Microstructure characterization by angle-resolved scatter and comparison to measurements made by other techniques.
The theory and measurement of angle-resolved scatter are described. Values of rms roughness that were obtained by using this technique to characterize four different materials are compared with values that were obtained by using a total integrated scatter measuring instrument, an optical profiler, and a mechanical profiler. The spatial frequency bandwidths and modulation transfer functions of the four instruments are different, and results are described in light of these differences.
Jacobson
R D
RD
Wilson
S R
SR
Al-Jumaily
G A
GA
McNeil
J R
JR
Bennett
J M
JM
Mattsson
L
L