title: Large-area pressure-enduring entrance windows for soft x-ray regime.
abstract: A technology capable of producing large-area pressure-tolerant x-ray entrance windows of submicrometer thickness is presented. It is based on successive tungsten griddings to support a multilayered membrane consisting of polyimide, aluminum, and aluminum nitride. The aspects of design and fabrication processes are discussed with emphasis on the window foil fabrication. The performance of the windows is presented in terms of x-ray transmission, gas leak, pressure endurance, and radiation hardness properties.
authors.affiliation: Technical Research Centre of Finland, Semiconductor Laboratory, Otakaari 7 B, FIN-02150 Espoo, Finland.
authors.forename: R
authors.initials: R
authors.lastname: Mutikainen
authors.forename: V P
authors.initials: VP
authors.lastname: Viitanen
authors.forename: S
authors.initials: S
authors.lastname: Nenonen