title: Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film.
abstract: The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design.
authors.forename: Evgeny
authors.initials: E
authors.lastname: Milyutin
authors.forename: Paul
authors.initials: P
authors.lastname: Muralt
mesh_terms: D000162:Acoustics / Q000295:instrumentation*; D003198:Computer Simulation; D004563:Electrochemistry / Q000295:instrumentation*; D004566:Electrodes; D004867:Equipment Design / Q000295:instrumentation; D020342:Finite Element Analysis; D008567:Membranes, Artificial; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D014159:Transducers; D014732:Vibration
chemical_list: D008567:Membranes, Artificial