title: Nanomachining by rubbing at ultrasonic frequency under controlled shear force.
abstract: This study proposes a new method of proximal-probe machining that uses a rubbing process by introducing concentrated-mass (CM) cantilevers. At the second resonance of the CM cantilever vibration, the tip site of the cantilever becomes a node of the standing deflection wave because of the sufficient inertia of the attached concentrated mass. The tip makes a cyclic motion that is tangential to the sample surface, not vertical to it, as in a tapping motion. This lateral tip motion that is selectively excited by CM cantilevers was effective for the material modification of a sample due to the friction between the tip and the sample. Imaging and nanomachining under controlled shear force were demonstrated by means of the modified cantilever and a normal atomic force microscope. We were able to write a micron-sized letter "Z" having a line width of 30-100 nm on a resin surface.
authors: Department of Mechanical Engineering, Akita University, 1-1 Tegatagakuen-machi, Akita 010-8502, Japan.
authors: Mikio
authors: M
authors: Muraoka
mesh_terms: D017276:Friction; D008422:Materials Testing; D008846:Micromanipulation / Q000379:methods*; D018625:Microscopy, Atomic Force / Q000379:methods*; D049329:Nanostructures / Q000737:chemistry* / Q000528:radiation effects* / Q000648:ultrastructure; D036103:Nanotechnology / Q000379:methods*; D033081:Shear Strength; D013010:Sonication / Q000379:methods*; D013314:Stress, Mechanical; D013499:Surface Properties