title: Determination of refractive index and thickness of thick transparent films by variable-angle spectroscopic ellipsometry: application to benzocyclobutene films.
abstract: An analysis procedure for evaluating the refractive index and the thickness of 5-10-µm-thick transparent films has been developed based on variable-angle spectroscopic ellipsometry. As an example of application, results from an analysis of benzocyclobutene films are presented. The sensitivities in ψ and Δ with respect to the refractive index and the thickness of the films are also discussed.
authors.forename: S
authors.initials: S
authors.lastname: Guo
authors.forename: G
authors.initials: G
authors.lastname: Gustafsson
authors.forename: O J
authors.initials: OJ
authors.lastname: Hagel
authors.forename: H
authors.initials: H
authors.lastname: Arwin