title: Low-loss strip-loaded slot waveguides in silicon-on-insulator.
abstract: Electro-optic polymer-clad silicon slot waveguides have recently been used to build a new class of modulators, that exhibit very high bandwidths and extremely low drive voltages. A key step towards making these devices practical will be lowering optical insertion losses. We report on the first measurements of low-loss waveguides that are geometrically suitable for high bandwidth slot waveguide modulators: a strip-loaded slot waveguide. Waveguide loss for undoped waveguides of 6.5 ± 0.2 dB/cm was achieved with 40 nm thick strip-loading, with the full silicon thickness around 220 nm and a slot size of 200 nm, for wavelengths near 1550 nm.
authors.affiliation: Department of Electrical Engineering, University of Washington, Campus Box 352500, Seattle, Washington 98195, USA. dingran@uw.edu
authors.forename: Ran
authors.initials: R
authors.lastname: Ding
authors.forename: Tom
authors.initials: T
authors.lastname: Baehr-Jones
authors.forename: Woo-Joong
authors.initials: WJ
authors.lastname: Kim
authors.forename: Xugang
authors.initials: X
authors.lastname: Xiong
authors.forename: Richard
authors.initials: R
authors.lastname: Bojko
authors.forename: Jean-Marc
authors.initials: JM
authors.lastname: Fedeli
authors.forename: Maryse
authors.initials: M
authors.lastname: Fournier
authors.forename: Michael
authors.initials: M
authors.lastname: Hochberg