title: Studies on Parylene C-caulked PDMS (pcPDMS) for low permeability required microfluidics applications.
abstract: This note introduced a complete fabrication strategy of Parylene C-caulked PDMS (pcPDMS) for low permeability required microfluidics applications. The bonding issue enrolled in the pcPDMS fabrication was solved based on careful surface analyses of the Parylene C caulked status in the PDMS matrix.
authors.affiliation: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, PR China.
authors.forename: Yinhua
authors.initials: Y
authors.lastname: Lei
authors.forename: Yaoping
authors.initials: Y
authors.lastname: Liu
authors.forename: Wei
authors.initials: W
authors.lastname: Wang
authors.forename: Wengang
authors.initials: W
authors.lastname: Wu
authors.forename: Zhihong
authors.initials: Z
authors.lastname: Li
mesh_terms: D002021:Buffers; D004058:Diffusion; D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D005459:Fluorides / Q000737:chemistry; D046210:Microfluidic Analytical Techniques; D055616:Microtechnology / Q000379:methods*; D010100:Oxygen / Q000737:chemistry; D010539:Permeability; D011108:Polymers / Q000737:chemistry*; D012235:Rhodamines / Q000737:chemistry; D014992:Xylenes / Q000737:chemistry*
chemical_list: D002021:Buffers; D004129:Dimethylpolysiloxanes; D011108:Polymers; D012235:Rhodamines; D014992:Xylenes; C011055:parylene; C013830:baysilon; C029773:rhodamine B; D005459:Fluorides; D010100:Oxygen