title: Stress-enhanced pattern formation on surfaces during low energy ion bombardment.
abstract: Ion-induced surface patterns (sputter ripples) are observed to grow more rapidly than predicted by current models, suggesting that additional sources of roughening may be involved. Using a linear stability analysis, we consider the contribution of ion-induced stress in the near surface region to the formation rate of ripples. This leads to a simple model that combines the effects of stress-induced roughening with the curvature-dependent erosion model of Bradley and Harper. The enhanced growth rate observed on Cu surfaces appears to be consistent with the magnitude of stress measured from wafer curvature measurements.
authors.affiliation: Brown University, Division of Engineering, Providence, RI 02192, USA.
authors.forename: N V
authors.initials: NV
authors.lastname: Medhekar
authors.forename: W L
authors.initials: WL
authors.lastname: Chan
authors.forename: V B
authors.initials: VB
authors.lastname: Shenoy
authors.forename: E
authors.initials: E
authors.lastname: Chason