title: Surface-profile reconstruction using reflection differential phase-contrast microscopy.
abstract: The use of optical differential phase-contrast microscopy to obtain the surface profile of samples is outlined. The range of accurate feature height determination was calculated as a function of steepness of the side of the feature. Heights of thin features (height <0.1 microm) were accurately determined experimentally. Sample tilting and oblique stage scanning were required in order to determine the heights of thicker samples. Reconstructed profile heights were measured as a function of defocus.
authors: M R
authors: MR
authors: Atkinson
authors: A E
authors: AE
authors: Dixon
authors: S
authors: S
authors: Damaskinos