title: Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding.
abstract: Micro-optics is usually associated with planar waveguides or integrated optical circuits. In this case the propagation of light is restricted to one or two dimensions, and the three-dimensional nature of light propagation is disregarded. We present a method of fabricating three-dimensional micro-optical components by the so-called LIGA process, a lithography, electroforming, and plastic molding process in which poly(methyl methacrylate) is structured by high-energy synchrotron radiation. We demonstrate an experimental system of image formation that uses microprisms and microlenses for a threedimensional microintegration of optical components.
authors.forename: K H
authors.initials: KH
authors.lastname: Brenner
authors.forename: M
authors.initials: M
authors.lastname: Kufner
authors.forename: S
authors.initials: S
authors.lastname: Kufner
authors.forename: J
authors.initials: J
authors.lastname: Moisel
authors.forename: A
authors.initials: A
authors.lastname: Müller
authors.forename: S
authors.initials: S
authors.lastname: Sinzinger
authors.forename: M
authors.initials: M
authors.lastname: Testorf
authors.forename: J
authors.initials: J
authors.lastname: Göttert
authors.forename: J
authors.initials: J
authors.lastname: Mohr