Alignment system for solid-surface extreme-ultraviolet laser targets.
A simple and new target-alignment scheme for short-wavelength lasers is presented in the context of the alignment requirements a nickel-like molybdenum extreme-ultraviolet laser. The current optical design for the system is presented, along with data indicating alignment capabilities of at least 16 microm.
Tauber
D
D
Basu
S
S
Hagelstein
P L
PL