title: Conformal transparent conducting oxides on black silicon.
authors.affiliation: Martin-Luther-University Halle-Wittenberg, 06120 Halle, Germany. martin.otto@physik.uni-halle.de
authors.forename: Martin
authors.initials: M
authors.lastname: Otto
authors.forename: Matthias
authors.initials: M
authors.lastname: Kroll
authors.forename: Thomas
authors.initials: T
authors.lastname: Käsebier
authors.forename: Seung-Mo
authors.initials: SM
authors.lastname: Lee
authors.forename: Matti
authors.initials: M
authors.lastname: Putkonen
authors.forename: Roland
authors.initials: R
authors.lastname: Salzer
authors.forename: Paul T
authors.initials: PT
authors.lastname: Miclea
authors.forename: Ralf B
authors.initials: RB
authors.lastname: Wehrspohn
mesh_terms: D004553:Electric Conductivity; D055620:Optical Phenomena; D012825:Silicon / Q000737:chemistry*; D015034:Zinc Oxide / Q000737:chemistry*
chemical_list: D015034:Zinc Oxide; D012825:Silicon