title: Preparation of pentacene thin film deposited using organic material auto-feeding system for the fabrication of organic thin film transistor.
abstract: In this study, pentacene organic thin film was prepared using newly developed organic material auto-feeding system integrated with linear cell and characterized. The newly developed organic material auto-feeding system consists of 4 major parts: reservoir, micro auto-feeder, vaporizer, and linear cell. The deposition of organic thin film could be precisely controlled by adjusting feeding rate, main tube size, position and size of nozzle. 10 nm thick pentacene thin film prepared on glass substrate exhibited high uniformity of 3.46% which is higher than that of conventional evaporation method using point cell. The continuous deposition without replenishment of organic material can be performed over 144 hours with regulated deposition control. The grain size of pentacene film which affect to mobility of OTFT, was controlled as a function of the temperature.
authors: National Center for Nanoprocess and Equipments, Honam Technology Division, Korea Institute of Industrial Technology, Gwangju 500-480, Korea.
authors: Young Baek
authors: YB
authors: Kim
authors: Bum Ho
authors: BH
authors: Choi
authors: Yong Hwan
authors: YH
authors: Lim
authors: Ha Na
authors: HN
authors: Yoo
authors: Jong Ho
authors: JH
authors: Lee
authors: Jin Hyeok
authors: JH
authors: Kim