title: A Parylene Bellows Electrochemical Actuator.
abstract: We present the first electrochemical actuator with Parylene bellows for large-deflection operation. The bellows diaphragm was fabricated using a polyethylene-glycol-based sacrificial molding technique followed by coating in Parylene C. Bellows were mechanically characterized and integrated with a pair of interdigitated electrodes to form an electrochemical actuator that is suitable for low-power pumping of fluids. Pump performance (gas generation rate and pump efficiency) was optimized through a careful examination of geometrical factors. Overall, a maximum pump efficiency of 90% was achieved in the case of electroplated electrodes, and a deflection of over 1.5 mm was demonstrated. Real-time wireless operation was achieved. The complete fabrication process and the materials used in this actuator are bio-compatible, which makes it suitable for biological and medical applications.
authors.affiliation: Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089 USA ( poyingli@usc.edu ).
authors.forename: Po-Ying
authors.initials: PY
authors.lastname: Li
authors.forename: Roya
authors.initials: R
authors.lastname: Sheybani
authors.forename: Christian A
authors.initials: CA
authors.lastname: Gutierrez
authors.forename: Jonathan T W
authors.initials: JT
authors.lastname: Kuo
authors.forename: Ellis
authors.initials: E
authors.lastname: Meng