title: Rapid turnaround scanning probe nanolithography.
abstract: Scanning probe nanolithography (SPL) has demonstrated its potential in a variety of applications like 3D nanopatterning, 'direct development' lithography, dip-pen deposition or patterning of self-assembled monolayers. One of the main issues holding back SPL has been the limited throughput for patterning and imaging. Here we present a complete lithography and metrology system based on thermomechanical writing into organic resists. Metrology is carried out using a thermoelectric topography sensing method. More specifically, we demonstrate a system with a patterning pixel clock of 500 kHz, 20 mm s(-1) linear scan speed, a positioning accuracy of 10 nm, a read-back frequency bandwidth of 100, 000 line-pairs s(-1) and a turnaround time from patterning to qualifying metrology of 1 min. Thus, we demonstrate a nanolithography system capable of implementing rapid turnaround.
authors: IBM Research-Zurich, Säumerstrasse 4, CH-8803 Rüschlikon, Switzerland. php@zurich.ibm.com
authors: Philip C
authors: PC
authors: Paul
authors: Armin W
authors: AW
authors: Knoll
authors: Felix
authors: F
authors: Holzner
authors: Michel
authors: M
authors: Despont
authors: Urs
authors: U
authors: Duerig