Integrated optical grating scale readout employing a double grating.
A reading head empolying a double grating in a monomode waveguide for the interferometric readout of grating scales is proposed and demonstrated. A theoretical analysis employing a ray-tracing programthat includes wave-front data output shows promising insensitivity to deviations from the design data for this device. Experimental results for a laboratory setup are presented.
Geh
B
B
Dorsel
A
A