title: A "dry and wet hybrid" lithography technique for multilevel replication templates: Applications to microfluidic neuron culture and two-phase global mixing.
abstract: A broad range of microfluidic applications, ranging from cell culture to protein crystallization, requires multilevel devices with different heights and feature sizes (from micrometers to millimeters). While state-of-the-art direct-writing techniques have been developed for creating complex three-dimensional shapes, replication molding from a multilevel template is still the preferred method for fast prototyping of microfluidic devices in the laboratory. Here, we report on a "dry and wet hybrid" technique to fabricate multilevel replication molds by combining SU-8 lithography with a dry film resist (Ordyl). We show that the two lithography protocols are chemically compatible with each other. Finally, we demonstrate the hybrid technique in two different microfluidic applications: (1) a neuron culture device with compartmentalization of different elements of a neuron and (2) a two-phase (gas-liquid) global micromixer for fast mixing of a small amount of a viscous liquid into a larger volume of a less viscous liquid.
authors.forename: Debjani
authors.initials: D
authors.lastname: Paul
authors.forename: Laure
authors.initials: L
authors.lastname: Saias
authors.forename: Jean-Cedric
authors.initials: JC
authors.lastname: Pedinotti
authors.forename: Max
authors.initials: M
authors.lastname: Chabert
authors.forename: Sebastien
authors.initials: S
authors.lastname: Magnifico
authors.forename: Antoine
authors.initials: A
authors.lastname: Pallandre
authors.forename: Bertrand
authors.initials: B
authors.lastname: De Lambert
authors.forename: Claude
authors.initials: C
authors.lastname: Houdayer
authors.forename: Bernard
authors.initials: B
authors.lastname: Brugg
authors.forename: Jean-Michel
authors.initials: JM
authors.lastname: Peyrin
authors.forename: Jean-Louis
authors.initials: JL
authors.lastname: Viovy