title: Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope.
abstract: Scanning confocal electron microscopy (SCEM) offers a mechanism for three-dimensional imaging of materials, which makes use of the reduced depth of field in an aberration-corrected transmission electron microscope. The simplest configuration of SCEM is the bright-field mode. In this paper we present experimental data and simulations showing the form of bright-field SCEM images. We show that the depth dependence of the three-dimensional image can be explained in terms of two-dimensional images formed in the detector plane. For a crystalline sample, this so-called probe image is shown to be similar to a conventional diffraction pattern. Experimental results and simulations show how the diffracted probes in this image are elongated in thicker crystals and the use of this elongation to estimate sample thickness is explored.
authors.affiliation: Department of Materials, University of Oxford, Parks Road, Oxford OX13PH, UK.
authors.forename: Peng
authors.initials: P
authors.lastname: Wang
authors.forename: Gavin
authors.initials: G
authors.lastname: Behan
authors.forename: Angus I
authors.initials: AI
authors.lastname: Kirkland
authors.forename: Peter D
authors.initials: PD
authors.lastname: Nellist
authors.forename: Eireann C
authors.initials: EC
authors.lastname: Cosgriff
authors.forename: Adrian J
authors.initials: AJ
authors.lastname: D'Alfonso
authors.forename: Andrew J
authors.initials: AJ
authors.lastname: Morgan
authors.forename: Leslie J
authors.initials: LJ
authors.lastname: Allen
authors.forename: Ayako
authors.initials: A
authors.lastname: Hashimoto
authors.forename: Masaki
authors.initials: M
authors.lastname: Takeguchi
authors.forename: Kazutaka
authors.initials: K
authors.lastname: Mitsuishi
authors.forename: Masayuki
authors.initials: M
authors.lastname: Shimojo
mesh_terms: D004583:Electrons; D006046:Gold / Q000737:chemistry; D007091:Image Processing, Computer-Assisted / Q000379:methods; D007908:Lens, Crystalline / Q000737:chemistry; D053768:Metal Nanoparticles / Q000737:chemistry; D018613:Microscopy, Confocal / Q000379:methods*; D046529:Microscopy, Electron, Transmission / Q000379:methods*
chemical_list: D006046:Gold