Effects of surface properties of different substrates on fine structure of plasma-polymerized SiOCH films prepared from hexamethyldisiloxane (HMDSO).
Lo
Chia-Hao
CH
R&D Center for Membrane Technology, Department of Chemical Engineering, Chung Yuan University, Chung-Li 32023, Taiwan.
Liao
Kuo-Sung
KS
De Guzman
Manuel
M
Rouessac
Vincent
V
Wei
Ta-Chin
TC
Lee
Kueir-Rarn
KR
Lai
Juin-Yih
JY