Piezoelectric BaTiO₃ thin film nanogenerator on plastic substrates.
The piezoelectric generation of perovskite BaTiO3 thin films on a flexible substrate has been applied to convert mechanical energy to electrical energy for the first time. Ferroelectric BaTiO3 thin films were deposited by radio frequency magnetron sputtering on a Pt/Ti/SiO2/(100) Si substrate and poled under an electric field of 100 kV/cm. The metal-insulator (BaTiO3)-metal-structured ribbons were successfully transferred onto a flexible substrate and connected by interdigitated electrodes. When periodically deformed by a bending stage, a flexible BaTiO3 nanogenerator can generate an output voltage of up to 1.0 V. The fabricated nanogenerator produced an output current density of 0.19 μA/cm(2) and a power density of ∼7 mW/cm(3). The results show that a nanogenerator can be used to power flexible displays by means of mechanical agitations for future touchable display technologies.
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 373-1 Gwahangno, Yuseong-gu, Daejeon 305-701 Republic of Korea.
Kwi-Il
KI
Park
Sheng
S
Xu
Ying
Y
Liu
Geon-Tae
GT
Hwang
Suk-Joong L
SJ
Kang
Zhong Lin
ZL
Wang
Keon Jae
KJ
Lee