title: Soft-x-ray projection lithography experiments using Schwarzschild imaging optics.
abstract: Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment stability, is described.
authors.forename: D A
authors.initials: DA
authors.lastname: Tichenor
authors.forename: G D
authors.initials: GD
authors.lastname: Kubiak
authors.forename: M E
authors.initials: ME
authors.lastname: Malinowski
authors.forename: R H
authors.initials: RH
authors.lastname: Stulen
authors.forename: S J
authors.initials: SJ
authors.lastname: Haney
authors.forename: K W
authors.initials: KW
authors.lastname: Berger
authors.forename: L A
authors.initials: LA
authors.lastname: Brown
authors.forename: W C
authors.initials: WC
authors.lastname: Sweatt
authors.forename: J E
authors.initials: JE
authors.lastname: Bjorkholm
authors.forename: R R
authors.initials: RR
authors.lastname: Freeman
authors.forename: M D
authors.initials: MD
authors.lastname: Himel
authors.forename: A A
authors.initials: AA
authors.lastname: Macdowell
authors.forename: D M
authors.initials: DM
authors.lastname: Tennant
authors.forename: R
authors.initials: R
authors.lastname: Wood
authors.forename: J
authors.initials: J
authors.lastname: Bokor
authors.forename: T E
authors.initials: TE
authors.lastname: Jewell
authors.forename: W M
authors.initials: WM
authors.lastname: Mansfield
authors.forename: W K
authors.initials: WK
authors.lastname: Waskiewicz
authors.forename: D L
authors.initials: DL
authors.lastname: White
authors.forename: D L
authors.initials: DL
authors.lastname: Windt