title: Review of the applications of x-ray refraction and the x-ray waveguide phenomenon to estimation of film structures.
abstract: Based on our previous work, I review the applications of x-ray refraction and the x-ray waveguide phenomenon to organic and inorganic thin films in the present paper. Under grazing incidence conditions, observations of refracted x-rays and guided x-rays due to the x-ray waveguide phenomenon provide information about thin film structures, and thus have potential as alternative methods to x-ray reflectivity. To date, we have measured the spectra of the refracted x-rays and guided x-rays from end faces of thin films using white incident x-ray beams, and utilized them for the determination of film density and thickness. Some of this work is summarized in the present paper. At the end of this paper, I describe our recent achievement in this field, namely the in situ measurement of guided x-rays during the film degradation process due to strong synchrotron radiation damage. Moreover, I discuss the perspective of the present technique from the viewpoint of micro-characterization and real-time estimation of thin films.
authors.affiliation: Institute of Materials Research, Tohoku University, Sendai 980-8577, Japan. khayashi@imr.tohoku.ac.jp
authors.forename: Kouichi
authors.initials: K
authors.lastname: Hayashi
mesh_terms: D007287:Inorganic Chemicals / Q000737:chemistry*; D008422:Materials Testing / Q000379:methods*; D008567:Membranes, Artificial; D009930:Organic Chemicals / Q000737:chemistry*; D013499:Surface Properties; D014961:X-Ray Diffraction / Q000379:methods*
chemical_list: D007287:Inorganic Chemicals; D008567:Membranes, Artificial; D009930:Organic Chemicals