Yield analysis of multilayer optical coatings.
Yield is defined as the ratio of the number of devices that satisfy a particular technical specification to the total number of devices produced. For coated optical devices, random layer thickness variations decrease the yield. Variations in refractive index can also affect yields, but in this work we assume that changes in index are not as important as changes in thickness. A graphic method of yield analysis for optical coatings is presented. This method probes the sensitivity of the device performance against thickness variations and translates it into yield figures. Five examples of this analysis are provided including spectral and nonspectral applications.
Koss
V A
VA
Belkind
A
A
Vossen
J L
JL