title: Consequences of Ti-, Li-, and Er-ion implantations on the optical properties of single layers of Ta(2)O(5).
abstract: Tantalum pentoxide (Ta(2)O(5)) layers made by ion plating are implanted with a high fluence of keV Ti, Li, and Er ions. The resulting refractive-index profiles are given from the analysis of guided-wave propagation conditions. A comparison with spectrophotometric measurements is presented. All the implanted layers present low losses (extinction coefficient of some 10(-6)) after thermal annealing in air. Ti-implanted layers exhibit an increase in refractive index, whereas Li- and Er-implanted layers present a slight decrease in refractive index. Er-implanted layers present photoluminescent properties.
authors.forename: F
authors.initials: F
authors.lastname: Flory
authors.forename: D
authors.initials: D
authors.lastname: Berthier
authors.forename: H
authors.initials: H
authors.lastname: Rigneault
authors.forename: L
authors.initials: L
authors.lastname: Roux