title: Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing.
abstract: We demonstrate, for the first time to the best of our knowledge, fabrication of three-dimensional microfluidic channels with arbitrary lengths and configurations inside glass by femtosecond laser direct writing. The main fabrication process includes two steps: (1) direct formation of hollow microchannels in a porous glass substrate immersed in water by femtosecond laser ablation and (2) postannealing of the glass substrate at ∼1150°C by which the porous glass can be consolidated. We show that a square-wavelike channel with a total length of ∼1.4 cm and a diameter of ∼64 μm can be easily produced ∼250 μm beneath the glass surface.
authors.affiliation: State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China.
authors.forename: Yang
authors.initials: Y
authors.lastname: Liao
authors.forename: Yongfeng
authors.initials: Y
authors.lastname: Ju
authors.forename: Long
authors.initials: L
authors.lastname: Zhang
authors.forename: Fei
authors.initials: F
authors.lastname: He
authors.forename: Qiang
authors.initials: Q
authors.lastname: Zhang
authors.forename: Yinglong
authors.initials: Y
authors.lastname: Shen
authors.forename: Danping
authors.initials: D
authors.lastname: Chen
authors.forename: Ya
authors.initials: Y
authors.lastname: Cheng
authors.forename: Zhizhan
authors.initials: Z
authors.lastname: Xu
authors.forename: Koji
authors.initials: K
authors.lastname: Sugioka
authors.forename: Katsumi
authors.initials: K
authors.lastname: Midorikawa
mesh_terms: D001881:Borates / Q000737:chemistry; D005898:Glass / Q000737:chemistry*; D007834:Lasers; D044085:Microfluidics / Q000295:instrumentation* / Q000379:methods; D016062:Porosity; D017640:Silicates / Q000737:chemistry; D012822:Silicon Dioxide / Q000737:chemistry; D013997:Time Factors
chemical_list: D001881:Borates; D017640:Silicates; D012822:Silicon Dioxide