title: Polymeric optofluidic Fabry-Perot sensor by direct laser machining and hot embossing.
abstract: We present a polymeric-based Fabry-Perot optofluidic sensor fabricated by combining direct laser machining and hot embossing. This technique provides a more elegant solution to conventional hot embossing by increasing the production rate, improving the reproducibility, and further reducing the cost, providing a large working area and flexibility in design modification and customization. As a proof of concept, a Fabry-Perot (F-P) optofluidic sensor was fabricated in polymethyl methacrylate (PMMA) from a micromachined stamp. The experimental results of the sensor agree well with analytical calculations and show a sensitivity of 2.13×10⁻³ RIU/nm for fluid refractive index change.
authors.affiliation: Centre for Micro-Photonics, Faculty of Engineering and Industrial Sciences, Swinburne University of Technology, Hawthorn, PO Box 218, Victoria 3122, Australia.
authors.forename: Jing
authors.initials: J
authors.lastname: Wu
authors.forename: Daniel
authors.initials: D
authors.lastname: Day
authors.forename: Min
authors.initials: M
authors.lastname: Gu
mesh_terms: D004867:Equipment Design; D006046:Gold / Q000737:chemistry; D006358:Hot Temperature; D007834:Lasers; D008422:Materials Testing; D044085:Microfluidics; D055095:Optics and Photonics; D011108:Polymers / Q000737:chemistry; D019904:Polymethyl Methacrylate / Q000737:chemistry; D012031:Refractometry; D015203:Reproducibility of Results; D013053:Spectrophotometry / Q000379:methods
chemical_list: D011108:Polymers; D006046:Gold; D019904:Polymethyl Methacrylate