title: Advanced multi-component nanostructures designed by dynamic shadowing growth.
abstract: Dynamic shadowing growth is a simple and powerful nanofabrication technique that combines oblique angle deposition with substrate manipulation in a thin film deposition system, which mainly utilizes self-shadowing effect to form well-aligned nanorod arrays. Many unique nanostructures have been fabricated or designed by properly programming the substrate motions, deposition sources, deposition rates, and shadowing effects in multi-step shadowing growth processes. The formed nanostructures have found many promising applications such as chemical and biological sensors, energy storages, nanomotors, etc., due to their unique characteristics of well-controlled morphologies, structures, and compositions. This review is focused on the design and fabrication of both compositionally and morphologically complex nanostructure arrays by multilayer and co-deposition shadowing growth techniques, and the emphasis will be put on the design and fabrication of multi-component nanostructures with different morphologies.
authors.affiliation: Department of Physics and Astronomy, Nanoscale Science and Engineering Center University of Georgia, Athens, Georgia 30602, USA. yphe@physast.uga.edu
authors.forename: Yuping
authors.initials: Y
authors.lastname: He
authors.forename: Yiping
authors.initials: Y
authors.lastname: Zhao
mesh_terms: D004738:Engineering; D004867:Equipment Design; D049329:Nanostructures; D036103:Nanotechnology; D043942:Nanotubes