title: Note: Multiscale scanning probe microscopy.
abstract: Combining the nanoscopic and macroscopic worlds is a serious challenge common to numerous scientific fields, from physics to biology. In this paper, we demonstrate nanometric resolution over a millimeter range by means of atomic-force microscopy using metrological stage. Nanometric repeatability and millimeter range open up the possibility of probing components and materials combining multiscale properties i.e., engineered nanomaterials. Multiscale probing is not limited to atomic-force microscopy and can be extended to any type of scanning probe technique in nanotechnology, including piezoforce microscopy, electrostatic-force microscopy, and scanning near-field optical microscopy.
authors.affiliation: Laboratoire d'Ingénierie des Systèmes, Université de Versailles Saint-Quentin, 45 Avenue des Etats Unis, 78035 Versailles, France. luc.chassagne@uvsq.fr
authors.forename: L
authors.initials: L
authors.lastname: Chassagne
authors.forename: S
authors.initials: S
authors.lastname: Blaize
authors.forename: P
authors.initials: P
authors.lastname: Ruaux
authors.forename: S
authors.initials: S
authors.lastname: Topçu
authors.forename: P
authors.initials: P
authors.lastname: Royer
authors.forename: Y
authors.initials: Y
authors.lastname: Alayli
authors.forename: G
authors.initials: G
authors.lastname: Lérondel
mesh_terms: D055595:Mechanical Phenomena; D018625:Microscopy, Atomic Force / Q000295:instrumentation*; D055616:Microtechnology / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*; D015203:Reproducibility of Results