title: Diversity and feasibility of direct bonding: a survey of a dedicated optical technology.
abstract: The aim of this paper is to review almost a decade of direct-bonding activities at Philips Research including the diversity and feasibility of direct bonding. The bondability of a material is determined by its geometrical shape and mechanical, physical, and chemical surface states. Physically direct bonding provides a vacuumtight bond, which is jointless and glueless, and it permits engineering of the interfaces to be bonded. Layers can be buried, and reflective-lossless bonds between optical elements can be created. A variety of materials are investigated: (refractory) metals, a semimetal, boron, diamond, a carbide, fluorides, nitrides, oxides, and a chalcogenide. The applications that we describe relate to interface engineering, waveguiding, and the direct bonding of a fiber plate.
authors.forename: J
authors.initials: J
authors.lastname: Haisma
authors.forename: B A
authors.initials: BA
authors.lastname: Spierings
authors.forename: U K
authors.initials: UK
authors.lastname: Biermann
authors.forename: A A
authors.initials: AA
authors.lastname: van Gorkum