Gas cascade amplification in ultra-high-resolution environmental scanning electron microcopy.
We describe a feedback mechanism in the gas cascade amplification process used in magnetic immersion lens environmental scanning electron microcopy (ESEM). Feedback dominates gas gain under the conditions typically used for ultra-high-resolution ESEM and gives rise to novel dependencies of the imaging signal and noise on microscope operating parameters. It is ascribed tentatively to the generation of free electrons upon de-excitation of metastable species in the gas cascade. The results have implications for optimization of ESEM systems for applications such as critical dimension metrology and real-time imaging of nanostructure growth by gas mediated electron beam induced deposition.
Toth
Milos
M
FEI Company, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124, USA. milos.toth@FEI.com
Thiel
Bradley L
BL
Knowles
W Ralph
WR