title: Micromechanically tuned ring resonator in silicon on insulator.
abstract: We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.
authors.affiliation: Integrated Optical Microsystems, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.
authors.forename: Lasse J
authors.initials: LJ
authors.lastname: Kauppinen
authors.forename: Shahina M C
authors.initials: SM
authors.lastname: Abdulla
authors.forename: Meindert
authors.initials: M
authors.lastname: Dijkstra
authors.forename: Meint J
authors.initials: MJ
authors.lastname: de Boer
authors.forename: Erwin
authors.initials: E
authors.lastname: Berenschot
authors.forename: Gijs J M
authors.initials: GJ
authors.lastname: Krijnen
authors.forename: Markus
authors.initials: M
authors.lastname: Pollnau
authors.forename: René M
authors.initials: RM
authors.lastname: de Ridder