title: High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array.
abstract: High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1 W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6° at a current of 4 A. These properties between microlens-integrated and conventional device at different operating current are demonstrated.
authors.affiliation: Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Jilin, Changchun 130033, China.
authors.forename: Zhenfu
authors.initials: Z
authors.lastname: Wang
authors.forename: Yongqiang
authors.initials: Y
authors.lastname: Ning
authors.forename: Yan
authors.initials: Y
authors.lastname: Zhang
authors.forename: Jingjing
authors.initials: J
authors.lastname: Shi
authors.forename: Xing
authors.initials: X
authors.lastname: Zhang
authors.forename: Lisen
authors.initials: L
authors.lastname: Zhang
authors.forename: Wei
authors.initials: W
authors.lastname: Wang
authors.forename: Di
authors.initials: D
authors.lastname: Liu
authors.forename: Yongsheng
authors.initials: Y
authors.lastname: Hu
authors.forename: Haibing
authors.initials: H
authors.lastname: Cong
authors.forename: Li
authors.initials: L
authors.lastname: Qin
authors.forename: Yun
authors.initials: Y
authors.lastname: Liu
authors.forename: Lijun
authors.initials: L
authors.lastname: Wang