Micropatterning of polymer-embedded metal nanoparticles by an ion beam contact lithography.
A convenient and effective method to pattern polymer-embedded metal nanoparticles by ion irradiation has been developed. The thin Pluronic films containing silver nitrate as a precursor of silver nanoparticles were irradiated through a pattern mask with accelerated proton (H+) ions. It was found from the UV-Vis measurement that the formation of silver nanoparticles in the Pluronic matrix was dependant on the amount of silver nitrate. The 50 microm line (pitch 150 microm) patterns of the Pluronic containing silver nanoparticles were obtained with the thin film irradiated to 1 x 10(16) ions/cm2. The heat treatment effect on the morphology of the patterns was investigated by using a scanning electron microscope with an energy dispersive X-ray spectrometer. The results confirmed that the silver nanoparticles were successfully embedded in the Pluronic patterns and the patterns were changed into large silver particles by a heat treatment above 350 degrees C.
Radiation Research Division for Industry and Environment, Advanced Radiation Technology Institute, Korea Atomic Energy Research Institute, Jeongeup-si, Jeollabuk-do 580-185, Korea.
Jae-Hak
JH
Choi
Chan-Hee
CH
Jung
In-Tae
IT
Hwang
Mi-Young
MY
An
Byoung-Min
BM
Lee
Dong-Ki
DK
Kim
Jung-Soo
JS
Lee
Young-Chang
YC
Nho
Kang Moo
KM
Huh
Sung-Kwon
SK
Hong