title: Spatially resolvable optical emission spectrometer for analyzing density uniformity of semiconductor process plasma.
authors.affiliation: Nano Photonics Laboratory, School of Mechanical Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, South Korea.
authors.forename: Changhoon
authors.initials: C
authors.lastname: Oh
authors.forename: Hoonchul
authors.initials: H
authors.lastname: Ryoo
authors.forename: Hyungwoo
authors.initials: H
authors.lastname: Lee
authors.forename: Se-Yeon
authors.initials: SY
authors.lastname: Kim
authors.forename: Hun-Jung
authors.initials: HJ
authors.lastname: Yi
authors.forename: Jae W
authors.initials: JW
authors.lastname: Hahn