title: Characterization and inspection of microlens array by single cube beam splitter microscopy.
abstract: The application of a single cube beam splitter (SCBS) microscope to micro-optics characterization is presented. The SCBS in the optical path, with a small angle between the optical axis and its central semireflecting layer, not only gives off-axis digital holograms but also provides dual-channel imaging. It is a unique and easy way to perform uniformity inspection across the entire microlens array. Experimental results on physical spherical phase compensation, single lens characterization, dual-channel imaging, and uniformity inspection are provided to demonstrate the unique properties of SCBS microscopy.
authors.affiliation: Ngee Ann Polytechnic, 535 Clementi Road, 599489 Singapore. qwe2@np.edu.sg
authors.forename: Weijuan
authors.initials: W
authors.lastname: Qu
authors.forename: Oi Choo
authors.initials: OC
authors.lastname: Chee
authors.forename: Yingjie
authors.initials: Y
authors.lastname: Yu
authors.forename: Anand
authors.initials: A
authors.lastname: Asundi