title: The European nanometrology landscape.
abstract: This review paper summarizes the European nanometrology landscape from a technical perspective. Dimensional and chemical nanometrology are discussed first as they underpin many of the developments in other areas of nanometrology. Applications for the measurement of thin film parameters are followed by two of the most widely relevant families of functional properties: measurement of mechanical and electrical properties at the nanoscale. Nanostructured materials and surfaces, which are seen as key materials areas having specific metrology challenges, are covered next. The final section describes biological nanometrology, which is perhaps the most interdisciplinary applications area, and presents unique challenges. Within each area, a review is provided of current status, the capabilities and limitations of current techniques and instruments, and future directions being driven by emerging industrial measurement requirements. Issues of traceability, standardization, national and international programmes, regulation and skills development will be discussed in a future paper.
authors.affiliation: National Physical Laboratory, UK. richard.leach@npl.co.uk
authors.forename: Richard K
authors.initials: RK
authors.lastname: Leach
authors.forename: Robert
authors.initials: R
authors.lastname: Boyd
authors.forename: Theresa
authors.initials: T
authors.lastname: Burke
authors.forename: Hans-Ulrich
authors.initials: HU
authors.lastname: Danzebrink
authors.forename: Kai
authors.initials: K
authors.lastname: Dirscherl
authors.forename: Thorsten
authors.initials: T
authors.lastname: Dziomba
authors.forename: Mark
authors.initials: M
authors.lastname: Gee
authors.forename: Ludger
authors.initials: L
authors.lastname: Koenders
authors.forename: Valérie
authors.initials: V
authors.lastname: Morazzani
authors.forename: Allan
authors.initials: A
authors.lastname: Pidduck
authors.forename: Debdulal
authors.initials: D
authors.lastname: Roy
authors.forename: Wolfgang E S
authors.initials: WE
authors.lastname: Unger
authors.forename: Andrew
authors.initials: A
authors.lastname: Yacoot