title: A method for evaluating subsurface damage in optical glass.
abstract: An alternative method for evaluating subsurface damage (SSD) in ground fused silica is presented. The method can acquire the knowledge of depth and morphology of subsurface damage at the same time. The fundamental support lent to the method is the fact that the depth of field reduces as the numerical aperture (NA)/magnification increases in optical microscopes. Large depth of field without undermining NA is preferred in most applications while the narrow range of focus depth is desired for our method. Using this method, we experimented on fused silica which was ground with bound-abrasive diamond wheels and the results show good agreement with the traditional method. The consistency indicates that the proposed method is practicable and effective in inspecting the subsurface damage in optical components.
authors: Fine Optical Engineering Research Center, Chengdu 610041, China. yargolee@163.com
authors: Yaguo
authors: Y
authors: Li
authors: Hao
authors: H
authors: Huang
authors: Ruiqing
authors: R
authors: Xie
authors: Haibo
authors: H
authors: Li
authors: Yan
authors: Y
authors: Deng
authors: Xianhua
authors: X
authors: Chen
authors: Jian
authors: J
authors: Wang
authors: Qiao
authors: Q
authors: Xu
authors: Wei
authors: W
authors: Yang
authors: Yinbiao
authors: Y
authors: Guo
mesh_terms: D000465:Algorithms; D018130:Diamond; D007909:Lenses; D008853:Microscopy / Q000295:instrumentation*; D012822:Silicon Dioxide; D013499:Surface Properties
chemical_list: D012822:Silicon Dioxide; D018130:Diamond