title: Intrinsic top-down unmanufacturability.
abstract: Although small structures can be fabricated by deposition, lithography and etching, in some cases their intrinsic variability precludes their use as elements in useful arrays. Manufacture is a proper subset of fabrication. We show that structures with 3 nm design rules can be fabricated but not manufactured in a top-down approach-they do not have the reproducibility to give a satisfactory yield to a pre-ordained specification. It is also shown that the transition from manufacturability to intrinsic unmanufacturability takes place at nearer 7 nm design rules.
authors.affiliation: Centre for Advanced Photonics and Electronics, Department of Engineering, University of Cambridge, Cambridge, UK.
authors.forename: M J
authors.initials: MJ
authors.lastname: Kelly