Fabrication of nanopores for biomacromolecule detection.
Nanopores embedded in a thin membrane with diameter below 10 nm are suitable for the biomacromolecule detection. For such purpose, in this study, we developed a technique of how to obtain small nanopores in silicon nitride films using a focused-ion-beam (FIB) system. By changing the process parameters, such as the beam current, the film thickness of the membrane and the ion beam exposure time, the diameter of the nanopore can be tuned. Under an optimized condition, high quality nanopores with diameter as low as 6 nm was fabricated on a 7 nm thick membrane. Our result suggests that FIB direct writing technique might be a suitable approach for biomacromolecule detector fabrication.
Institute of Photonics and Photon-Technology, Northwest University, Xi'an 710069, China.
Zong-Ni
ZN
Yao
Kai-Ge
KG
Wang
Ai-Zi
AZ
Jin
Jun-Jie
JJ
Li
Hai-Fang
HF
Yang
Yi-Guang
YG
Zhang
Chang-Zhi
CZ
Gu
D004247:DNA / Q000032:analysis*; D046529:Microscopy, Electron, Transmission; D058608:Nanopores
D004247:DNA