title: High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform.
abstract: A new generation of Silicon-on-Insulator fiber-to-chip grating couplers which use a silicon overlay to enhance the directionality and thereby the coupling efficiency is presented. Devices are realized on a 200 mm wafer in a CMOS pilot line. The fabricated fiber couplers show a coupling efficiency of -1.6 dB and a 3 dB bandwidth of 80 nm.
authors: Photonics Research Group, Department of Information Technology, Ghent University-imec, B-9000 Ghent, Belgium. Diedrik.Vermeulen@intec.ugent.be
authors: D
authors: D
authors: Vermeulen
authors: S
authors: S
authors: Selvaraja
authors: P
authors: P
authors: Verheyen
authors: G
authors: G
authors: Lepage
authors: W
authors: W
authors: Bogaerts
authors: P
authors: P
authors: Absil
authors: D
authors: D
authors: Van Thourhout
authors: G
authors: G
authors: Roelkens
mesh_terms: D004867:Equipment Design; D005336:Fiber Optic Technology / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*; D055095:Optics and Photonics / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry*; D013696:Temperature
chemical_list: D012825:Silicon