Measuring residual stress of anisotropic thin film by fast Fourier transform.
A new method for the measurement of anisotropic stress in thin films based on 2-D fast Fourier transform (FFT) is presented. A modified Twyman-Green interferometer was used for surface topography measurement. A fringe normalization technique was also used to improve the phase extraction technique efficiently. The measurement of anisotropic stress in obliquely deposited MgF(2) thin film was demonstrated.
Tien
Chuen-Lin
CL
Department of Electrical Engineering, Feng Chia University, Taichung, Taiwan. cltien@fcu.edu.tw
Zeng
Hung-Da
HD
D016880:Anisotropy; D005583:Fourier Analysis; D007368:Interferometry / Q000379:methods*; D008422:Materials Testing / Q000379:methods*; D013499:Surface Properties; D014025:Titanium / Q000737:chemistry*
D014025:Titanium