Determination of Debye-Waller factor and structure factors for Si by quantitative convergent-beam electron diffraction using off-axis multi-beam orientations.
Debye-Waller (DW) factors and structure factors have been measured for Si using convergent-beam electron diffraction (CBED) experiments with a transmission electron microscope equipped with a field-emission gun and a post-column energy-filtering device. Si has been used here to evaluate the accuracy of multi-beam near-zone-axis orientations for the simultaneous refinement of DW factors and multiple structure factors. Strong dynamic interactions among different beams are obtained by tilting the crystal to specific four- or six-beam orientations near major zone axes, which provide sufficient sensitivity to determine accurate DW factors and structure factors. The DW factors of Si were measured using four-beam conditions near the [001] zone axis for temperatures ranging from 96 to 300 K. A comparison of the multi-beam near-zone-axis orientations with other CBED methods for DW and structure factor F(g) refinement is presented.
Department of Materials Science and Mechanical Engineering, Swanson School of Engineering, University of Pittsburgh, 648 Benedum Hall, 3700 O'Hara Street, Pittsburgh, PA 15261, USA. xis20@pitt.edu
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