title: Neural-network laser radar.
abstract: A laser radar whose resolution is greater than 1 µm is reported. We present the radar results when they are used for such purposes as determining the size of a void inside a silicon wafer, profiling a cross-sectional pattern of an optical fiber, studying the birefringence of a lithium-niobate crystal, or finding a fault in an optical guide in an optical integrated-circuit wafer. Neural-network theory was used in processing the radar signal. Radar processing based on neural-network theory gave significantly superior resolution compared with Fourier-transform-based processing.
authors.forename: K
authors.initials: K
authors.lastname: Lizuka
authors.forename: S
authors.initials: S
authors.lastname: Fujii