title: Direct fabrication of integrated 3D epitaxial functional transition metal oxide nanostructures using extremely small hollow nanopillar nano-imprint metal masks.
abstract: A novel nanofabrication technique is developed for functional oxides. Combining nano-imprint lithography, sidewall-etching and sidewall-deposition processes enables us to prepare Mo hollow nanopillar masks with 100 and 60 nm window sizes, which is smaller than the original nano-imprint mold size of 250 nm. Using this Mo nanomask, extremely small epitaxial ferromagnetic oxide (Fe(2.5)Mn(0.5)O(4)) nanostructures can be directly grown on sapphire substrates at the deposition temperature of 350 °C in a pulsed laser deposition (PLD) process.
authors.affiliation: Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan.
authors.forename: Nam-Goo
authors.initials: NG
authors.lastname: Cha
authors.forename: Teruo
authors.initials: T
authors.lastname: Kanki
authors.forename: Hidekazu
authors.initials: H
authors.lastname: Tanaka