title: Nanoscale energy-filtered scanning confocal electron microscopy using a double-aberration-corrected transmission electron microscope.
abstract: We demonstrate that a transmission electron microscope fitted with two spherical-aberration correctors can be operated as an energy-filtered scanning confocal electron microscope. A method for establishing this mode is described and initial results showing 3D chemical mapping with nanoscale sensitivity to height and thickness changes in a carbon film are presented. Importantly, uncorrected chromatic aberration does not limit the depth resolution of this technique and moreover performs an energy-filtering role, which is explained in terms of a combined depth and energy-loss response function.
authors.affiliation: Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom.
authors.forename: Peng
authors.initials: P
authors.lastname: Wang
authors.forename: Gavin
authors.initials: G
authors.lastname: Behan
authors.forename: Masaki
authors.initials: M
authors.lastname: Takeguchi
authors.forename: Ayako
authors.initials: A
authors.lastname: Hashimoto
authors.forename: Kazutaka
authors.initials: K
authors.lastname: Mitsuishi
authors.forename: Masayuki
authors.initials: M
authors.lastname: Shimojo
authors.forename: Angus I
authors.initials: AI
authors.lastname: Kirkland
authors.forename: Peter D
authors.initials: PD
authors.lastname: Nellist