Step and repeat UV nanoimprint lithography on pre-spin coated resist film: a promising route for fabricating nanodevices.
Peroz
C
C
aBeam Technologies, Castro Valley, CA 94546, USA. cp@abeamtech.com
Dhuey
S
S
Volger
M
M
Wu
Y
Y
Olynick
D
D
Cabrini
S
S