title: Parametric smoothing model for visco-elastic polishing tools.
authors.affiliation: College of Optical Sciences, University of Arizona, 1630 E University Blvd, Tucson, Arizona 85721, USA. letter2dwk@hotmail.com
authors.forename: Dae Wook
authors.initials: DW
authors.lastname: Kim
authors.forename: Won Hyun
authors.initials: WH
authors.lastname: Park
authors.forename: Hyun Kyoung
authors.initials: HK
authors.lastname: An
authors.forename: James H
authors.initials: JH
authors.lastname: Burge