title: Effect of thermal annealing on the optical properties and residual stress of graded-index-like films deposited by radio-frequency ion-beam sputtering.
abstract: Composite films of Ta-Si oxide and graded-index-like films have been realized by using radio-frequency ion-beam sputtering. The influence of thermal annealing on the optical properties and residual stress of single-layer composite films and graded-index-like films has been studied. The residual stress and optical properties of both types of films were more stable than that of the notch filters fabricated from a series of discrete quarter-wave layers made by alternatively stacking high and low index materials after annealing.
authors: Department of Optoelectronic System Engineering, Minghsin University of Science and Technology, Hsin-Chu, Taiwan. cjtang@must.edu.tw
authors: Chien-Jen
authors: CJ
authors: Tang
authors: Cheng-Chung
authors: CC
authors: Jaing
authors: Kun-Hsien
authors: KH
authors: Lee
authors: Cheng-Chung
authors: CC
authors: Lee