title: A micro-optical modulation spectroscopy technique for local strain measurement.
abstract: We provide a high throughput method of performing optical modulation spectroscopy, such as photoreflectance or other spectroscopy techniques which include photoluminescence on a micrometric resolution scale of the order of 10 μm. The spectroscopic technique is designed for strain induced by process in silicon wafers. The optical system is optimized using a polarizing beamsplitter in conjunction with a single Fresnel rhomb for the provision of an optimum separation of the reflected probe beam with minimal optical losses. In addition, a rapid detection system is used that allows the spectrum to be acquired within few seconds.
authors.affiliation: Optical Metrology Innovations Ltd., 2200 Cork Airport Business Park, Cork Airport, Co. Cork, Ireland. houssam.chouaib@kla-tencor.com
authors.forename: H
authors.initials: H
authors.lastname: Chouaib
authors.forename: M E
authors.initials: ME
authors.lastname: Murtagh
authors.forename: P V
authors.initials: PV
authors.lastname: Kelly