title: Aberration-compensated large-angle rocking-beam electron diffraction.
abstract: The application of convergent beam electron diffraction (CBED) to determine symmetry, refine structure factors, and measure specimen thickness requires rather thick specimen and is very difficult or even impossible in the case of large unit cell materials. The large-angle rocking-beam electron diffraction (LARBED) technique introduced in this paper gives access to the kind of experimental data contained in CBED patterns but over a much larger angular range. In addition to symmetry determination and thickness measurement even for thin samples this technique also allows, in principle, very accurate measurements of structure factors. Similar to precession electron diffraction (PED), LARBED uses the illumination tilt coils to sequentially change the angle of incidence of the electron beam over a very large range. I will present results obtained by a recently developed self-calibrating acquisition software which compensates for aberration-induced probe shifts during the acquisition of LARBED patterns and keeps the probe within a few nm, while covering a tilt range from 0 to 100 mrad. This paper is dedicated to Prof. John C. H. Spence on the occasion of his 65th birthday.
authors.affiliation: Max Planck Institute for Metals Research, Heisenbergstr. 3, 70569 Stuttgart, Germany. koch@mf.mpg.de
authors.forename: Christoph T
authors.initials: CT
authors.lastname: Koch
mesh_terms: D004583:Electrons; D007091:Image Processing, Computer-Assisted; D008029:Lighting; D046529:Microscopy, Electron, Transmission / Q000379:methods*; D036103:Nanotechnology