Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates.
Ghaffari
Afshin
A
Microelectronics Research Center, The University of Texas at Austin, Austin, TX 78758, USA.
Hosseini
Amir
A
Xu
Xiaochuan
X
Kwong
David
D
Subbaraman
Harish
H
Chen
Ray T
RT