title: Conformable solid-index phase masks composed of high-aspect-ratio micropillar arrays and their application to 3D nanopatterning.
authors.affiliation: Department of Materials Science and Engineering, KAIST Institute for Nanocentury, Korea Advanced Institute of Science and Technology, Daejeon, 305 - 701, Republic of Korea.
authors.forename: Junyong
authors.initials: J
authors.lastname: Park
authors.forename: Jae Hong
authors.initials: JH
authors.lastname: Park
authors.forename: Eunhye
authors.initials: E
authors.lastname: Kim
authors.forename: Chi Won
authors.initials: CW
authors.lastname: Ahn
authors.forename: Hyun Ik
authors.initials: HI
authors.lastname: Jang
authors.forename: John A
authors.initials: JA
authors.lastname: Rogers
authors.forename: Seokwoo
authors.initials: S
authors.lastname: Jeon
mesh_terms: D004129:Dimethylpolysiloxanes / Q000737:chemistry; D049329:Nanostructures / Q000737:chemistry; D036103:Nanotechnology / Q000379:methods*; D011140:Polyurethanes / Q000737:chemistry; D012825:Silicon / Q000737:chemistry
chemical_list: D004129:Dimethylpolysiloxanes; D011140:Polyurethanes; C013830:baysilon; D012825:Silicon