Low-radiation-damage multilayer coatings for the soft-x-ray region.
Highly reflecting multilayer coatings used to form resonant cavities for soft-x-ray lasers or for other high-intensity applications (free-electron lasers, x-ray projection lithography, etc.) can be destroyed by strong electric fields generated at the multilayer boundaries. Electric-field strengths can be reduced at the boundaries by altering slightly the layer thicknesses of the final or topmost layers. Calculations are presented showing reduced field strengths caused by altering final-layer thicknesses.
Hunter
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