Soft-x-ray projection lithography experiments using Schwarzschild imaging optics.
Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment stability, is described.
Tichenor
D A
DA
Kubiak
G D
GD
Malinowski
M E
ME
Stulen
R H
RH
Haney
S J
SJ
Berger
K W
KW
Brown
L A
LA
Sweatt
W C
WC
Bjorkholm
J E
JE
Freeman
R R
RR
Himel
M D
MD
Macdowell
A A
AA
Tennant
D M
DM
Wood
R
R
Bokor
J
J
Jewell
T E
TE
Mansfield
W M
WM
Waskiewicz
W K
WK
White
D L
DL
Windt
D L
DL