title: Sensorized guidewires with MEMS tri-axial force sensor for minimally invasive surgical applications.
abstract: This paper describes the design of a tri-axial microelectromechanical force sensor (FS) that can be mounted on the tip of the guidewire. Piezoresistive silicon nanowires (SiNW) are embedded into a cross cantilever design with a manoeuvrable stylus to allow the detection of force in all directions. The electrical resistance changes in the four SiNWs are used to decode an arbitrary force applied onto the FS. The sensitivity of the device can be improved by two orders of magnitude compared to bulk Si thanks to the giant piezoresistive effects offered by the SiNW. Robustness of the FS is improved due to the novel design by incorporating a mechanical stopper at the tip of the stylus. Finite element analysis (FEM) analysis was used in designing the FS.
authors.affiliation: A*Star Institute of microelectronics, Science park 11, Singapore 117685.
authors.forename: Liang
authors.initials: L
authors.lastname: Lou
authors.forename: Kotlanka
authors.initials: K
authors.lastname: Ramakrishna
authors.forename: Lichun
authors.initials: L
authors.lastname: Shao
authors.forename: Woo-Tae
authors.initials: WT
authors.lastname: Park
authors.forename: Daquan
authors.initials: D
authors.lastname: Yu
authors.forename: Lishiah
authors.initials: L
authors.lastname: Lim
authors.forename: Yongjun
authors.initials: Y
authors.lastname: Wee
authors.forename: Vaidyanathan
authors.initials: V
authors.lastname: Kripesh
authors.forename: Hanhua
authors.initials: H
authors.lastname: Feng
authors.forename: Benjamin S Y
authors.initials: BS
authors.lastname: Chua
authors.forename: Chengkuo
authors.initials: C
authors.lastname: Lee
authors.forename: Dim-Lee
authors.initials: DL
authors.lastname: Kwong
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods*; D004867:Equipment Design; D020342:Finite Element Analysis; D006801:Humans; D019060:Minimally Invasive Surgical Procedures / Q000295:instrumentation* / Q000379:methods*; D053770:Nanowires