Determination of the refractive index of a-Si(1-x)C(x):H thin films from infrared absorption spectra.
The index of refraction of a-Si(1-x)C(x):H thin films obtained by dc magnetron sputtering was determined by means of IR absorption measurements. Structural and compositional changes that take place by increasing x make the film a mixture of different species, giving an effective value of the refractive index.
Lugomer
S
S
Maksimović
A
A
Gracin
D
D