Application of cooled spatial light modulator for high power nanosecond laser micromachining.
The application of a commercially available spatial light modulator (SLM) to control the spatial intensity distribution of a nanosecond pulsed laser for micromachining is described for the first time. Heat sinking is introduced to increase the average power handling capabilities of the SLM beyond recommended limits by the manufacturer. Complex intensity patterns are generated, using the Inverse Fourier Transform Algorithm, and example laser machining is demonstrated. The SLM enables both complex beam shaping and also beam steering.
Beck
Rainer J
RJ
School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UK. rjb8@hw.ac.uk
Parry
Jonathan P
JP
MacPherson
William N
WN
Waddie
Andrew
A
Weston
Nick J
NJ
Shephard
Jonathan D
JD
Hand
Duncan P
DP
D000465:Algorithms; D004867:Equipment Design; D005583:Fourier Analysis; D007834:Lasers; D008027:Light; D055616:Microtechnology / Q000295:instrumentation*