title: Survey of Ti-, B-, and Y-based soft x-ray-extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region.
abstract: We have performed an experimental investigation of Ti-, B(4)C-, B-, and Y-based multilayer mirrors for the soft x-ray¿extreme ultraviolet (XUV) wavelength region between 2.0 and 12.0 nm. Eleven different material pairs were studied: Ti/Ni, Ti/Co, Ti/Cu, Ti/W, B(4)C/Pd, B/Mo, Y/Pd, Y/Ag, Y/Mo, Y/Nb, and Y/C. The multilayers were sputter deposited and were characterized with a number of techniques, including low-angle x-ray diffraction and normal incidence XUV reflectometry. Among the Ti-based multilayers the best results were obtained with Ti/W, with peak reflectances up to 5.2% at 2.79 nm at 61° from normal incidence. The B(4)C/Pd and B/Mo multilayer mirrors had near-normal incidence (5°) peak reflectances of 11.5% at 8.46 nm and 9.4% at 6.67 nm, respectively, whereas a Y/Mo multilayer mirror had a maximum peak reflectance of 25.6% at 11.30 nm at the same angle. The factors limiting the peak reflectance of these different multilayer mirrors are discussed.
authors.forename: C
authors.initials: C
authors.lastname: Montcalm
authors.forename: P A
authors.initials: PA
authors.lastname: Kearney
authors.forename: J M
authors.initials: JM
authors.lastname: Slaughter
authors.forename: B T
authors.initials: BT
authors.lastname: Sullivan
authors.forename: M
authors.initials: M
authors.lastname: Chaker
authors.forename: H
authors.initials: H
authors.lastname: Pépin
authors.forename: C M
authors.initials: CM
authors.lastname: Falco