High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths.
Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency, even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property, however, depends critically on the ability to create a structure with near atomic perfection. In this Letter we report on a method to produce these structures. We report measurements that show, for a 5000l/mm grating diffracting in the third order, a diffraction efficiency of 37.6% at a wavelength of 13.6nm. This work now shows a direct route to achieving high diffraction efficiency in high order at wavelengths throughout the soft x-ray energy range.
Voronov
Dmitriy L
DL
Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA. dlvoronov@lbl.gov
Ahn
Minseung
M
Anderson
Erik H
EH
Cambie
Rossana
R
Chang
Chih-Hao
CH
Gullikson
Eric M
EM
Heilmann
Ralf K
RK
Salmassi
Farhad
F
Schattenburg
Mark L
ML
Warwick
Tony
T
Yashchuk
Valeriy V
VV
Zipp
Lucas
L
Padmore
Howard A
HA