Nanoscopic patterned materials with tunable dimensions via atomic layer deposition on block copolymers.
Peng
Qing
Q
Energy Systems Division, Argonne National Laboratory, IL 60439, USA.
Tseng
Yu-Chih
YC
Darling
Seth B
SB
Elam
Jeffrey W
JW
D008670:Metals / Q000737:chemistry*; D049329:Nanostructures / Q000737:chemistry / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010087:Oxides / Q000737:chemistry*; D011108:Polymers / Q000737:chemistry*
D008670:Metals; D010087:Oxides; D011108:Polymers