title: Investigation of distortion and damage of molybdenum†silicon multilayer reflective coatings with high-intensity ultraviolet radiation.
abstract: Studies are performed to determine an upper limit on the optical damage threshold of a soft-x-ray molybdenum-silicon multilayer reflective coating by the use of a 308-nm, 15-ns pulse from a Xe-Cl excimer laser in order to simulate the potential damage induced by the x-ray flux from a pulsed laser-produced plasma. Experimental results yield a value of 0.26 J/cm(2) to produce visible signs of damage as determined by optical microscopy. Experiments are conducted first on silicon, as a reference point of a bulk material, and then applied to molybdenum-silicon in an effort to facilitate a theoretical comparison between a simple and a more complicated material. Theoretical predictions are in reasonable agreement with experimental results, but suggest that a lower value of 0.085 J/cm(2) might cause significant thermal-induced damage.
authors.forename: H A
authors.initials: HA
authors.lastname: Bender
authors.forename: W T
authors.initials: WT
authors.lastname: Silfvast
authors.forename: K M
authors.initials: KM
authors.lastname: Beck
authors.forename: R K
authors.initials: RK
authors.lastname: Singh