title: High-Q Si microresonators formed by substrate transfer on silica waveguide wafers.
abstract: We report the first demonstration of Si microresonators (MRs) fabricated via substrate transfer on a silica waveguide (WG) wafer. Specifically, these Si microdisks were fabricated on a layer of Si (0.16-0.2 μm thick) that was directly-bonded on a silica waveguide wafer. We measured the throughput and drop spectrum of these microdisks when coupled to bonded silica waveguides, and observed loaded quality-factors (Qs) of ≥10(4). We modeled, in addition, the dispersion of whispering gallery modes in these microdisks to show phase-matched coupling with an incident silica waveguide or fiber-taper. Using the measured extinction ratio and loaded-Q, we evaluated, in addition, the coupling coefficient between the incident waveguide/taper and Si MR.
authors.affiliation: HRL Laboratories, LLC, Malibu, California, 90265 USA. wwng@hrl.com
authors.forename: W
authors.initials: W
authors.lastname: Ng
authors.forename: T
authors.initials: T
authors.lastname: Rockwood
authors.forename: D
authors.initials: D
authors.lastname: Persechini
authors.forename: D
authors.initials: D
authors.lastname: Chang
mesh_terms: D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005336:Fiber Optic Technology / Q000295:instrumentation*; D008904:Miniaturization; D008962:Models, Theoretical; D012031:Refractometry / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry*
chemical_list: D012825:Silicon