title: Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light.
authors.affiliation: Laboratoire Chimie Physique-Matière Rayonnement, UPMC Université Paris 06, CNRS UMR 7614, Paris, France.
authors.forename: Min-Hui
authors.initials: MH
authors.lastname: Hu
authors.forename: Karine
authors.initials: K
authors.lastname: Le Guen
authors.forename: Jean-Michel
authors.initials: JM
authors.lastname: André
authors.forename: Philippe
authors.initials: P
authors.lastname: Jonnard
authors.forename: Evgueni
authors.initials: E
authors.lastname: Meltchakov
authors.forename: Franck
authors.initials: F
authors.lastname: Delmotte
authors.forename: Anouk
authors.initials: A
authors.lastname: Galtayries