Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles.
Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations.
Linzon
Y
Y
School of Applied and Engineering Physics, Cornell University, Ithaca, New York 14853, USA. yoav.linzon@cornell.edu
Krylov
S
S
Ilic
B
B
Southworth
D R
DR
Barton
R A
RA
Cipriany
B R
BR
Cross
J D
JD
Parpia
J M
JM
Craighead
H G
HG