Chip-scale nanofabrication of single spins and spin arrays in diamond.
We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100-nm length scales. Secondary ion mass spectroscopy measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.
Toyli
David M
DM
Center for Spintronics and Quantum Computation, University of California, Santa Barbara, California 93106, USA.
Weis
Christoph D
CD
Fuchs
Gregory D
GD
Schenkel
Thomas
T
Awschalom
David D
DD