Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays.
We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top-top electrode configuration. To practically test the device, its O(2) and NO(2) sensing properties were investigated. The gas sensing properties of this type of device suggest that the approach is promising for the fabrication of sensitive and reliable nanorod chemical sensors.
Park
Jae Young
JY
School of Materials Science and Engineering, Inha University, Incheon, 402-751 Korea.
Choi
Sun-Woo
SW
Kim
Sang Sub
SS