title: Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces.
abstract: We demonstrate the lithographic fabrication of diffractive optical elements (DOEs) in hybrid SiO2/TiO2 sol-gel glass on 3-D curved surfaces. The concentric circular gratings with periods of 20 μm, 10 μm and 5 μm have been fabricated in sol-gel glass on concave lens by laser direct writing successfully. Continuous 3-Dimensional surface relief with a height of 435 nm, 110 nm and 50 nm has been obtained for the period of 20 μm, 10 μm and 5 μm respectively. The optical test results of the fabricated DOE shows only a little bit deviation from the theoretical calculated results which can be explained by 3-D curved surface effect. We believe this technology can be an effective method to fabricate DOEs with even more complex surface profile on 3-D curved surfaces in terms of its simplicity and cost-effectiveness.
authors.affiliation: Opto-electronics Technology Center, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, 130033, China.
authors.forename: Taisheng
authors.initials: T
authors.lastname: Wang
authors.forename: Weixing
authors.initials: W
authors.lastname: Yu
authors.forename: Dengying
authors.initials: D
authors.lastname: Zhang
authors.forename: Chunrong
authors.initials: C
authors.lastname: Li
authors.forename: Hongxin
authors.initials: H
authors.lastname: Zhang
authors.forename: Wenbin
authors.initials: W
authors.lastname: Xu
authors.forename: Zhijun
authors.initials: Z
authors.lastname: Xu
authors.forename: Hua
authors.initials: H
authors.lastname: Liu
authors.forename: Qiang
authors.initials: Q
authors.lastname: Sun
authors.forename: Zhenwu
authors.initials: Z
authors.lastname: Lu