title: Soft-x-ray projection imaging with a 1:1 ring-field optic.
abstract: A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-µm features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 µm, probably because of the presence of substrate figuring errors.
authors.forename: A A
authors.initials: AA
authors.lastname: Macdowell
authors.forename: J E
authors.initials: JE
authors.lastname: Bjorkholm
authors.forename: K
authors.initials: K
authors.lastname: Early
authors.forename: R R
authors.initials: RR
authors.lastname: Freeman
authors.forename: M D
authors.initials: MD
authors.lastname: Himel
authors.forename: P P
authors.initials: PP
authors.lastname: Mulgrew
authors.forename: L H
authors.initials: LH
authors.lastname: Szeto
authors.forename: D W
authors.initials: DW
authors.lastname: Taylor
authors.forename: D M
authors.initials: DM
authors.lastname: Tennant
authors.forename: O R
authors.initials: OR
authors.lastname: Wood Ii
authors.forename: J
authors.initials: J
authors.lastname: Bokor
authors.forename: L
authors.initials: L
authors.lastname: Eichner
authors.forename: T E
authors.initials: TE
authors.lastname: Jewell
authors.forename: W K
authors.initials: WK
authors.lastname: Waskiewicz
authors.forename: D L
authors.initials: DL
authors.lastname: White
authors.forename: D L
authors.initials: DL
authors.lastname: Windt
authors.forename: R M
authors.initials: RM
authors.lastname: D'Souza
authors.forename: W T
authors.initials: WT
authors.lastname: Silfvast
authors.forename: F
authors.initials: F
authors.lastname: Zernike