title: Demonstration of submicron square-like silicon waveguide using optimized LOCOS process.
authors.affiliation: Department of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem, 91904, Israel.
authors.forename: Boris
authors.initials: B
authors.lastname: Desiatov
authors.forename: Ilya
authors.initials: I
authors.lastname: Goykhman
authors.forename: Uriel
authors.initials: U
authors.lastname: Levy