title: Novel single-source precursors for the fabrication of PbTiO3, PbZrO3 and Pb(Zr(1-x)Ti(x))O3 thin-films by chemical vapor deposition.
abstract: Lead titanate, lead zirconate, and lead zirconate titanate (PZT) films in the sub-μm-range were produced at temperatures around 400 °C using novel single-source precursors in a classical thermal CVD process. The design of two bimetallic alkoxide compounds, a lead titanate and a lead zirconate source with almost identical physical properties and complement miscibility, resulted in a new quasi-single-source PZT precursor, an azeotropic mixture that evaporates at 30 °C and at a pressure of 4 × 10(-1) mbar. After thermal treatment at 650 °C, transparent (100)-oriented PZT films with remnant polarization of 20 μC cm(-2) and a coercive field strength of 20 V μm(-1) were achieved. An additional lead source is not required.
authors.affiliation: Leibniz Institute for New Materials gGmbH, Department of CVD/Biosurfaces, Campus D2 2, 66123 Saarbruecken, Germany. michael.veith@inm-gmbh.de
authors.forename: Michael
authors.initials: M
authors.lastname: Veith
authors.forename: Michael
authors.initials: M
authors.lastname: Bender
authors.forename: Tobias
authors.initials: T
authors.lastname: Lehnert
authors.forename: Michael
authors.initials: M
authors.lastname: Zimmer
authors.forename: Anette
authors.initials: A
authors.lastname: Jakob
mesh_terms: D007854:Lead / Q000737:chemistry*; D009682:Magnetic Resonance Spectroscopy
chemical_list: D007854:Lead