title: Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges.
abstract: In this paper, attributes of chalcogenide glass (ChG) based integrated devices are discussed in detail, including origins of optical loss and processing steps used to reduce their contributions to optical component performance. Specifically, efforts to reduce loss and tailor optical characteristics of planar devices utilizing solution-based glass processing and thermal reflow techniques are presented and their results quantified. Post-fabrication trimming techniques based on the intrinsic photosensitivity of the chalcogenide glass are exploited to compensate for fabrication imperfections of ring resonators. Process parameters and implications on enhancement of device fabrication flexibility are presented.
authors.affiliation: School of Materials Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Clemson, South Carolina 29634, USA.
authors.forename: Nathan
authors.initials: N
authors.lastname: Carlie
authors.forename: J David
authors.initials: JD
authors.lastname: Musgraves
authors.forename: Bogdan
authors.initials: B
authors.lastname: Zdyrko
authors.forename: Igor
authors.initials: I
authors.lastname: Luzinov
authors.forename: Juejun
authors.initials: J
authors.lastname: Hu
authors.forename: Vivek
authors.initials: V
authors.lastname: Singh
authors.forename: Anu
authors.initials: A
authors.lastname: Agarwal
authors.forename: Lionel C
authors.initials: LC
authors.lastname: Kimerling
authors.forename: Antonio
authors.initials: A
authors.lastname: Canciamilla
authors.forename: Francesco
authors.initials: F
authors.lastname: Morichetti
authors.forename: Andrea
authors.initials: A
authors.lastname: Melloni
authors.forename: Kathleen
authors.initials: K
authors.lastname: Richardson
mesh_terms: D018011:Chalcogens / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005336:Fiber Optic Technology / Q000295:instrumentation*; D005898:Glass / Q000737:chemistry*; D007259:Infrared Rays; D008422:Materials Testing; D010783:Photometry / Q000295:instrumentation*; D012031:Refractometry / Q000295:instrumentation*; D018511:Systems Integration; D014159:Transducers
chemical_list: D018011:Chalcogens