Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate.
Spectrally resolved white-light phase-shifting interference microscopy has been used for measurements of the thickness profile of a transparent thin-film layer deposited upon a patterned structure exhibiting steps and discontinuities. We describe a simple technique, using an approach based on spectrally resolved optical coherence tomography, that makes it possible to obtain directly a thickness profile along a line by inverse Fourier transformation of the complex spectral interference function.
New Product Development Division, Korean Materials & Analysis Corporation, 554 Youngsan-dong, Yuseong-gu, Daejeon, 305-500, South Korea. debnath.sanjit@gmail.com
Sanjit K
SK
Debnath
Seung-Woo
SW
Kim
Mahendra P
MP
Kothiyal
Parameswaran
P
Hariharan