title: Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering.
authors.affiliation: Measurement Solution Research Center National Institute of Advanced Industrial Science and Technology Tosu, Saga 841-0052 (Japan).
authors.forename: Morito
authors.initials: M
authors.lastname: Akiyama
authors.forename: Toshihiro
authors.initials: T
authors.lastname: Kamohara
authors.forename: Kazuhiko
authors.initials: K
authors.lastname: Kano
authors.forename: Akihiko
authors.initials: A
authors.lastname: Teshigahara
authors.forename: Yukihiro
authors.initials: Y
authors.lastname: Takeuchi
authors.forename: Nobuaki
authors.initials: N
authors.lastname: Kawahara