title: Controlling the transmission of ultrahigh frequency bulk acoustic waves in silicon by 45° mirrors.
abstract: In this paper, we present a feasible microsystem in which the direction of localized ultrahigh frequency (∼1GHz) bulk acoustic wave can be controlled in a silicon wafer. Deep etching technology on the silicon wafer makes it possible to achieve high aspect ratio etching patterns which can be used to control bulk acoustic wave to transmit in the directions parallel to the surface of the silicon wafer. Passive 45° mirror planes obtained by wet chemical etching were employed to reflect the bulk acoustic wave. Zinc oxide (ZnO) thin film transducers were deposited by radio frequency sputtering with a thickness of about 1μm on the other side of the wafer, which act as emitter/receptor after aligned with the mirrors. Two opponent vertical mirrors were inserted between the 45° mirrors to guide the transmission of the acoustic waves. The propagation of the bulk acoustic wave was studied with simulations and the characterization of S(21) scattering parameters, indicating that the mirrors were efficient to guide bulk acoustic waves in the silicon wafer.
authors.affiliation: Institut d'Electronique de Microélectronique et de Nanotechnologies (IEMN-DOAE-UMR CNRS 8520),Université de Valenciennes et du Hainaut Cambresis (UVHC), Université Lille Nord de France, F-59313 Valenciennes, France. shengxiang.wang@iemn.univ-lille1.fr
authors.forename: Shengxiang
authors.initials: S
authors.lastname: Wang
authors.forename: Jiaming
authors.initials: J
authors.lastname: Gao
authors.forename: Julien
authors.initials: J
authors.lastname: Carlier
authors.forename: Pierre
authors.initials: P
authors.lastname: Campistron
authors.forename: Assane
authors.initials: A
authors.lastname: NDieguene
authors.forename: Shishang
authors.initials: S
authors.lastname: Guo
authors.forename: Olivier Bou
authors.initials: OB
authors.lastname: Matar
authors.forename: Debavelaere-Callens
authors.initials: DC
authors.lastname: Dorothee
authors.forename: Bertrand
authors.initials: B
authors.lastname: Nongaillard
mesh_terms: D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007909:Lenses; D008962:Models, Theoretical; D012031:Refractometry / Q000295:instrumentation*; D012542:Scattering, Radiation; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation*