Graphoepitaxial assembly of asymmetric ternary blends of block copolymers and homopolymers.
Ternary blends of cylinder-forming polystyrene-block-poly(methyl methacrylate) block copolymers and polystyrene and poly(methyl methacrylate) homopolymers were assembled in trench features of constant width. Increasing the fraction of homopolymer in the blend increased the spacing and size of block copolymer domains, which were oriented perpendicular to the substrate to form a hexagonal lattice within the trench. The number of rows of cylinders within the trench was controlled by the blend composition. Depending on the domain size and spacing, the hexagonal lattice was stretched or compressed perpendicular to the trench walls but not perturbed parallel to the walls, indicating a decoupling of the perturbation in the perpendicular and parallel directions. The row spacing was uniform across the trench as a function of position from the trench wall. The results are compared with an analytical model and with Monte Carlo simulations.
Department of Chemical and Biological Engineering, University of Wisconsin, Madison, WI 53706, USA.
Karl O
KO
Stuen
François A
FA
Detcheverry
Gordon S W
GS
Craig
Carla S
CS
Thomas
Richard A
RA
Farrell
Michael A
MA
Morris
Juan J
JJ
de Pablo
Paul F
PF
Nealey
D003198:Computer Simulation; D008689:Methacrylates / Q000138:chemical synthesis* / Q000737:chemistry; D008855:Microscopy, Electron, Scanning; D011137:Polystyrenes / Q000138:chemical synthesis* / Q000737:chemistry
D008689:Methacrylates; D011137:Polystyrenes; C522509:polystyrene-block-poly(methyl methacrylate)