title: Edge-setting criterion in confocal microscopy.
abstract: The intensity that locates the image of an edge in a confocal microscope is calculated as a function of detector size. Both pinhole and slit detectors are considered. Knowledge of this edge-setting criterion permits accurate determination of the edge position, as is necessary for confocal metrology.
authors: C J
authors: CJ
authors: Sheppard
authors: M
authors: M
authors: Gu