title: Angle-resolved scattering: an effective method for characterizing thin-film coatings.
abstract: Light scattered from interface imperfections carries valuable information about its origins. For single surfaces, light-scattering techniques have become a powerful tool for the characterization of surface roughness. For thin-film coatings, however, solving the inverse scattering problem seemed to be impossible because of the large number of parameters involved. A simplified model is presented that introduces two parameters: Parameter δ describes optical thickness deviations from the perfect design, and parameter β describes the roughness evolution inside the coating according to a power law. The new method is used to investigate structural and alteration effects of HR coatings for 193 nm, as well as laser-induced degradation effects in Rugate filters for 355 nm.
authors: Fraunhofer Institute for Applied Optics and Precision Engineering, Jena, Germany.
authors: Sven
authors: S
authors: Schröder
authors: Tobias
authors: T
authors: Herffurth
authors: Holger
authors: H
authors: Blaschke
authors: Angela
authors: A
authors: Duparré