title: Directed fracture for the fabrication of free-standing multilayered submicrometer structures.
authors.affiliation: Institut de Microelectrònica de Barcelona, IMB-CNM (CSIC), Campus UAB, 08193 Cerdanyola, Barcelona, Spain.
authors.forename: Roberto R
authors.initials: RR
authors.lastname: Robaina
authors.forename: María José
authors.initials: MJ
authors.lastname: López-Martínez
authors.forename: Jaume
authors.initials: J
authors.lastname: Esteve
authors.forename: Raquel
authors.initials: R
authors.lastname: Perez-Castillejos
authors.forename: José Antonio
authors.initials: JA
authors.lastname: Plaza
mesh_terms: D008855:Microscopy, Electron, Scanning; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D011108:Polymers / Q000737:chemistry
chemical_list: D011108:Polymers