Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding.
Micro-optics is usually associated with planar waveguides or integrated optical circuits. In this case the propagation of light is restricted to one or two dimensions, and the three-dimensional nature of light propagation is disregarded. We present a method of fabricating three-dimensional micro-optical components by the so-called LIGA process, a lithography, electroforming, and plastic molding process in which poly(methyl methacrylate) is structured by high-energy synchrotron radiation. We demonstrate an experimental system of image formation that uses microprisms and microlenses for a threedimensional microintegration of optical components.
Brenner
K H
KH
Kufner
M
M
Kufner
S
S
Moisel
J
J
Müller
A
A
Sinzinger
S
S
Testorf
M
M
Göttert
J
J
Mohr
J
J