Nd:YAG laser machining with multilevel resist kinoforms.
We demonstrate that resist kinoforms can be used for laser micromachining. A 10-level resist kinoform, manufactured by electron-beam lithography, was shown to have a diffraction efficiency of 68%. Nine diffraction-limited holes were simultaneously drilled in 0.10-mm-thick stainless steel. Marking in a silicon wafer is also demonstrated.
Ekberg
M
M
Larsson
M
M
Bolle
A
A
Hård
S
S