The use of nanoscaled Al mid-layer for enhancing the electrical conductivity of ZnO.
A nanoscaled Al thin film was placed between two ZnO thin films to form a ZnO/Al/ZnO multilayer thin film structure. Individual Al and ZnO thin films with difference thicknesses were first prepared and characterized for the optical and electrical properties. The multilayer structure was then obtained by depositing individual layers with desired thicknesses in sequence. We show that by appropriate selections of layer thickness, the use of a nanoscaled Al mid-layer in ZnO enhances the electrical conductivity of the ZnO without scarifying its optical transmittance.
Institute of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan 70101, Taiwan.
Wan-Yu
WY
Wu
Chia-Kang
CK
Lin
Jyh-Ming
JM
Ting