title: Continuous-relief diffractive optical elements for two-dimensional array generation.
abstract: Continuous surface-relief diffractive optical elements for two-dimensional array generation (fan-out) are designed and fabricated. Separable and nonseparable solutions for the two-dimensional element design are compared. The phase-grating microstructures are generated by laser-beam writing lithography in a single exposure step and converted to nickel shims by electroplating, enabling low-cost replicas to be produced by using laboratory and commercial replication processes. Results are presented for a 9 x 9 fan-out diffractive optical element with a measured efficiency of 94% and an overall uniformity within +/-8%; replicas in epoxy have the same efficiency and a uniformity of +/-15%.
authors.forename: M T
authors.initials: MT
authors.lastname: Gale
authors.forename: M
authors.initials: M
authors.lastname: Rossi
authors.forename: H
authors.initials: H
authors.lastname: Schütz
authors.forename: P
authors.initials: P
authors.lastname: Ehbets
authors.forename: H P
authors.initials: HP
authors.lastname: Herzig
authors.forename: D
authors.initials: D
authors.lastname: Prongué