2-D modeling of laterally acoustically coupled thin film bulk acoustic wave resonator filters.
A 2-D model is developed for calculating lateral acoustical coupling between adjacent thin film BAW resonators forming an electrical N-port. The model is based on solution and superposition of lateral eigenmodes and eigenfrequencies in a structure consisting of adjacent regions with known plate wave dispersion properties. Mechanical and electrical response of the device are calculated as a superposition of eigenmodes according to voltage drive at one electrical port at a time while extracting current induced in the other ports, leading to a full Y-parameter description of the device. Exemplary cases are simulated to show the usefulness of the model in the study of the basic design rules of laterally coupled thin film BAW resonator filters. Model predictions are compared to an experimental 1.9-GHz band-pass filter based on aluminum nitride thin film technology and lateral acoustical coupling. Good agreement is obtained in prediction of passband behavior. The eigenmode-based model forms a useful tool for fast simulation of laterally coupled acoustic devices. It allows one to gain insight into basic device physics in a very intuitive fashion compared with more detailed but heavier finite element method. Shortcomings of this model and possible improvements are discussed.
VTT Technical Research Centre of Finland, Microsystems and Nanoelectronics, Espoo, Finland. Tuomas.pensala@vtt.fi
Tuomas
T
Pensala
Johanna
J
Meltaus
Kimmo
K
Kokkonen
Markku
M
Ylilammi