title: Simulating different manufactured antireflective sub-wavelength structures considering the influence of local topographic variations.
abstract: Laterally structured antireflective sub-wavelength structures show unique properties with respect to broadband performance, damage threshold and thermal stability. Thus they are superior to classical layer based antireflective coatings for a number of applications. Dependent on the selected fabrication technology the local topography of the periodic structure may deviate from the perfect repetition of a sub-wavelength unit cell. We used rigorous coupled-wave analysis (RCWA) to simulate the efficiency losses due to scattering effects based on height and displacement variations between the individual protuberances. In these simulations we chose conical and Super-Gaussian shapes to approximate the real profile of fabricated structures. The simulation results are in accordance with the experimentally determined optical properties of sub-wavelength structures over a broad wavelength range. Especially the transmittance reduction in the deep-UV could be ascribed to these variations in the sub-wavelength structures.
authors.affiliation: Carl Zeiss Jena GmbH, Carl-Zeiss-Promenade 10, 07745 Jena, Germany. dennis.lehr@uni-jena.de
authors.forename: Dennis
authors.initials: D
authors.lastname: Lehr
authors.forename: Michael
authors.initials: M
authors.lastname: Helgert
authors.forename: Michael
authors.initials: M
authors.lastname: Sundermann
authors.forename: Christoph
authors.initials: C
authors.lastname: Morhard
authors.forename: Claudia
authors.initials: C
authors.lastname: Pacholski
authors.forename: Joachim P
authors.initials: JP
authors.lastname: Spatz
authors.forename: Robert
authors.initials: R
authors.lastname: Brunner