title: A review of microfabrication technologies: application to x-ray optics.
abstract: We present an outline of various microfabrication techniques and processes, particularly for applications to x-ray optics. Emphasis is placed on both high resolution diffractive components such as gratings and zone plates and multidimensional reflective diffracting structures using multilayer interference mirrors. Some selected examples are also discussed.
authors.affiliation: Laboratoire de Microstructures et de Microélectronique, 196 Av. H. Ravera, 92 220 Bagneux, France.
authors.forename: C
authors.initials: C
authors.lastname: Khan Malek