title: Full wave optical profilometry.
abstract: We show that tomographic diffractive microscopy can be used for profilometry applications with high transverse resolution. We present an iterative reconstruction procedure, based on a rigorous wave scattering model, that permits us to retrieve the profile of rough metallic interfaces from the complex scattered field. The transversal resolution is subwavelength, and can even fall below the classical resolution limit if the profile is rough enough for multiple interactions to occur. Large profiles, with tens of wavelength size, can be investigated.
authors.affiliation: Institut Fresnel (CNRS UMR 6133), Aix-Marseille Université, Campus de St Jérôme, 13013 Marseille, France.
authors.forename: S
authors.initials: S
authors.lastname: Arhab
authors.forename: G
authors.initials: G
authors.lastname: Soriano
authors.forename: K
authors.initials: K
authors.lastname: Belkebir
authors.forename: A
authors.initials: A
authors.lastname: Sentenac
authors.forename: H
authors.initials: H
authors.lastname: Giovannini