title: THz emission characteristics from p/n junctions with metal lines under non-bias conditions for LSI failure analysis.
abstract: We have investigated the characteristics of THz emissions from p/n junctions with metallic lines under non-bias conditions. The waveforms, spectra, and polarizations depend on the length and shape of the lines. This indicates that the transient photocurrents from p/n junctions flow into the metallic lines that emit THz waves and act as an antenna. We have successfully demonstrated the non-contact inspection of open defects of multi-layered interconnects in a large-scale integrated circuit using the laser THz emission microscope (LTEM). The p/n junctions connected to the defective interconnects can be identified by comparing the LTEM images of normal and defective circuits.
authors.affiliation: RIKEN ASI, 519-1399 Aoba, Aramaki, Aoba, Sendai, Miyagi 980-0845, Japan. m-yama@riken.jp
authors.forename: Masatsugu
authors.initials: M
authors.lastname: Yamashita
authors.forename: Chiko
authors.initials: C
authors.lastname: Otani
authors.forename: Toru
authors.initials: T
authors.lastname: Matsumoto
authors.forename: Yoshihiro
authors.initials: Y
authors.lastname: Midoh
authors.forename: Katsuyoshi
authors.initials: K
authors.lastname: Miura
authors.forename: Koji
authors.initials: K
authors.lastname: Nakamae
authors.forename: Kiyoshi
authors.initials: K
authors.lastname: Nikawa
authors.forename: Sunmi
authors.initials: S
authors.lastname: Kim
authors.forename: Hironaru
authors.initials: H
authors.lastname: Murakami
authors.forename: Masayoshi
authors.initials: M
authors.lastname: Tonouchi