.
Ferrell
Nicholas J
NJ
Higuita-Castro
Natalia
N
Hansford
Derek J
DJ
D004553:Electric Conductivity; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D055616:Microtechnology / Q000295:instrumentation / Q000379:methods*; D011145:Polyvinyls / Q000737:chemistry*; D011327:Printing; D005465:Fluorocarbon Polymers
D011145:Polyvinyls; C024865:polyvinylidene fluoride; D005465:Fluorocarbon Polymers