title: Conductive-probe atomic force microscopy characterization of silicon nanowire.
abstract: The electrical conduction properties of lateral and vertical silicon nanowires (SiNWs) were investigated using a conductive-probe atomic force microscopy (AFM). Horizontal SiNWs, which were synthesized by the in-plane solid-liquid-solid technique, are randomly deployed into an undoped hydrogenated amorphous silicon layer. Local current mapping shows that the wires have internal microstructures. The local current-voltage measurements on these horizontal wires reveal a power law behavior indicating several transport regimes based on space-charge limited conduction which can be assisted by traps in the high-bias regime (> 1 V). Vertical phosphorus-doped SiNWs were grown by chemical vapor deposition using a gold catalyst-driving vapor-liquid-solid process on higly n-type silicon substrates. The effect of phosphorus doping on the local contact resistance between the AFM tip and the SiNW was put in evidence, and the SiNWs resistivity was estimated.
authors.affiliation: Laboratoire de Génie Electrique de Paris, CNRS UMR 8507, SUPELEC, Univ P-Sud, UPMC Univ Paris 6, 11 rue Joliot-Curie, Plateau de Moulon, 91192 Gif-sur-Yvette Cedex, France. jose.alvarez@supelec.fr.
authors.forename: José
authors.initials: J
authors.lastname: Alvarez
authors.forename: Irène
authors.initials: I
authors.lastname: Ngo
authors.forename: Marie-Estelle
authors.initials: ME
authors.lastname: Gueunier-Farret
authors.forename: Jean-Paul
authors.initials: JP
authors.lastname: Kleider
authors.forename: Linwei
authors.initials: L
authors.lastname: Yu
authors.forename: Pere Rocai
authors.initials: PR
authors.lastname: Cabarrocas
authors.forename: Simon
authors.initials: S
authors.lastname: Perraud
authors.forename: Emmanuelle
authors.initials: E
authors.lastname: Rouvière
authors.forename: Caroline
authors.initials: C
authors.lastname: Celle
authors.forename: Céline
authors.initials: C
authors.lastname: Mouchet
authors.forename: Jean-Pierre
authors.initials: JP
authors.lastname: Simonato