Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source.
A prototype high-speed tape target transport is constructed for use in a high-repetition-rate laser plasma source. To reduce plasma debris, a 1000-5000-A-thick film of target material is supported by thin Mylar tape backing. Tape is transported to the laser focal volume at a maximum velocity of 356 cm/s, a rate sufficient to accommodate laser repetition rates of 1 kHz. The transport is fully vacuum compatible and can be retracted and then isolated from the laser plasma vacuum enclosure during tape reel replacement. The operating characteristics of the transport are described.
Haney
S J
SJ
Berger
K W
KW
Kubiak
G D
GD
Rockett
P D
PD
Hunter
J
J