Three-channel Homodyne Interferometer.
A three-channel homodyne interferometer based on a structured delay plate is described. Detection and data acquisition are performed with standard optoelectronics in a PC environment. The device, which is used as a displacement sensor, features sub-nanometric sensitivity.
Greco
V
V
Iemmi
C
C
Ledesma
S
S
Molesini
G
G
Quercioli
F
F