title: Investigation of the error self-compensation effect associated with broadband optical monitoring.
abstract: A rigorous definition of the error self-compensation effect is provided. An existence of this effect in the case of coating production with broadband optical monitoring of layer thicknesses is investigated for several widely used types of optical coatings.
authors: Research Computing Center, Moscow State University, Moscow, Russia. tikh@srcc.msu.ru
authors: Alexander V
authors: AV
authors: Tikhonravov
authors: Michael K
authors: MK
authors: Trubetskov
authors: Tatiana V
authors: TV
authors: Amotchkina