Molybdenum/beryllium multilayer mirrors for normal incidence in the extreme ultraviolet.
We report on a series of normal-incidence reflectance measurements at wavelengths just longer than the beryllium K-edge (11.1 nm) from molybdenum/beryllium multilayer mirrors. The highest peak reflectance was 68.7 ± 0.2% at λ = 11.3 nm obtained from a mirror with 70 bilayers ending in beryllium. To our knowledge, this is the highest normal-incidence reflectance that has been demonstrated in the 1-80-nm spectral range.
K M
KM
Skulina
C S
CS
Alford
R M
RM
Bionta
D M
DM
Makowiecki
E M
EM
Gullikson
R
R
Soufli
J B
JB
Kortright
J H
JH
Underwood