title: Fuzzy regression modeling for tool performance prediction and degradation detection.
authors.affiliation: Singapore Institute of Manufacturing Technology, Singapore 638075, Singapore. xli@simtech.a-star.edu.sg
authors.forename: X
authors.initials: X
authors.lastname: Li
authors.forename: M J
authors.initials: MJ
authors.lastname: Er
authors.forename: B S
authors.initials: BS
authors.lastname: Lim
authors.forename: J H
authors.initials: JH
authors.lastname: Zhou
authors.forename: O P
authors.initials: OP
authors.lastname: Gan
authors.forename: L
authors.initials: L
authors.lastname: Rutkowski