title: Fiber-optic interferometer for surface profile measurement with vibration suppression.
abstract: We describe an improved design of fiber-optic interferometer intended to measure surface profiles with enhanced capability of vibration suppression. The reference wavefront is generated directly from the measurement wave using a multi-mode fiber that eliminates only the spatial wavefront distortion by means of bend loss. The temporal fluctuation caused by vibration is consequently cancelled out in the process of interference since it becomes to exist in both the measurement and reference waves. Further, an injection locking technique is incorporated to stabilize the reference wave intensity and hence make stable the interferometric fringe intensity. Experimental result proves that the proposed fiber-optic interferometer is capable of producing sub-wavelength measurement precision even in the presence of severe vibration with 100-μm amplitude.
authors.affiliation: Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, South Korea.
authors.forename: Taekmin
authors.initials: T
authors.lastname: Kwon
authors.forename: Seung-Woo
authors.initials: SW
authors.lastname: Kim
mesh_terms: D016477:Artifacts; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005336:Fiber Optic Technology / Q000295:instrumentation*; D007368:Interferometry / Q000295:instrumentation*; D008422:Materials Testing / Q000295:instrumentation*; D010783:Photometry / Q000295:instrumentation*; D013499:Surface Properties; D014732:Vibration