title: Fabrication of cone-shaped boron doped diamond and gold nanoelectrodes for AFM-SECM.
abstract: We demonstrate a reliable microfabrication process for a combined atomic force microscopy (AFM) and scanning electrochemical microscopy (SECM) measurement tool. Integrated cone-shaped sensors with boron doped diamond (BDD) or gold (Au) electrodes were fabricated from commercially available AFM probes. The sensor formation process is based on mature semiconductor processing techniques, including focused ion beam (FIB) machining, and highly selective reactive ion etching (RIE). The fabrication approach preserves the geometry of the original AFM tips resulting in well reproducible nanoscaled sensors. The feasibility and functionality of the fully featured tips are demonstrated by cyclic voltammetry, showing good agreement between the measured and calculated currents of the cone-shaped AFM-SECM electrodes.
authors.affiliation: Solid State Electronics Institute, Vienna University of Technology, Floragasse 7, 1040 Vienna, Austria.
authors.forename: A
authors.initials: A
authors.lastname: Avdic
authors.forename: A
authors.initials: A
authors.lastname: Lugstein
authors.forename: M
authors.initials: M
authors.lastname: Wu
authors.forename: B
authors.initials: B
authors.lastname: Gollas
authors.forename: I
authors.initials: I
authors.lastname: Pobelov
authors.forename: T
authors.initials: T
authors.lastname: Wandlowski
authors.forename: K
authors.initials: K
authors.lastname: Leonhardt
authors.forename: G
authors.initials: G
authors.lastname: Denuault
authors.forename: E
authors.initials: E
authors.lastname: Bertagnolli
mesh_terms: D000465:Algorithms; D001895:Boron / Q000737:chemistry*; D002857:Chromium / Q000737:chemistry; D018130:Diamond / Q000737:chemistry*; D055664:Electrochemical Techniques / Q000295:instrumentation* / Q000379:methods; D004563:Electrochemistry; D006046:Gold / Q000737:chemistry*; D008839:Microelectrodes; D018625:Microscopy, Atomic Force / Q000295:instrumentation* / Q000379:methods*; D008855:Microscopy, Electron, Scanning; D020527:Microscopy, Scanning Probe / Q000295:instrumentation / Q000379:methods; D036103:Nanotechnology / Q000379:methods*; D012825:Silicon / Q000737:chemistry; D017655:Silicon Compounds / Q000737:chemistry; D013052:Spectrometry, X-Ray Emission; D014025:Titanium / Q000737:chemistry
chemical_list: D017655:Silicon Compounds; D002857:Chromium; D006046:Gold; D018130:Diamond; D014025:Titanium; D001895:Boron; C032734:silicon nitride; D012825:Silicon