Laser driver for soft-x-ray projection lithography.
A design of a diode-pumped Nd:YAG laser for use as the driver for a soft-x-ray projection lithography system is described. This laser will output up to 1 J per pulse with a 2- to 5-ns pulse duration and a 400-Hz pulse repetition rate. The design employs microchannel-cooled diode laser arrays, zigzag slab energy storage, a regenerative amplifier cavity that uses phase conjugator beam correction for near-diffraction-limited beam quality, and stimulated Brillouin scattering pulse compression to achieve the required pulse length.
Hackel
L A
LA
Beach
R J
RJ
Dane
C B
CB
Zapata
L E
LE