title: Efficient broadband silicon-on-insulator grating coupler with low backreflection.
abstract: We design and fabricate an efficient broadband grating coupler on a 400 nm thick silicon-on-insulator wafer. The measured coupling loss is 3 dB when coupling to a single-mode fiber at 1310 nm wavelength with TE polarization. The spectral FWHM and backreflection are determined to be 58 nm and -27 dB, respectively.
authors.affiliation: Intel Corporation, 2200 Mission College Blvd, Santa Clara, California 95054, USA. yun-chung.n.na@intel.com
authors.forename: Neil
authors.initials: N
authors.lastname: Na
authors.forename: Harel
authors.initials: H
authors.lastname: Frish
authors.forename: I-Wei
authors.initials: IW
authors.lastname: Hsieh
authors.forename: Oshrit
authors.initials: O
authors.lastname: Harel
authors.forename: Roshan
authors.initials: R
authors.lastname: George
authors.forename: Assia
authors.initials: A
authors.lastname: Barkai
authors.forename: Haisheng
authors.initials: H
authors.lastname: Rong
mesh_terms: D004553:Electric Conductivity; D004867:Equipment Design; D019544:Equipment Failure Analysis; D055096:Optical Devices; D012031:Refractometry / Q000295:instrumentation*; D012825:Silicon / Q000737:chemistry*
chemical_list: D012825:Silicon