Empirical relations among scattering, roughness parameters, and thickness of aluminum films.
Experimental measurements of the angular distribution of scattering and scanning electron microscopy pictures of thin aluminum films were used to relate the total integrated scattering and the statistical parameters of the surface roughness to the film thickness.
Larruquert
J I
JI
Méndez
J A
JA
Aznárez
J A
JA