Properties of mixed composition Si/ZnSe and ZnSe/LaF(3) infrared optical thin films.
The behavior of codeposited thin films of ZnSe/LaF(3) and Si/ZnSe has been investigated. Mixed ZnSe/LaF(3) films are polycrystalline with intermediate compositions with moderately high compressive stress (1500-2000 kg/cm(2)). Mixed Si/ZnSe films are amorphous with intermediate compositions with low compressive stress (<1000kg/cm(2)). Optical properties of the ZnSe/LaFcm(3) system vary monotonically with composition, but those of the Si/ZnSe system do not, which is explained by the possible chemical reaction of the two species.
Gluck
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NS
Taber
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DB
Heuer
J P
JP
Hall
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RL
Gunning
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WJ