title: Low-cost rapid miniature optical pressure sensors for blast wave measurements.
abstract: This paper presents an optical pressure sensor based on a Fabry-Perot (FP) interferometer formed by a 45° angle polished single mode fiber and an external silicon nitride diaphragm. The sensor is comprised of two V-shape grooves with different widths on a silicon chip, a silicon nitride diaphragm released on the surface of the wider V-groove, and a 45° angle polished single mode fiber. The sensor is especially suitable for blast wave measurements: its compact structure ensures a high spatial resolution; its thin diaphragm based design and the optical demodulation scheme allow a fast response to the rapid changing signals experienced during blast events. The sensor shows linearity with the correlation coefficient of 0.9999 as well as a hysteresis of less than 0.3%. The shock tube test demonstrated that the sensor has a rise time of less than 2 µs from 0 kPa to 140 kPa.
authors.affiliation: Department of Electrical and Computer Engineering, University of Massachusetts Lowell, 1 University Avenue, Lowell, Massachusetts 01854, USA.
authors.forename: Nan
authors.initials: N
authors.lastname: Wu
authors.forename: Wenhui
authors.initials: W
authors.lastname: Wang
authors.forename: Ye
authors.initials: Y
authors.lastname: Tian
authors.forename: Xiaotian
authors.initials: X
authors.lastname: Zou
authors.forename: Michael
authors.initials: M
authors.lastname: Maffeo
authors.forename: Christopher
authors.initials: C
authors.lastname: Niezrecki
authors.forename: Julie
authors.initials: J
authors.lastname: Chen
authors.forename: Xingwei
authors.initials: X
authors.lastname: Wang