Micro-machined high-frequency (80 MHz) PZT thick film linear arrays.
This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency.
Zhou
Qifa
Q
Resource Center for Medical Ultrasonic Transducer Technology, University of Southern California, Los Angeles, CA, USA.
Wu
Dawei
D
Liu
Changgeng
C
Zhu
Benpeng
B
Djuth
Frank
F
Shung
K
K
D003198:Computer Simulation; D007854:Lead / Q000737:chemistry*; D055616:Microtechnology / Q000379:methods*; D011312:Pressure; D014025:Titanium / Q000737:chemistry*; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation*; D015040:Zirconium / Q000737:chemistry*
C065536:lead titanate zirconate; D007854:Lead; D015040:Zirconium; D014025:Titanium