title: Nanometrology optical ruler imaging system using diffraction from a quasiperiodic structure.
authors.affiliation: SonicMEMS Laboratory, School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA. ny22@cornell.edu
authors.forename: Norimasa
authors.initials: N
authors.lastname: Yoshimizu
authors.forename: Amit
authors.initials: A
authors.lastname: Lal
authors.forename: Clifford R
authors.initials: CR
authors.lastname: Pollock