Parallel phase-shifting interferometry based on Michelson-like architecture.
In this paper, we present a new scheme for parallel phase-shifting interferometry that employs a Michelson-like architecture and a simple polarization unit to generate two phase-shifting interferograms with phase shift of π/2 at a single camera exposure. The parallel phase-shifting unit is built with simple optical components, and the distance between the parallel interferograms can be adjusted conveniently. Phase reconstruction is performed by using an algorithm developed for two-step phase-shifting interferometry. The practicability of the proposed configuration and the reconstruction method is demonstrated by experiments.
State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China.
Junwei
J
Min
Baoli
B
Yao
Peng
P
Gao
Rongli
R
Guo
Juanjuan
J
Zheng
Tong
T
Ye