title: Parallel optical readout of cantilever arrays in dynamic mode.
abstract: Parallel frequency readout of an array of cantilevers is demonstrated using optical beam deflection with a single laser-diode pair. Multi-frequency addressing makes the individual nanomechanical response of each cantilever distinguishable within the received signal. Addressing is accomplished by exciting the array with the sum of all cantilever resonant frequencies. This technique requires considerably less hardware compared to other parallel optical readout techniques. Readout is demonstrated in beam deflection mode and interference mode. Many cantilevers can be readout in parallel, limited by the oscillators' quality factor and available bandwidth. The proposed technique facilitates parallelism in applications at the nano-scale, including probe-based data storage and biological sensing.
authors.affiliation: MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands.
authors.forename: W W
authors.initials: WW
authors.lastname: Koelmans
authors.forename: J
authors.initials: J
authors.lastname: van Honschoten
authors.forename: J
authors.initials: J
authors.lastname: de Vries
authors.forename: P
authors.initials: P
authors.lastname: Vettiger
authors.forename: L
authors.initials: L
authors.lastname: Abelmann
authors.forename: M C
authors.initials: MC
authors.lastname: Elwenspoek
mesh_terms: D004574:Electromagnetic Fields; D007368:Interferometry; D056656:Lab-On-A-Chip Devices; D036103:Nanotechnology / Q000379:methods*; D055095:Optics and Photonics / Q000295:instrumentation / Q000379:methods