Three-channel Homodyne Interferometer.
A three-channel homodyne interferometer based on a structured delay plate is described. Detection and data acquisition are performed with standard optoelectronics in a PC environment. The device, which is used as a displacement sensor, features sub-nanometric sensitivity.
V
V
Greco
C
C
Iemmi
S
S
Ledesma
G
G
Molesini
F
F
Quercioli