title: Large range and high resolution on-line displacement measurement system by combining double interferometres.
abstract: A stabilized interferometric displacement measurement system, which is suitable for on-line measurement and is endowed with large measurement range and high resolution, is proposed. The system is stabilized by a feedback loop which compensates the influences induced by the environmental disturbances and makes the system stabile enough for on-line measurement. Two different wavelengths are working simultaneously in the system. The measurement range which is determined by the synthetic-wavelength interferometric signal is expanded to the order of millimeter, while the measurement resolution which is determined by one of the single-wavelength interferometric signal is the order of sub-nanometer.
authors.affiliation: Laboratory for Optical Information Science and Technology, Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, China. fxie@bjtu.edu.cn
authors.forename: Fang
authors.initials: F
authors.lastname: Xie
authors.forename: Min
authors.initials: M
authors.lastname: Li
authors.forename: Ding
authors.initials: D
authors.lastname: Song
authors.forename: Jinling
authors.initials: J
authors.lastname: Sun
authors.forename: Tao
authors.initials: T
authors.lastname: Zhang