Optical zooming interferometer for subnanometer positioning using an optical frequency comb.
A high-precision positioning stage based on an optical zooming interferometer is proposed. Two external-cavity diode lasers, stabilized to a femtosecond optical frequency comb, are used as optical sources. The zooming principle is demonstrated, and the positioning resolution of 0.2 nm is achieved. The positioning accuracy was partly evaluated.
Kajima
Mariko
M
National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba 305-8563, Ibaraki, Japan. m.kajima@aist.go.jp
Minoshima
Kaoru
K