One-dimensional Wolter optics with a sub-50 nm spatial resolution.
We studied an imaging system consisting of an elliptical mirror and a hyperbolic mirror [i.e., one-dimensional (1D) Wolter optics] to realize an achromatic full-field hard x-ray microscopy with a resolution better than 50 nm. We report the performance of this 1D Wolter optical system when the mirrors were ultraprecisely figured by elastic emission machining. Experiments to form a demagnified image (demagnification factor of 385) of a 10 μm slit were conducted at an x-ray energy of 11.5 keV at BL29XUL of SPring-8. The system could form a demagnified image with a resolution better than 50 nm over a 12.1 μm field.
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan. matsuyama@prec.eng.osaka-u.ac.jp
S
S
Matsuyama
T
T
Wakioka
N
N
Kidani
T
T
Kimura
H
H
Mimura
Y
Y
Sano
Y
Y
Nishino
M
M
Yabashi
K
K
Tamasaku
T
T
Ishikawa
K
K
Yamauchi