Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects.
Carbon nanotubes (CNT) are known to be materials with potential for manufacturing sub-20 nm high aspect ratio vertical interconnects in future microchips. In order to be successful with respect to contending against established tungsten or copper based interconnects, though, CNT must fulfil their promise of also providing low electrical resistance in integrated structures using scalable integration processes fully compatible with silicon technology. Hence, carefully engineered growth and integration solutions are required before we can fully exploit their potentialities. This work tackles the problem of optimizing a CNT integration process from the electrical perspective. The technique of measuring the CNT resistance as a function of the CNT length is here extended to CNT integrated in vertical contacts. This allows extracting the linear resistivity and the contact resistance of the CNT, two parameters to our knowledge never reported separately for vertical CNT contacts and which are of utmost importance, as they respectively measure the quality of the CNT and that of their metal contacts. The technique proposed allows electrically distinguishing the impact of each processing step individually on the CNT resistivity and the CNT contact resistance. Hence it constitutes a powerful technique for optimizing the process and developing CNT contacts of superior quality. This can be of relevant technological importance not only for interconnects but also for all those applications that rely on the electrical properties of CNT grown with a catalytic chemical vapor deposition method at low temperature.
IMEC, Kapeldreef 75, Leuven, B-3001, Belgium. chiodarn@imec.be
Nicolo'
N
Chiodarelli
Sugiura
S
Masahito
Yusaku
Y
Kashiwagi
Yunlong
Y
Li
Kai
K
Arstila
Olivier
O
Richard
Daire J
DJ
Cott
Marc
M
Heyns
Stefan
S
De Gendt
Guido
G
Groeseneken
Philippe M
PM
Vereecken