title: Patterning of periodic high-aspect-ratio nanopores in anatase titanium dioxide from titanium fluoride hydrolysis.
abstract: We report straight pores in titanium dioxide produced by a pattern transfer method with titanium fluoride hydrolysis. The resulting films on fluorine-doped tin oxide had pores with diameters of 30 nm and depths of 500 nm, corresponding to aspect ratios of 1:17.
authors.affiliation: Department of Chemistry, Northwestern University, Evanston, IL, USA.
authors.forename: Ian D
authors.initials: ID
authors.lastname: Tevis
authors.forename: Samuel I
authors.initials: SI
authors.lastname: Stupp
mesh_terms: D003460:Crystallization / Q000379:methods*; D005459:Fluorides / Q000737:chemistry*; D006868:Hydrolysis; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D016062:Porosity; D013499:Surface Properties; D014025:Titanium / Q000737:chemistry*
chemical_list: D046911:Macromolecular Substances; C009495:titanium dioxide; D014025:Titanium; D005459:Fluorides; C032240:titanium tetrafluoride