title: Focusing waveguide mirror with a tapered edge.
abstract: We propose a focusing waveguide mirror with a shallow tapered edge in a slab waveguide and demonstrate it by planar processes and wet etching. A light beam 2 mm wide is focused to 6.5 µm full width at half-maximum at a wavelength of 0.6328 µm. A reflectivity of higher than 90% at the tapered edge is obtained. The inclination ratio of the tapered mirror edge is 1:90. Fairly good correspondence between measured and calculated focused spot sizes is obtained.
authors.forename: S
authors.initials: S
authors.lastname: Misawa
authors.forename: M
authors.initials: M
authors.lastname: Aoki
authors.forename: S
authors.initials: S
authors.lastname: Fujita
authors.forename: A
authors.initials: A
authors.lastname: Takaura
authors.forename: T
authors.initials: T
authors.lastname: Kihara
authors.forename: K
authors.initials: K
authors.lastname: Yokomori
authors.forename: H
authors.initials: H
authors.lastname: Funato