title: Evolution of structure, phase composition, and x-ray reflectivity of multilayer mirrors mo-(B + C) after annealing at 250-1100°c.
abstract: Structural, phase, and chemical stabilities of x-ray multilayer mirrors Mo-(B + C) with periods in the range 8-11.5 nm were studied at temperatures of 250-1100°C by small-angle and large-angle x-ray diffraction and electron microscopy methods. Two amorphizations at ~450 and ~750°C and two crystallizations at ~650 and ~850°C of Mo-based layers were observed, which were due to the formation of the molybdenum carbides MoC (hex), γ-MoC, and Mo2C instead of the metal Mo, and to the formation of the molybdenum borides MoB2 and Mo2B5 instead of molybdenum carbides, respectively. Both amorphizations of Mo-based layers were accompanied by smoothing of interfaces and by an increase of the multilayer x-ray reflectivity at λ = 0.154 nm. Both crystallizations of Mo-based layers promoted the development of interface roughness and a decrease of multilayer x-ray reflectivity. The destruction of Mo-(B + C) multilayers at ~ 1100°C was caused by the recrystallization of Mo2B5 layers.
authors.affiliation: Kharkiv State Polytechnic University, Kharkiv, Ukraine.
authors.forename: I A
authors.initials: IA
authors.lastname: Kopilets
authors.forename: V V
authors.initials: VV
authors.lastname: Kondratenko
authors.forename: A I
authors.initials: AI
authors.lastname: Fedorenko
authors.forename: E N
authors.initials: EN
authors.lastname: Zubarev
authors.forename: O V
authors.initials: OV
authors.lastname: Poltseva
authors.forename: A G
authors.initials: AG
authors.lastname: Ponomarenko
authors.forename: I I
authors.initials: II
authors.lastname: Lyakhovskaya