Controllable growth of nanoscale conductive filaments in solid-electrolyte-based ReRAM by using a metal nanocrystal covered bottom electrode.
Resistive memory (ReRAM) based on a solid-electrolyte insulator is a promising nanoscale device and has great potentials in nonvolatile memory, analog circuits, and neuromorphic applications. The underlying resistive switching (RS) mechanism of ReRAM is suggested to be the formation and rupture of nanoscale conductive filament (CF) inside the solid-electrolyte layer. However, the random nature of the nucleation and growth of the CF makes their formation difficult to control, which is a major obstacle for ReRAM performance improvement. Here, we report a novel approach to resolve this challenge by adopting a metal nanocrystal (NC) covered bottom electrode (BE) to replace the conventional ReRAM BE. As a demonstration vehicle, a Ag/ZrO(2)/Cu NC/Pt structure is prepared and the Cu NC covered Pt BE can control CF nucleation and growth to provide superior uniformity of RS properties. The controllable growth of nanoscale CF bridges between Cu NC and Ag top electrode has been vividly observed by transmission electron microscopy (TEM). On the basis of energy-dispersive X-ray spectroscopy (EDS) and elemental mapping analyses, we further confirm that the chemical contents of the CF are mainly Ag atoms. These testing/metrology results are consistent with the simulation results of electric-field distribution, showing that the electric field will enhance and concentrate on the NC sites and control location and orientation of Ag CFs.
Liu
Qi
Q
Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.
Long
Shibing
S
Lv
Hangbing
H
Wang
Wei
W
Niu
Jiebin
J
Huo
Zongliang
Z
Chen
Junning
J
Liu
Ming
M
D004553:Electric Conductivity; D004566:Electrodes; D004573:Electrolytes; D053768:Metal Nanoparticles / Q000737:chemistry*; D046529:Microscopy, Electron, Transmission / Q000379:methods; D036103:Nanotechnology / Q000379:methods*; D010984:Platinum / Q000737:chemistry; D012666:Semiconductors; D012834:Silver / Q000737:chemistry; D013696:Temperature; D014965:X-Rays; D015040:Zirconium / Q000737:chemistry
D004573:Electrolytes; D012834:Silver; D010984:Platinum; D015040:Zirconium; C028541:zirconium oxide