Improving the lateral resolution of a multi-sensor profile measurement method by non-equidistant sensor spacing.
We present a method to enhance the achievable lateral resolution of a multi-sensor scanning profile measurement method. The relationship between the profile measurement method considered and established shearing techniques is illustrated. Simulation and measurement results show that non-equidistant sensor spacing can improve the lateral resolution significantly.
Wiegmann
Axel
A
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany. axel.wiegmann@ptb.de
Schulz
Michael
M
Elster
Clemens
C