title: Note: Design of transverse electron gun for electron beam based reactive evaporation system.
abstract: In this paper design of a 10 kV, 10 kW transverse electron gun, suitable for reactive evaporation, supported by simulation and modeling, is presented. Simulation of the electron beam trajectory helps in locating the emergence aperture after 90° bend and also in designing the crucible on which the beam is finally incident after 270° bend. The dimension of emergence aperture plays a vital role in designing the differential pumping system between the gun chamber and the substrate chamber. Experimental validation is done for beam trajectory by piercing a stainless steel plate at 90° position which is kept above the crucible.
authors.affiliation: Laser & Plasma Technology Division, Bhabha Atomic Research Centre, Mumbai-400 085, India. nmaiti@barc.gov.in
authors.forename: Namita
authors.initials: N
authors.lastname: Maiti
authors.forename: U D
authors.initials: UD
authors.lastname: Barve
authors.forename: M S
authors.initials: MS
authors.lastname: Bhatia
authors.forename: A K
authors.initials: AK
authors.lastname: Das