Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime.
X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.
Paul Scherrer Institut, Villigen, Switzerland. joan.vila@psi.ch
Joan
J
Vila-Comamala
Sergey
S
Gorelick
Elina
E
Färm
Cameron M
CM
Kewish
Ana
A
Diaz
Ray
R
Barrett
Vitaliy A
VA
Guzenko
Mikko
M
Ritala
Christian
C
David
D004867:Equipment Design; D007909:Lenses; D008853:Microscopy / Q000295:instrumentation* / Q000379:methods; D017348:Microscopy, Electron, Scanning Transmission / Q000295:instrumentation* / Q000379:methods; D055096:Optical Devices; D055620:Optical Phenomena; D053838:Scattering, Small Angle; D014961:X-Ray Diffraction / Q000295:instrumentation* / Q000379:methods