Beam-induced damage on diffractive hard X-ray optics.
The issue of beam-induced damage on diffractive hard X-ray optics is addressed. For this purpose a systematic study on the radiation damage induced by a high-power X-ray beam is carried out in both ambient and inert atmospheres. Diffraction gratings fabricated by three different techniques are considered: electroplated Au gratings both with and without the polymer mold, and Ir-coated Si gratings. The beam-induced damage is monitored by X-ray diffraction and evaluated using scanning electron microscopy.
Nygård
K
K
Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland. kim.nygard@psi.ch
Gorelick
S
S
Vila-Comamala
J
J
Färm
E
E
Bergamaschi
A
A
Cervellino
A
A
Gozzo
F
F
Patterson
B D
BD
Ritala
M
M
David
C
C