title: Multi-layer nanogap array for high-performance SERS substrate.
abstract: A multi-layer nanogap array composed of three linearly aligned gold nanogaps is fabricated for a surface-enhanced Raman spectroscopy (SERS) substrate. The overall process for the proposed structure is simple and reliable with the use of a photolithography-free fabrication process, which includes only deposition and etching. Chemical vapor deposition (CVD) is employed to form a uniform and highly controllable nanogap array. The nanogap width, a crucial parameter in SERS, is determined by the sacrificial film thickness of CVD. Experiments on nanogap width and polarization angle dependence are carried out to characterize the fabricated multi-layer nanogap array as an SERS substrate.
authors.affiliation: Department of Electrical Engineering, KAIST, Daejeon, Republic of Korea.
authors.forename: Myeong-Lok
authors.initials: ML
authors.lastname: Seol
authors.forename: Ju-Hyun
authors.initials: JH
authors.lastname: Kim
authors.forename: Taejoon
authors.initials: T
authors.lastname: Kang
authors.forename: Hwon
authors.initials: H
authors.lastname: Im
authors.forename: Sungho
authors.initials: S
authors.lastname: Kim
authors.forename: Bongsoo
authors.initials: B
authors.lastname: Kim
authors.forename: Yang-Kyu
authors.initials: YK
authors.lastname: Choi