title: Production of ultra thin silicon foils.
abstract: Ultra thin silicon foils with thicknesses below 100 nm and large diameters have been produced. Foils with a thickness of 50-60 nm have been used as supporting foils for zone plates and as vacuum windows withstanding a pressure difference of 1 atm.
authors.affiliation: Institute for Synchrotron Radiation, Aarhus University, DK-8000 Aarhus C, Denmark.
authors.forename: R
authors.initials: R
authors.lastname: Medenwaldt
authors.forename: M
authors.initials: M
authors.lastname: Hettwer