High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform.
A new generation of Silicon-on-Insulator fiber-to-chip grating couplers which use a silicon overlay to enhance the directionality and thereby the coupling efficiency is presented. Devices are realized on a 200 mm wafer in a CMOS pilot line. The fabricated fiber couplers show a coupling efficiency of -1.6 dB and a 3 dB bandwidth of 80 nm.
Vermeulen
D
D
Photonics Research Group, Department of Information Technology, Ghent University-imec, B-9000 Ghent, Belgium. Diedrik.Vermeulen@intec.ugent.be
Selvaraja
S
S
Verheyen
P
P
Lepage
G
G
Bogaerts
W
W
Absil
P
P
Van Thourhout
D
D
Roelkens
G
G
D004867:Equipment Design; D005336:Fiber Optic Technology / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*; D055095:Optics and Photonics / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry*; D013696:Temperature
D012825:Silicon