Parametric smoothing model for visco-elastic polishing tools.
Kim
Dae Wook
DW
College of Optical Sciences, University of Arizona, 1630 E University Blvd, Tucson, Arizona 85721, USA. letter2dwk@hotmail.com
Park
Won Hyun
WH
An
Hyun Kyoung
HK
Burge
James H
JH