Design and characterization of 2.45 GHz electron cyclotron resonance plasma source with magnetron magnetic field configuration for high flux of hyperthermal neutral beam.
A 2.45 GHz electron cyclotron resonance (ECR) source with a magnetron magnetic field configuration was developed to meet the demand of a hyperthermal neutral beam (HNB) flux on a substrate of more than 1x10(15) cm(-2) s(-1) for industrial applications. The parameters of the operating pressure, ion density, electron temperature, and distance between the neutralization plate and the substrate for the HNB source are specified in a theoretical analysis. The electron temperature and the ion density are measured to characterize the ECR HNB source using a Langmuir probe and optical emission spectroscopy. The parameters of the ECR HNB source are in good agreement with the theoretically specified parameters.
Kim
Seong Bong
SB
Department of Physics, Pohang University of Science and Technology, San 31, Hyoja-dong, Nam-gu, Pohang 790-784, Republic of Korea.
Kim
Dae Chul
DC
Namkung
Won
W
Cho
Moohyun
M
Yoo
Suk Jae
SJ