title: Numerical simulations of vibration in phase-shifting interferometry.
abstract: Computer simulations predict the expected rms measurement error in a phase-shifting interferometer in the presence of mechanical vibrations. The simulations involve a numerical resolution of a nonlinear mathematical model and are performed over a range of vibrational frequencies and amplitudes for three different phase-shift algorithms. Experimental research with an interference microscope and comparison with analytical solutions verify the numerical model.
authors.forename: P J
authors.initials: PJ
authors.lastname: de Groot
authors.forename: L L
authors.initials: LL
authors.lastname: Deck