title: Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias.
abstract: We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal actuator that is capable of scanning ± 16° at only 3.6 V DC. Two-dimensional and three-dimensional OCT images of microspheres embedded in PDMS and acute rat brain tissue have been obtained with this miniature probe in a time-domain OCT system.
authors.affiliation: University of Florida, Department of Electrical and Computer Engineering, Gainesville, Florida 32611-6130, USA. linliu86@ufl.edu
authors.forename: Lin
authors.initials: L
authors.lastname: Liu
authors.forename: Lei
authors.initials: L
authors.lastname: Wu
authors.forename: Jingjing
authors.initials: J
authors.lastname: Sun
authors.forename: Elaine
authors.initials: E
authors.lastname: Lin
authors.forename: Huikai
authors.initials: H
authors.lastname: Xie
mesh_terms: D019723:Endoscopes; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation*; D007909:Lenses; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008904:Miniaturization; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D012825:Silicon / Q000737:chemistry; D041623:Tomography, Optical Coherence / Q000295:instrumentation*; D014159:Transducers
chemical_list: D012825:Silicon