title: Nanometer-scale displacement sensor based on phase-sensitive diffraction grating.
abstract: In this paper, a nanometer-scale displacement sensor based on a phase-sensitive diffraction grating with interferometeric detection is described and experimentally demonstrated. The proposed displacement sensor consists of a coherent light source, a microstepping motor controller, an integrated grating, a mirror, and a differential circuit. Experimental results show that the displacement sensor has a sensitivity of about 6 mV/nm and a resolution of less than 1 nm. This displacement measurement is an attractive technology with high sensitivity, broad dynamic range, good reliability, and immunity to electromagnetic interference.
authors: State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China.
authors: Shuangshuang
authors: S
authors: Zhao
authors: Changlun
authors: C
authors: Hou
authors: Jian
authors: J
authors: Bai
authors: Guoguang
authors: G
authors: Yang
authors: Feng
authors: F
authors: Tian