title: Photoacid generating ligands for development of positive-tone directly photopatternable metal complexes.
abstract: Photoacid generating ligands, 4-(2-nitrobenzy-loxycarbonyl)catechol and 4-(6-nitroveratryloxycarbonyl)catechol, and indium tin and titanium complexes thereof, were synthesized. These metal complexes perform as positive-tone, directly photopatternable indium tin oxide (ITO) or titanium oxide film precursors. After exposure, acid-bearing selectively soluble complexes could be removed to give patterned films upon developing in aqueous base, which were transformable to the corresponding pattern-preserving metal oxide film. Micropatterning of ITO and titanium oxide films was accomplished with the photoreactivity of the 2-nitrobenzyloxycarbonyl (NBOC) and 6-nitroveratryloxycarbonyl (NVOC) moiety bearing ligands.
authors.affiliation: Technology Research and Development Department, Central Japan Railway Company , 1545-33 Ohyama, Komaki City, Aichi, 485-0801 Japan.
authors.forename: Christopher E J
authors.initials: CE
authors.lastname: Cordonier
authors.forename: Akimasa
authors.initials: A
authors.lastname: Nakamura
authors.forename: Kazuhiko
authors.initials: K
authors.lastname: Shimada
authors.forename: Akira
authors.initials: A
authors.lastname: Fujishima