title: Nanomembrane transfer process for intricate photonic device applications.
abstract: We demonstrate a process for the fabrication and transfer of silicon nanomembranes (Si-NMs) that have been released from their host substrates and redeposited on foreign flexible or flat substrates. The transfer process developed allows intricate photonic devices to be transferred via NMs to a variety of new substrate materials. This allows the transferred devices to benefit from the material properties of both substrate and NM. Our process is designed to transfer and stack large-area photonic devices without compromising their optical performance. The process has been used to transfer large-area unpatterned silicon NMs, in excess of 2.5 cm(2), and photonic devices with intricate device designs containing various fill factors. We have also demonstrated transferred photonic crystal devices that have maintained structural integrity and functionality.
authors.affiliation: Department of Electrical Engineering, University of Delaware, Newark, Delaware 19716, USA. zablocki@udel.edu
authors.forename: Mathew J
authors.initials: MJ
authors.lastname: Zablocki
authors.forename: Ahmed
authors.initials: A
authors.lastname: Sharkawy
authors.forename: Ozgenc
authors.initials: O
authors.lastname: Ebil
authors.forename: Dennis W
authors.initials: DW
authors.lastname: Prather