title: Three-dimensional evaluation of an independent multi-walled carbon nanotube probe by tomography with high-resolution transmission electron microscope.
authors.affiliation: Hitachi High-Tech Manufacturing & Service Corporation, 1040 Ichige, Hitachinaka, Ibaraki 312-0033, Japan. tanigaki-toshiaki@naka.hitachi-hitec.com
authors.forename: Toshiaki
authors.initials: T
authors.lastname: Tanigaki
authors.forename: Kishio
authors.initials: K
authors.lastname: Hidaka
authors.forename: Motoyuki
authors.initials: M
authors.lastname: Hirooka
authors.forename: Toshihiko
authors.initials: T
authors.lastname: Nakata