title: Line ratio and image formation in photolithographic projectors.
abstract: The line ratio l (the ratio of the subresolution line image irradiance extremum normalized to the aberration-free case) is explored as a means of assessing aberration balance and as a line-imaging criterion for a photolithographic projection system.
authors.forename: J E
authors.initials: JE
authors.lastname: Gortych
authors.forename: D S
authors.initials: DS
authors.lastname: Goodman