title: High-resolution field effect sensing of ferroelectric charges.
abstract: Nanoscale manipulation of surface charges and their imaging are essential for understanding local electronic behaviors of polar materials and advanced electronic devices. Electrostatic force microscopy and Kelvin probe force microscopy have been extensively used to probe and image local surface charges responsible for electrodynamics and transport phenomena. However, they rely on the weak electric force modulation of cantilever that limits both spatial and temporal resolutions. Here we present a field effect transistor embedded probe that can directly image surface charges on a length scale of 25 nm and a time scale of less than 125 μs. On the basis of the calculation of net surface charges in a 25 nm diameter ferroelectric domain, we could estimate the charge density resolution to be as low as 0.08 μC/cm(2), which is equivalent to 1/20 electron per nanometer square at room temperature.
authors.affiliation: Semiconductor Device Laboratory, Samsung Advanced Institute of Technology, Yongin 446-712, Korea.
authors.forename: Hyoungsoo
authors.initials: H
authors.lastname: Ko
authors.forename: Kyunghee
authors.initials: K
authors.lastname: Ryu
authors.forename: Hongsik
authors.initials: H
authors.lastname: Park
authors.forename: Chulmin
authors.initials: C
authors.lastname: Park
authors.forename: Daeyoung
authors.initials: D
authors.lastname: Jeon
authors.forename: Yong Kwan
authors.initials: YK
authors.lastname: Kim
authors.forename: Juhwan
authors.initials: J
authors.lastname: Jung
authors.forename: Dong-Ki
authors.initials: DK
authors.lastname: Min
authors.forename: Yunseok
authors.initials: Y
authors.lastname: Kim
authors.forename: Ho Nyung
authors.initials: HN
authors.lastname: Lee
authors.forename: Yoondong
authors.initials: Y
authors.lastname: Park
authors.forename: Hyunjung
authors.initials: H
authors.lastname: Shin
authors.forename: Seungbum
authors.initials: S
authors.lastname: Hong
mesh_terms: D003198:Computer Simulation; D004574:Electromagnetic Fields; D007501:Iron / Q000737:chemistry*; D008846:Micromanipulation / Q000379:methods*; D008956:Models, Chemical; D049329:Nanostructures / Q000737:chemistry* / Q000528:radiation effects*; D055672:Static Electricity
chemical_list: D007501:Iron