title: Layer-by-layer transfer of multiple, large area sheets of graphene grown in multilayer stacks on a single SiC wafer.
abstract: Here we report a technique for transferring graphene layers, one by one, from a multilayer deposit formed by epitaxial growth on the Si-terminated face of a 6H-SiC substrate. The procedure uses a bilayer film of palladium/polyimide deposited onto the graphene coated SiC, which is then mechanically peeled away and placed on a target substrate. Orthogonal etching of the palladium and polyimide leaves isolated sheets of graphene with sizes of square centimeters. Repeating these steps transfers additional sheets from the same SiC substrate. Raman spectroscopy, scanning tunneling spectroscopy, low-energy electron diffraction and X-ray photoelectron spectroscopy, together with scanning tunneling, atomic force, optical, and scanning electron microscopy reveal key properties of the materials. The sheet resistances determined from measurements of four point probe devices were found to be ∼2 kΩ/square, close to expectation. Graphene crossbar structures fabricated in stacked configurations demonstrate the versatility of the procedures.
authors.affiliation: Department of Chemistry, University of Illinois at Urbana−Champaign, 1206 West Green Street, Urbana, Illinois 61801, USA.
authors.forename: Sakulsuk
authors.initials: S
authors.lastname: Unarunotai
authors.forename: Justin C
authors.initials: JC
authors.lastname: Koepke
authors.forename: Cheng-Lin
authors.initials: CL
authors.lastname: Tsai
authors.forename: Frank
authors.initials: F
authors.lastname: Du
authors.forename: Cesar E
authors.initials: CE
authors.lastname: Chialvo
authors.forename: Yuya
authors.initials: Y
authors.lastname: Murata
authors.forename: Rick
authors.initials: R
authors.lastname: Haasch
authors.forename: Ivan
authors.initials: I
authors.lastname: Petrov
authors.forename: Nadya
authors.initials: N
authors.lastname: Mason
authors.forename: Moonsub
authors.initials: M
authors.lastname: Shim
authors.forename: Joseph
authors.initials: J
authors.lastname: Lyding
authors.forename: John A
authors.initials: JA
authors.lastname: Rogers