HREELS investigation of the surfaces of nanocrystalline diamond films oxidized by different processes.
This article reports on the use of high-resolution electron energy loss spectroscopy (HREELS) for the investigation of as-grown (hydrogen-terminated) and oxidized nanocrystalline diamond films (NCD) using chemical, physical, and electrochemical approaches. The results indicate that the nature and number of oxygen-related chemical groups generated on the NCD surface depend strongly on the oxidation process. A high concentration of C-O functions has been obtained on the NCD surface oxidized by rf (radio frequency) oxygen plasma, whereas the highest C═O/C-O ratio has been achieved by electrochemical oxidation. The NCD surface oxidized by rf plasma was totally free of C═O groups. Traces of surface hydroxyl groups (C-OH) have been detected upon annealing in air or through UV/ozone oxidation.
ρ-BeSt Diamond Coating GmbH, Exlgasse 20a, 6020 Innsbruck, Austria.
Slimane
S
Ghodbane
Thomas
T
Haensel
Yannick
Y
Coffinier
Sabine
S
Szunerits
Doris
D
Steinmüller-Nethl
Rabah
R
Boukherroub
Syed Imad-Uddin
SI
Ahmed
Juergen A
JA
Schaefer