title: A 10,000 groove/mm multilayer coated grating for EUV spectroscopy.
abstract: Ultra-high spectral resolution in the EUV and soft x-ray energy ranges requires the use of very high line density gratings with optimal design resulting in use of a Blazed Multilayer Grating (BMG) structure. Here we demonstrate the production of near-atomically perfect Si blazed substrates with an ultra-high groove density (10,000 l/mm) together with the measured and theoretical performance of an Al/Zr multilayer coating on the grating. A 1st order absolute efficiency of 13% and 24.6% was achieved at incidence angles of 11° and 36° respectively. Cross-sectional TEM shows the effect of smoothing caused by the surface mobility of deposited atoms and we correlate this effect with a reduction in peak diffraction efficiency. This work shows the high performance that can be achieved with BMGs based on small-period anisotropic etched Si substrates, but also the constraints imposed by the surface mobility of deposited species.
authors: Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA. dlvoronov@lbl.gov
authors: D L
authors: DL
authors: Voronov
authors: E H
authors: EH
authors: Anderson
authors: R
authors: R
authors: Cambie
authors: S
authors: S
authors: Cabrini
authors: S D
authors: SD
authors: Dhuey
authors: L I
authors: LI
authors: Goray
authors: E M
authors: EM
authors: Gullikson
authors: F
authors: F
authors: Salmassi
authors: T
authors: T
authors: Warwick
authors: V V
authors: VV
authors: Yashchuk
authors: H A
authors: HA
authors: Padmore
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D012031:Refractometry / Q000295:instrumentation*; D013056:Spectrophotometry, Ultraviolet / Q000295:instrumentation*