title: Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities.
abstract: We present the fabrication and characterization of high-quality-factor (Q) Si3N4 photonic crystal nanobeam cavities at visible wavelengths for coupling to nitrogen-vacancy centers in a cavity QED system. Confocal microphotoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q ~ 55,000, which are limited by the resolution of our grating spectrometer. This is a 1-order-of-magnitude improvement over previous SiNx cavities at this important wavelength range. We also demonstrate coarse tuning of cavity resonances across 600-700 nm by lithographically scaling the size of fabricated devices.
authors.affiliation: School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA. mkhan@seas.harvard.edu
authors.forename: Mughees
authors.initials: M
authors.lastname: Khan
authors.forename: Thomas
authors.initials: T
authors.lastname: Babinec
authors.forename: Murray W
authors.initials: MW
authors.lastname: McCutcheon
authors.forename: Parag
authors.initials: P
authors.lastname: Deotare
authors.forename: Marko
authors.initials: M
authors.lastname: Loncar
mesh_terms: D018613:Microscopy, Confocal; D036103:Nanotechnology / Q000379:methods*; D017785:Photons; D017655:Silicon Compounds
chemical_list: D017655:Silicon Compounds; C032734:silicon nitride