title: Design and characterization of 2.45 GHz electron cyclotron resonance plasma source with magnetron magnetic field configuration for high flux of hyperthermal neutral beam.
abstract: A 2.45 GHz electron cyclotron resonance (ECR) source with a magnetron magnetic field configuration was developed to meet the demand of a hyperthermal neutral beam (HNB) flux on a substrate of more than 1x10(15) cm(-2) s(-1) for industrial applications. The parameters of the operating pressure, ion density, electron temperature, and distance between the neutralization plate and the substrate for the HNB source are specified in a theoretical analysis. The electron temperature and the ion density are measured to characterize the ECR HNB source using a Langmuir probe and optical emission spectroscopy. The parameters of the ECR HNB source are in good agreement with the theoretically specified parameters.
authors.affiliation: Department of Physics, Pohang University of Science and Technology, San 31, Hyoja-dong, Nam-gu, Pohang 790-784, Republic of Korea.
authors.forename: Seong Bong
authors.initials: SB
authors.lastname: Kim
authors.forename: Dae Chul
authors.initials: DC
authors.lastname: Kim
authors.forename: Won
authors.initials: W
authors.lastname: Namkung
authors.forename: Moohyun
authors.initials: M
authors.lastname: Cho
authors.forename: Suk Jae
authors.initials: SJ
authors.lastname: Yoo