Profile evolution for conformal atomic layer deposition over nanotopography.
The self-limiting reactions which distinguish atomic layer deposition (ALD) provide ultrathin film deposition with superb conformality over the most challenging topography. This work addresses how the shapes (i.e., surface profiles) of nanostructures are modified by the conformality of ALD. As a nanostructure template, we employ a highly scalloped surface formed during the first anodization of the porous anodic alumina (PAA) process, followed by removal of the alumina to expose a scalloped Al surface. SEM and AFM reveal evolution of surface profiles that change with ALD layer thickness, influenced by the way ALD conformality decorates the underlying topography. The evolution of surface profiles is modeled using a simple geometric 3D extrusion model, which replicates the measured complex surface topography. Excellent agreement is obtained between experimental data and the results from this model, suggesting that for this ALD system conformality is very high even on highly structured, sharp features of the initial template surface. Through modeling and experimentation, the benefits of ALD to manipulate complex surface topographies are recognized and will play an important role in the design and nanofabrication of next generation devices with increasingly high aspect ratios as well as nanoscale features.
Cleveland
Erin R
ER
Department of Materials Science and Engineering, Institute for Systems Research, University of Maryland, College Park, Maryland 20742, USA.
Banerjee
Parag
P
Perez
Israel
I
Lee
Sang Bok
SB
Rubloff
Gary W
GW
D000537:Aluminum Oxide / Q000737:chemistry; D004563:Electrochemistry; D004566:Electrodes; D008567:Membranes, Artificial; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D049329:Nanostructures / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods*; D016062:Porosity; D013499:Surface Properties; D014025:Titanium / Q000737:chemistry
D008567:Membranes, Artificial; C009495:titanium dioxide; D014025:Titanium; D000537:Aluminum Oxide