title: Multi-objective genetic algorithm applied to spectroscopic ellipsometry of organic-inorganic hybrid planar waveguides.
abstract: The applicably of multi-objective optimization to ellipsometric data analysis is presented and a method to handle complex ellipsometric problems such as multi sample or multi angle analysis using multi-objective optimization is described. The performance of a multi-objective genetic algorithm (MOGA) is tested against a single objective common genetic algorithm (CGA). The procedure is applied to the characterization (refractive index and thickness) of planar waveguides intended for the production of optical components prepared sol-gel derived organic-inorganic hybrids, so-called di-ureasils, modified with zirconium tetrapropoxide, Zr(OPr(n))(4) deposited on silica on silicon substrates. The results show that for the same initial conditions, MOGA performs better than the CGA, showing a higher success rate in the task of finding the best final solution.
authors: Department of Physics, University of Aveiro, Campus de Santiago, 3810-193 Aveiro, Portugal.
authors: Vasco R
authors: VR
authors: Fernandes
authors: Carlos M S
authors: CM
authors: Vicente
authors: Naoya
authors: N
authors: Wada
authors: Paulo S
authors: PS
authors: André
authors: Rute A S
authors: RA
authors: Ferreira
mesh_terms: D000465:Algorithms; D012822:Silicon Dioxide / Q000737:chemistry*; D013057:Spectrum Analysis / Q000379:methods*; D015040:Zirconium / Q000737:chemistry*
chemical_list: D012822:Silicon Dioxide; D015040:Zirconium