Method of multiple references for 3D imaging with Fourier transform interferometry.
This letter presents an improved phase referencing technique, called Method of Multiple References, for optical profilometry. Based on a lookup table, the method eliminates several major drawbacks of single-reference Fourier Transform Interferometry by enabling surface error correction for steep slopes and step discontinuities, and by allowing mapping of multiple discrete objects using a single image set. The algorithm is tested using a fiber optic coupler-based FTI system and shown to have RMS surface error less than 0.03 mm.
Lally
Evan
E
Center for Photonics Technology, Bradley Department of Electrical and Computer Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061-0111, USA. evlally@vt.edu
Gong
Jianmin
J
Wang
Anbo
A
D002138:Calibration; D004867:Equipment Design; D005336:Fiber Optic Technology / Q000295:instrumentation / Q000379:methods*; D005583:Fourier Analysis; D021621:Imaging, Three-Dimensional / Q000295:instrumentation / Q000379:methods*; D007368:Interferometry / Q000295:instrumentation / Q000379:methods*