title: Deposition of thin films of organic-inorganic hybrid materials based on aromatic carboxylic acids by atomic layer deposition.
authors.affiliation: Department of Chemistry and Centre for Materials Science and Nanotechnology, University of Oslo, P.O. Box 1033, Blindern, Oslo N-0315, Norway. k.b.klepper@kjemi.uio.no
authors.forename: Karina Barnholt
authors.initials: KB
authors.lastname: Klepper
authors.forename: Ola
authors.initials: O
authors.lastname: Nilsen
authors.forename: Helmer
authors.initials: H
authors.lastname: Fjellvåg