Transduction dependent optimization of electromechanical parameters for electrostatically actuated MEMS/NEMS resonators.
This paper demonstrates an accurate model to predict the overall effective mass in micro- and nanomechanical resonators with non-uniform deformation along the transduction area. The model is verified experimentally through parameter extraction on various types of resonators with an error less than 3% well within the bounds dictated by manufacturing tolerances. Based on the model, an optimization of transduction electrode designs is proposed for micro- and nanomechanical resonators vibrating in the fabrication plane.
Department of Engineering, University of Cambridge, Cambridge CB2 1PZ, UK.
Jize
J
Yan
Joshua E-Y
JE
Lee
Ashwin A
AA
Seshia