title: Perturbation method for the Rigorous Coupled Wave Analysis of grating diffraction.
abstract: The perturbation method is combined with the Rigorous CoupledWave Analysis (RCWA) to enhance its computational speed. In the original RCWA, a grating is approximated by a stack of lamellar gratings and the number of eigenvalue systems to be solved is equal to the number of subgratings. The perturbation method allows to derive the eigensolutions in many layers from the computed eigensolutions of a reference layer provided that the optical and geometrical parameters of these layers differ only slightly. A trapezoidal grating is considered to evaluate the performance of the method.
authors.affiliation: Clermont Université, Université Blaise Pascal, LASMEA, BP 10448, F-63000 Cleremont–Ferrand, France. kofi.edee@univ-bpclermont.fr
authors.forename: Kofi
authors.initials: K
authors.lastname: Edee
authors.forename: Jean-Pierre
authors.initials: JP
authors.lastname: Plumey
authors.forename: Gérard
authors.initials: G
authors.lastname: Granet
authors.forename: Jérome
authors.initials: J
authors.lastname: Hazart
mesh_terms: D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008027:Light; D008962:Models, Theoretical; D012031:Refractometry / Q000295:instrumentation* / Q000379:methods*; D012542:Scattering, Radiation