title: A dynamic linearization concept for piezoelectric actuators.
abstract: We present a linearization circuit based on a capacitive Wheatstone bridge that is able to set a desired polarization in a piezoactuator. The system is meant to be used for dynamic actuation in a broad frequency range. A general nonlinear model for piezoactuators is presented in which two nonlinear sub-systems are cascaded: the electric-field-to-polarization (E-P) and the polarization-to-strain (P-x) blocks. The inversion of the latter sub-system in combination with the linearization bridge results in a reduction of up to 19 dB of the harmonic distortion of the actuator's mechanical displacement.
authors.affiliation: Laboratory for Design of Microsystems at IMTEK, Department of Microsystems Engineering, University of Freiburg, Freiburg im Breisgau, Germany. Giovanni.Biancuzzi@imtek.de
authors.forename: Giovanni
authors.initials: G
authors.lastname: Biancuzzi
authors.forename: Daniel
authors.initials: D
authors.lastname: Haller
authors.forename: Thomas
authors.initials: T
authors.lastname: Lemke
authors.forename: Martin
authors.initials: M
authors.lastname: Wischke
authors.forename: Frank
authors.initials: F
authors.lastname: Goldschmidtboeing
authors.forename: Peter
authors.initials: P
authors.lastname: Woias
mesh_terms: D004867:Equipment Design / Q000379:methods; D019544:Equipment Failure Analysis; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D017711:Nonlinear Dynamics; D014159:Transducers