title: A Parylene MEMS Electrothermal Valve.
abstract: The first microelectromechanical-system normally closed electrothermal valve constructed using Parylene C is described, which enables both low power (in milliwatts) and rapid operation (in milliseconds). This low-power valve is well suited for applications in wirelessly controlled implantable drug-delivery systems. The simple design was analyzed using both theory and modeling and then characterized in benchtop experiments. Operation in air (constant current) and water (current ramping) was demonstrated. Valve-opening powers of 22 mW in air and 33 mW in water were obtained. Following integration of the valve with catheters, our valve was applied in a wirelessly operated microbolus infusion pump, and the in vivo functionality for the appropriateness of use of this pump for future brain mapping applications in small animals was demonstrated.
authors.affiliation: Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089 USA ( poyingli@usc.edu ).
authors.forename: Po-Ying
authors.initials: PY
authors.lastname: Li
authors.forename: Tina K
authors.initials: TK
authors.lastname: Givrad
authors.forename: Daniel P
authors.initials: DP
authors.lastname: Holschneider
authors.forename: Jean-Michel I
authors.initials: JM
authors.lastname: Maarek
authors.forename: Ellis
authors.initials: E
authors.lastname: Meng