Profile measuring method based on reflection characteristics at a critical angle in a right-angle prism.
A new method is proposed for profile measurements using a right-angle prism. With this method, the distance to an object surface is measured by using triangulation based on a change of the critical angle of total reflection. An object surface is illuminated by a scanning laser beam and the incident angle of the scattered light into the prism is measured using the change in the critical angle. Three-dimensional profiles of objects with rough surfaces can be measured with high accuracy.
Matsumoto
T
T
Kitagawa
Y
Y
Adachi
M
M
Minemoto
T
T