Front-end design issues in soft-x-ray projection lithography.
We present a protocol for the design of an illumination system (front end) for a soft-x-ray projection lithography tool. The protocol is illustrated by specific front-end designs. The most complete design analysis is for a laser-driven system. Other drivers; undulator, synchrotron orbital radiation, and plasma discharge, are also discussed.
Ceglio
N M
NM
Hawryluk
A M
AM
Sommargren
G E
GE