title: Enhancement of sp(3)-bonding in high-bias-voltage grown diamond-like carbon thin films studied by x-ray absorption and photoemission spectroscopy.
abstract: X-ray absorption near-edge structure (XANES) and valence-band photoemission spectroscopy (VB-PES) were used to elucidate the electronic and mechanical properties of diamond-like carbon (DLC) thin films deposited by the plasma-enhanced chemical vapour deposition method at various bias voltages (V(b)) using a C(2)H(2) vapour precursor in an Ar(+) atmosphere. The increase of V(b) is found to increase and decrease the contents of sp(3)- and sp(2)-bonded carbon atoms, respectively, i.e. the films become more diamond-like. The Young's modulus measurements show increases with the increase of the presence of sp(3)-bonded carbon atoms in the structure of the DLC films.
authors.affiliation: Department of Physics, Tamkang University, Tamsui 251, Taiwan.
authors.forename: S C
authors.initials: SC
authors.lastname: Ray
authors.forename: C W
authors.initials: CW
authors.lastname: Pao
authors.forename: H M
authors.initials: HM
authors.lastname: Tsai
authors.forename: J W
authors.initials: JW
authors.lastname: Chiou
authors.forename: W F
authors.initials: WF
authors.lastname: Pong
authors.forename: M-H
authors.initials: MH
authors.lastname: Tsai
authors.forename: T I T
authors.initials: TI
authors.lastname: Okpalugo
authors.forename: P
authors.initials: P
authors.lastname: Papakonstantinou
authors.forename: T W
authors.initials: TW
authors.lastname: Pi