title: Substrate effects on the electron-beam-induced deposition of platinum from a liquid precursor.
abstract: Focused electron-beam-induced deposition using bulk liquid precursors (LP-EBID) is a new nanofabrication technique developed in the last two years as an alternative to conventional EBID, which utilizes cumbersome gaseous precursors. Furthermore, LP-EBID using dilute aqueous precursors has been demonstrated to yield platinum (Pt) nanostructures with as-deposited metal content that is substantially higher than the purity achieved by EBID with currently available gaseous precursors. This advantage of LP-EBID--along with the ease of use, low cost, and relative innocuousness of the liquid precursors--holds promise for its practical applicability in areas such as rapid device prototyping and lithographic mask repair. One of the feasibility benchmarks for the LP-EBID method is the ability to deposit high-fidelity nanostructures on various substrate materials. In this study, we report the first observations of performing LP-EBID on bare and metal-coated silicon-nitride membranes, and compare the resulting Pt deposits to those obtained by LP-EBID on polyimide membranes in terms of nucleation, morphology, size dependence on electron dose, and purity.
authors.affiliation: Department of Electrical and Computer Engineering, and Center for Nanoscale Science and Engineering, University of Kentucky, Lexington, KY 40506, USA.
authors.forename: Eugenii U
authors.initials: EU
authors.lastname: Donev
authors.forename: Gregory
authors.initials: G
authors.lastname: Schardein
authors.forename: John C
authors.initials: JC
authors.lastname: Wright
authors.forename: J Todd
authors.initials: JT
authors.lastname: Hastings
mesh_terms: D004583:Electrons; D049329:Nanostructures / Q000737:chemistry / Q000648:ultrastructure; D010984:Platinum / Q000737:chemistry*; D012117:Resins, Synthetic / Q000737:chemistry; D017655:Silicon Compounds / Q000737:chemistry
chemical_list: D012117:Resins, Synthetic; D017655:Silicon Compounds; C029945:polyimide resin; D010984:Platinum; C032734:silicon nitride