Spatially resolvable optical emission spectrometer for analyzing density uniformity of semiconductor process plasma.
Oh
Changhoon
C
Nano Photonics Laboratory, School of Mechanical Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, South Korea.
Ryoo
Hoonchul
H
Lee
Hyungwoo
H
Kim
Se-Yeon
SY
Yi
Hun-Jung
HJ
Hahn
Jae W
JW