Soft-x-ray projection imaging with a 1:1 ring-field optic.
A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-µm features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 µm, probably because of the presence of substrate figuring errors.
Macdowell
A A
AA
Bjorkholm
J E
JE
Early
K
K
Freeman
R R
RR
Himel
M D
MD
Mulgrew
P P
PP
Szeto
L H
LH
Taylor
D W
DW
Tennant
D M
DM
Wood Ii
O R
OR
Bokor
J
J
Eichner
L
L
Jewell
T E
TE
Waskiewicz
W K
WK
White
D L
DL
Windt
D L
DL
D'Souza
R M
RM
Silfvast
W T
WT
Zernike
F
F