title: Nanomechanics for MEMS: a structural design perspective.
abstract: Nanomechanics and structural design of MEMS are intimately tied together. As mechanical properties of hard materials are found to be strongly sample-size dependent, new criteria are in demand for size-dependent structural analysis and design of MEMS components. The paper offers a critical survey of some of the most interesting and challenging advances in nanomechanics of metals from a MEMS design standpoint. The emphasis is not just on sample size effects in intrinsic properties (in plasticity, elasticity and fracture) but also on extrinsic effects arising in material testing of super hard nano-sized samples and crucially affecting MEMS performance if discarded.
authors.affiliation: NAST center and Department of Chemical Science and Technology, University of Rome Tor Vergata, Via della Ricerca Scientifica, Roma, 00133, Italy. antonio.rinaldi@uniroma2.it
authors.forename: Antonio
authors.initials: A
authors.lastname: Rinaldi
authors.forename: Silvia
authors.initials: S
authors.lastname: Licoccia
authors.forename: Enrico
authors.initials: E
authors.lastname: Traversa
mesh_terms: D019245:Compressive Strength; D055119:Elastic Modulus; D004867:Equipment Design; D019544:Equipment Failure Analysis; D006244:Hardness; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000295:instrumentation*; D010316:Particle Size; D013718:Tensile Strength