title: Flow control methods and devices in micrometer scale channels.
abstract: Recent advances in the fabrication of microflow devices using micro-electromechanical systems (MEMS) technology are described. Passive and active liquid flow control and particle-handling methods in micrometer-scale channels are reviewed. These methods are useful in micro total analysis systems (μTAS) and laboratory-on-a-chip systems. Multiple flow control systems (i.e., arrayed microvalves) for advanced high-throughput microflow systems are introduced. Examples of microflow devices and systems for chemical and biochemical applications are also described.
authors.affiliation: Department of Electronic and Photonic Systems, Waseda University, Ohkubo, Shinjuku-ku, Tokyo, Japan. shojis@waseda.jp
authors.forename: Shuichi
authors.initials: S
authors.lastname: Shoji
authors.forename: Kentaro
authors.initials: K
authors.lastname: Kawai
mesh_terms: D008832:Microchemistry; D044085:Microfluidics / Q000295:instrumentation* / Q000379:methods*