title: Laser-textured silicon photodiode with broadband spectral response.
abstract: A femtosecond-laser-textured Si photodetector is reported. Broadband spectral optical response is detected from UV to NIR. A quantum efficiency of greater than 80% from 490  nm to 780  nm has been achieved. The quantum efficiency at 245  nm is 62%, which is comparable to UV-enhanced Si photodiodes. The bandwidth of a 250-μm-diameter device is 60  MHz.
authors.affiliation: Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, Virginia 22904, USA.
authors.forename: Zhi
authors.initials: Z
authors.lastname: Li
authors.forename: Barada K
authors.initials: BK
authors.lastname: Nayak
authors.forename: Vikram V
authors.initials: VV
authors.lastname: Iyengar
authors.forename: Dion
authors.initials: D
authors.lastname: McIntosh
authors.forename: Qiugui
authors.initials: Q
authors.lastname: Zhou
authors.forename: Mool C
authors.initials: MC
authors.lastname: Gupta
authors.forename: Joe C
authors.initials: JC
authors.lastname: Campbell