Analysis of lateral shearing interferograms by use of Zernike polynomials.
A modal phase-reconstruction method for wave-front analysis in lateral shearing interferometry is presented. Pseudo-Zernike polynomial functions describe the differential wave fronts and are related to a Zernike polynomial description of the original wave front. We show that this reconstruction is robust for shear ratios in the range 0.15-0.50. The error propagation properties of this differential Zernike polynomial matrix-inversion method are discussed on the basis of both analysis and simulation. It is concluded that the method allows wave-front analysis with an absolute inaccuracy of 2 mλ rms for diffraction-limited wave fronts and with 1% relative inaccuracy for more strongly aberrated wave fronts.
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Harbers
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Kunst
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Leibbrandt