title: An array of field-effect nanoplate SOI capacitors for (bio-)chemical sensing.
abstract: An array of individually addressable nanoplate field-effect capacitive (bio-)chemical sensors based on an SOI (silicon-on-insulator) structure has been developed. The isolation of the individual capacitors was achieved by forming a trench in the top Si layer with a thickness of 350 nm. The realized sensor array allows addressable biasing and electrical readout of multiple nanoplate EISOI (electrolyte-insulator-silicon-on-insulator) capacitive biosensors on the same SOI chip as well as differential-mode measurements. The feasibility of the proposed approach has been demonstrated by realizing sensors for the pH and penicillin concentration detection as well as for the label-free electrical monitoring of polyelectrolyte multilayers formation and DNA (deoxyribonucleic acid)-hybridization event. A potential change of ∼ 120 mV has been registered after the DNA hybridization for the sensor immobilized with perfectly matched single-strand DNA, while practically no signal changes have been observed for a sensor with fully mismatched DNA. The realized examples demonstrate the potential of the nanoplate SOI capacitors as a new basic structural element for the development of different types of field-effect biosensors.
authors.affiliation: Institute of Nano- and Biotechnologies, Aachen University of Applied Sciences, Jülich, Germany.
authors.forename: M H
authors.initials: MH
authors.lastname: Abouzar
authors.forename: A
authors.initials: A
authors.lastname: Poghossian
authors.forename: A M
authors.initials: AM
authors.lastname: Pedraza
authors.forename: D
authors.initials: D
authors.lastname: Gandhi
authors.forename: S
authors.initials: S
authors.lastname: Ingebrandt
authors.forename: W
authors.initials: W
authors.lastname: Moritz
authors.forename: M J
authors.initials: MJ
authors.lastname: Schöning
mesh_terms: D001483:Base Sequence; D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods*; D004247:DNA / Q000032:analysis / Q000235:genetics; D015342:DNA Probes / Q000235:genetics; D025802:Electric Capacitance; D055664:Electrochemical Techniques; D006863:Hydrogen-Ion Concentration; D055616:Microtechnology; D049329:Nanostructures / Q000737:chemistry*; D036103:Nanotechnology; D009693:Nucleic Acid Hybridization; D010406:Penicillins / Q000032:analysis; D012825:Silicon
chemical_list: D015342:DNA Probes; D010406:Penicillins; D004247:DNA; D012825:Silicon