title: Front-end design issues in soft-x-ray projection lithography.
abstract: We present a protocol for the design of an illumination system (front end) for a soft-x-ray projection lithography tool. The protocol is illustrated by specific front-end designs. The most complete design analysis is for a laser-driven system. Other drivers; undulator, synchrotron orbital radiation, and plasma discharge, are also discussed.
authors.forename: N M
authors.initials: NM
authors.lastname: Ceglio
authors.forename: A M
authors.initials: AM
authors.lastname: Hawryluk
authors.forename: G E
authors.initials: GE
authors.lastname: Sommargren