title: Deep UV nano-microstructuring of substrates for surface plasmon resonance imaging.
abstract: In this paper, we describe wafer-scale fabrication and characterization of plasmonic chips-containing different sizes and spacings of metallic micro- and nanoline structures-using deep UV lithography. Using a high dose (25 mJ cm( - 2)) and a proper lift-off process, feature sizes as small as 25 nm are obtained. Moreover, we study the dependence of surface plasmon resonance on the angle of incidence and wavelength for different micro- and nanoline size and spacing values, yielding localized to quasi-propagative plasmonic behaviors. Rigorous coupled wave analysis (RCWA) techniques are employed to numerically confirm these experimental observations. Finally, the refractive index of media around the SPRI sensor chips is varied, showing the angulo-spectral regions of higher sensitivity for each type of structure.
authors.affiliation: Fitzpatrick Institute for Photonics, Duke University, Durham, NC 27708, USA.
authors.forename: A
authors.initials: A
authors.lastname: Dhawan
authors.forename: A
authors.initials: A
authors.lastname: Duval
authors.forename: M
authors.initials: M
authors.lastname: Nakkach
authors.forename: G
authors.initials: G
authors.lastname: Barbillon
authors.forename: J
authors.initials: J
authors.lastname: Moreau
authors.forename: M
authors.initials: M
authors.lastname: Canva
authors.forename: T
authors.initials: T
authors.lastname: Vo-Dinh
mesh_terms: D003460:Crystallization / Q000379:methods*; D046911:Macromolecular Substances / Q000737:chemistry / Q000528:radiation effects; D008422:Materials Testing; D008968:Molecular Conformation / Q000528:radiation effects; D049329:Nanostructures / Q000737:chemistry* / Q000528:radiation effects / Q000648:ultrastructure*; D010316:Particle Size; D011829:Radiation Dosage; D020349:Surface Plasmon Resonance / Q000379:methods*; D013499:Surface Properties / Q000528:radiation effects; D014466:Ultraviolet Rays
chemical_list: D046911:Macromolecular Substances