title: Hollow ARROW Waveguides on Self-Aligned Pedestals for Improved Geometry and Transmission.
abstract: Micrometer-sized hollow antiresonant reflecting optical waveguides on silicon substrates have been previously demonstrated with liquid and gas-filled cores. Previous designs have nonideal geometries, with nonuniform lateral layers around the hollow core, resulting in higher loss than could potentially be achieved. A new design and fabrication process has been developed involving hollow waveguide fabrication on a self-aligned pedestal (SAP) using anisotropic plasma etching. With the SAP structure, the hollow core is surrounded by uniform layers and a terminal layer of air on three sides, resulting in air-core waveguide loss of 1.54 cm(-1) at 785 nm and high fabrication yield.
authors.affiliation: Department of Electrical and Computer Engineering, Brigham Young University, Provo, UT 84602 USA.
authors.forename: Evan J
authors.initials: EJ
authors.lastname: Lunt
authors.forename: Bin
authors.initials: B
authors.lastname: Wu
authors.forename: Jared M
authors.initials: JM
authors.lastname: Keeley
authors.forename: Philip
authors.initials: P
authors.lastname: Measor
authors.forename: Holger
authors.initials: H
authors.lastname: Schmidt
authors.forename: Aaron R
authors.initials: AR
authors.lastname: Hawkins