Deposition of thin films of organic-inorganic hybrid materials based on aromatic carboxylic acids by atomic layer deposition.
Klepper
Karina Barnholt
KB
Department of Chemistry and Centre for Materials Science and Nanotechnology, University of Oslo, P.O. Box 1033, Blindern, Oslo N-0315, Norway. k.b.klepper@kjemi.uio.no
Nilsen
Ola
O
Fjellvåg
Helmer
H