title: Transfer molding of nanoscale oxides using water-soluble templates.
abstract: We report a facile method for creating nanoscopic oxide structures over large areas that is capable of producing high aspect ratio nanoscale structures with feature sizes below 50 nm. A variety of nanostructured oxides including TiO(2), SnO(2) and organosilicates are formed using sol-gel and nanoparticle precursors by way of molding with water-soluble polymeric templates generated from silicon masters. Sequential stacking techniques are developed that generate unique 3-dimensional nanostructures with combinatorially mixed geometries, scales, and materials. Applicable to a variety of substrates, this scalable method allows access to a broad range of new thin film morphologies for applications in devices, catalysts, and functional surface coatings.
authors.affiliation: IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120, United States.
authors.forename: John D
authors.initials: JD
authors.lastname: Bass
authors.forename: Charles D
authors.initials: CD
authors.lastname: Schaper
authors.forename: Charles T
authors.initials: CT
authors.lastname: Rettner
authors.forename: Noel
authors.initials: N
authors.lastname: Arellano
authors.forename: Fahhad H
authors.initials: FH
authors.lastname: Alharbi
authors.forename: Robert D
authors.initials: RD
authors.lastname: Miller
authors.forename: Ho-Cheol
authors.initials: HC
authors.lastname: Kim
mesh_terms: D003460:Crystallization / Q000379:methods*; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D010087:Oxides / Q000737:chemistry*; D010316:Particle Size; D012995:Solubility; D013499:Surface Properties; D014867:Water / Q000737:chemistry*
chemical_list: D046911:Macromolecular Substances; D010087:Oxides; D014867:Water