title: Three-dimensional cavity nanoantenna coupled plasmonic nanodots for ultrahigh and uniform surface-enhanced Raman scattering over large area.
abstract: We propose and demonstrate a new SERS substrate architecture that couples a dense three-dimensional (3-D) cavity nanoantenna array, through nano-gaps, with dense plasmonic nanodots; and a new nanofabrication that combines nanoimprint, guided self-assembly and self-alignment and has fabricated the architecture precisely, simply, inexpensively and over large area (4-inch wafer). We experimentally achieved not only high area-average SERS enhancement (1.2×10⁹) but also excellent uniformity (22.4% variation) at the same time over the entire large-area sample by measuring 90 points with a regular mapping distance. The best uniformity achieved is 15% variation over 1.6 mm by 1.6 mm area at slightly lower enhancement factor and is independent of the excitation laser probe size, which had an area varying from ~1 to 10,000 μm2.
authors.affiliation: NanoStructure Laboratory, Department of Electrical Engineering, Princeton University, Princeton, NJ 08544, USA.
authors.forename: Wen-Di
authors.initials: WD
authors.lastname: Li
authors.forename: Fei
authors.initials: F
authors.lastname: Ding
authors.forename: Jonathan
authors.initials: J
authors.lastname: Hu
authors.forename: Stephen Y
authors.initials: SY
authors.lastname: Chou
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000295:instrumentation*; D045663:Quantum Dots; D020349:Surface Plasmon Resonance / Q000295:instrumentation*; D013499:Surface Properties