Long-pulse excimer laser with a variable reflectivity mirror resonator.
The performance of a 1-J XeCl excimer laser with a variable reflectivity mirror unstable resonator optical cavity is described. The output beam exhibits a flat profile in the near field and a far-field energy distribution with approximately 63% of the energy contained within an angle of 39 microrad (1/e(2) spot size).
McKee
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TJ
Fendrykowski
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