title: Mirror quality and efficiency improvements of reflective spatial light modulators by the use of dielectric coatings and chemical-mechanical polishing.
abstract: To date, silicon backplane spatial light modulators have been characterized by poor-quality mirrors. Hillock formation during metal sintering has been identified as the source of this problem. Here hillock elimination is achieved by constraining the metal with a low-temperature plasma-enhanced chemicalvapor deposition silicon dioxide coating. A double-layer metallization procedure increases the silicon area available for circuitry and improves the mirror fill factor. Second-layer metal mirrors require a flat, intermediate dielectric substrate. Chemical-mechanical polishing is demonstrated to provide the flatness necessary to achieve high optical quality.
authors.forename: A
authors.initials: A
authors.lastname: O'Hara
authors.forename: J R
authors.initials: JR
authors.lastname: Hannah
authors.forename: I
authors.initials: I
authors.lastname: Underwood
authors.forename: D G
authors.initials: DG
authors.lastname: Vass
authors.forename: R J
authors.initials: RJ
authors.lastname: Holwill