title: Silicon-polymer hybrid slot waveguide ring-resonator modulator.
abstract: We demonstrate a ring-resonator modulator based on a silicon-polymer hybrid slot waveguide with a tunability of 12.7 pm/V at RF speeds and a bandwidth of 1 GHz, for optical wavelengths near 1550 nm. Our slot waveguides were fabricated with 193 nm optical lithography, as opposed to the electron beam lithography used for previous results. The tunability is comparable to some of the best ring-based modulators making use of the plasma dispersion effect. The speed is likely limited only by resistance in the strip-loading section, and it should be possible to realize significant improvement with improved processing.
authors.affiliation: Department of Electrical Engineering, University of Washington, Seattle, WA 98195, USA. michael.gould@mail.mcgill.ca
authors.forename: Michael
authors.initials: M
authors.lastname: Gould
authors.forename: Tom
authors.initials: T
authors.lastname: Baehr-Jones
authors.forename: Ran
authors.initials: R
authors.lastname: Ding
authors.forename: Su
authors.initials: S
authors.lastname: Huang
authors.forename: Jingdong
authors.initials: J
authors.lastname: Luo
authors.forename: Alex K-Y
authors.initials: AK
authors.lastname: Jen
authors.forename: Jean-Marc
authors.initials: JM
authors.lastname: Fedeli
authors.forename: Maryse
authors.initials: M
authors.lastname: Fournier
authors.forename: Michael
authors.initials: M
authors.lastname: Hochberg
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D011108:Polymers / Q000737:chemistry*; D012031:Refractometry / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry*; D013685:Telecommunications / Q000295:instrumentation*
chemical_list: D011108:Polymers; D012825:Silicon