Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method.
Chen
Feng
F
Key Laboratory for Physical Electronics and Devices of the Ministry of Education, School of Electronics & Information Engineering, Xi'an Jiaotong University, Xi'an, China. chenfeng@mail.xjtu.edu.cn
Liu
Hewei
H
Yang
Qing
Q
Wang
Xianhua
X
Hou
Cong
C
Bian
Hao
H
Liang
Weiwei
W
Si
Jinhai
J
Hou
Xun
X