Photoresist templates for wafer-scale defect-free evaporative lithography.
Tang
Xiaosong
X
Institute of Materials Research and Engineering, Singapore.
O'Shea
Sean J
SJ
Vakarelski
Ivan U
IU
D006046:Gold / Q000737:chemistry*; D008027:Light; D055616:Microtechnology / Q000295:instrumentation / Q000379:methods*; D053758:Nanoparticles / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods
D006046:Gold