title: Microstructure characterization by angle-resolved scatter and comparison to measurements made by other techniques.
abstract: The theory and measurement of angle-resolved scatter are described. Values of rms roughness that were obtained by using this technique to characterize four different materials are compared with values that were obtained by using a total integrated scatter measuring instrument, an optical profiler, and a mechanical profiler. The spatial frequency bandwidths and modulation transfer functions of the four instruments are different, and results are described in light of these differences.
authors: R D
authors: RD
authors: Jacobson
authors: S R
authors: SR
authors: Wilson
authors: G A
authors: GA
authors: Al-Jumaily
authors: J R
authors: JR
authors: McNeil
authors: J M
authors: JM
authors: Bennett
authors: L
authors: L
authors: Mattsson