title: Nanoscopic patterned materials with tunable dimensions via atomic layer deposition on block copolymers.
authors.affiliation: Energy Systems Division, Argonne National Laboratory, IL 60439, USA.
authors.forename: Qing
authors.initials: Q
authors.lastname: Peng
authors.forename: Yu-Chih
authors.initials: YC
authors.lastname: Tseng
authors.forename: Seth B
authors.initials: SB
authors.lastname: Darling
authors.forename: Jeffrey W
authors.initials: JW
authors.lastname: Elam
mesh_terms: D008670:Metals / Q000737:chemistry*; D049329:Nanostructures / Q000737:chemistry / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010087:Oxides / Q000737:chemistry*; D011108:Polymers / Q000737:chemistry*
chemical_list: D008670:Metals; D010087:Oxides; D011108:Polymers