title: Micromirror arrays to assess luminescent nano-objects.
abstract: We propose an array of submicrometer mirrors to assess luminescent nano-objects. Micromirror arrays (MMAs) are fabricated on Si (001) wafers via selectively doping Ga using the focused ion beam technique to form p-type etch stop regions, subsequent anisotropic chemical etching, and Al deposition. MMAs provide two benefits: reflection of luminescence from nano-objects within MMAs toward the Si (001) surface normal and nano-object labeling. The former increases the probability of optics collecting luminescence and is demonstrated by simulations based on the ray-tracing and finite-difference time-domain methods as well as by experiments. The latter enables different measurements to be repeatedly performed on a single nano-object located at a certain micromirror. For example, a single InGaN∕GaN nanocolumn is assessed by scanning electron microscopy and microphotoluminescence spectroscopy.
authors.affiliation: Department of Electronic Science & Engineering, Kyoto University, Kyoto 615-8510, Japan. kawakami@kuee.kyoto-u.ac.jp
authors.forename: Yoichi
authors.initials: Y
authors.lastname: Kawakami
authors.forename: Akinobu
authors.initials: A
authors.lastname: Kanai
authors.forename: Akio
authors.initials: A
authors.lastname: Kaneta
authors.forename: Mitsuru
authors.initials: M
authors.lastname: Funato
authors.forename: Akihiko
authors.initials: A
authors.lastname: Kikuchi
authors.forename: Katsumi
authors.initials: K
authors.lastname: Kishino