title: Microfabricated endoscopic probe integrated MEMS micromirror for optical coherence tomography bioimaging.
abstract: In this paper, we present a miniaturized endoscopic probe, consisted of MEMS micromirror, silicon optical bench (SiOB), grade index (GRIN) lens, single mode optical fiber (SMF) and transparent housing, for optical coherence tomography (OCT) bioimaging. Due to the use of the MEMS micromirror, the endoscopic OCT system is highly suitable for non-invasive imaging diagnosis of a wide variety of inner organs. The probe engineering and proof of concept were demonstrated by obtaining the two-dimensional OCT images with a cover slide and an onion used as standard samples and the axial resolution was around 10µm.
authors.affiliation: Institute of Microelectronics, 117685 Singapore. mfwang0803@gmail.com
authors.forename: Ming-Fang
authors.initials: MF
authors.lastname: Wang
authors.forename: Yingshun
authors.initials: Y
authors.lastname: Xu
authors.forename: C S
authors.initials: CS
authors.lastname: Prem
authors.forename: Kelvin Wei Sheng
authors.initials: KW
authors.lastname: Chen
authors.forename: Jin
authors.initials: J
authors.lastname: Xie
authors.forename: Xiaojing
authors.initials: X
authors.lastname: Mu
authors.forename: Chee Wei
authors.initials: CW
authors.lastname: Tan
authors.forename: Aibin
authors.initials: A
authors.lastname: Yu
authors.forename: Hanhua
authors.initials: H
authors.lastname: Feng
mesh_terms: D019723:Endoscopes; D004867:Equipment Design; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D012825:Silicon; D041623:Tomography, Optical Coherence / Q000295:instrumentation* / Q000379:methods*
chemical_list: D012825:Silicon