title: Effects of surface properties of different substrates on fine structure of plasma-polymerized SiOCH films prepared from hexamethyldisiloxane (HMDSO).
authors.affiliation: R&D Center for Membrane Technology, Department of Chemical Engineering, Chung Yuan University, Chung-Li 32023, Taiwan.
authors.forename: Chia-Hao
authors.initials: CH
authors.lastname: Lo
authors.forename: Kuo-Sung
authors.initials: KS
authors.lastname: Liao
authors.forename: Manuel
authors.initials: M
authors.lastname: De Guzman
authors.forename: Vincent
authors.initials: V
authors.lastname: Rouessac
authors.forename: Ta-Chin
authors.initials: TC
authors.lastname: Wei
authors.forename: Kueir-Rarn
authors.initials: KR
authors.lastname: Lee
authors.forename: Juin-Yih
authors.initials: JY
authors.lastname: Lai