Post-CMOS wafer level growth of carbon nanotubes for low-cost microsensors--a proof of concept.
Here we demonstrate a novel technique to grow carbon nanotubes (CNTs) on addressable localized areas, at wafer level, on a fully processed CMOS substrate. The CNTs were grown using tungsten micro-heaters (local growth technique) at elevated temperature on wafer scale by connecting adjacent micro-heaters through metal tracks in the scribe lane. The electrical and optical characterization show that the CNTs are identical and reproducible. We believe this wafer level integration of CNTs with CMOS circuitry enables the low-cost mass production of CNT sensors, such as chemical sensors.
Engineering Department, University of Cambridge, 9 JJ Thomson Avenue, Cambridge CB3 0FA, UK.
Sumita
S
Santra
Syed Z
SZ
Ali
Prasanta K
PK
Guha
Guofang
G
Zhong
John
J
Robertson
James A
JA
Covington
William I
WI
Milne
Julian W
JW
Gardner
Florin
F
Udrea