Non-reflecting silicon and polymer surfaces by plasma etching and replication.
Sainiemi
Lauri
L
Department of Materials Science and Engineering, Aalto University School of Science and Technology, P.O. Box 16200, FIN-00076 Aalto, Finland. Lauri.Sainiemi@tkk.fi
Jokinen
Ville
V
Shah
Ali
A
Shpak
Maksim
M
Aura
Susanna
S
Suvanto
Pia
P
Franssila
Sami
S
D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D008027:Light; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000379:methods*; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties
D004129:Dimethylpolysiloxanes; D012825:Silicon