High-pressure chemical deposition for void-free filling of extreme aspect ratio templates.
Baril
Neil F
NF
Department of Chemistry, Department of Materials Science and Engineeering and Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA.
Keshavarzi
Banafsheh
B
Sparks
Justin R
JR
Krishnamurthi
Mahesh
M
Temnykh
Ivan
I
Sazio
Pier J A
PJ
Peacock
Anna C
AC
Borhan
Ali
A
Gopalan
Venkatraman
V
Badding
John V
JV
D008859:Microscopy, Polarization / Q000379:methods*; D055100:Optical Fibers / Q000145:classification* / Q000191:economics / Q000639:trends; D011312:Pressure; D012825:Silicon / Q000737:chemistry*
D012825:Silicon