title: Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage.
abstract: A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is ±30 nm∕200 nm and ±0.04 arcsec∕0.1 arcsec at 1000 Hz.
authors.affiliation: Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan 701, Taiwan. a58503147@yahoo.com.tw
authors.forename: Tung Hsien
authors.initials: TH
authors.lastname: Hsieh
authors.forename: Wen Yuh
authors.initials: WY
authors.lastname: Jywe
authors.forename: Shang Liang
authors.initials: SL
authors.lastname: Chen
authors.forename: Chien Hung
authors.initials: CH
authors.lastname: Liu
authors.forename: Hsueh Liang
authors.initials: HL
authors.lastname: Huang