title: Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide.
abstract: We present a method for high fidelity lithographic patterning on polydimethylsiloxane (PDMS) surfaces employing traditional cleanroom equipment and commercially available materials that overcomes previous problems in PDMS processing. To illustrate this method, an electrostatically actuated microfluidic pump and rectangular diffraction gratings were fabricated on PDMS.
authors: School of Engineering and Applied Sciences, Harvard University, 29 Oxford St, Cambridge, MA 02138, USA. rdiebold@seas.harvard.edu
authors: Roger M
authors: RM
authors: Diebold
authors: David R
authors: DR
authors: Clarke