title: Facile fabrication of a rigid and chemically resistant micromixer system from photocurable inorganic polymer by static liquid photolithography (SLP).
abstract: Highly effective mixing in microchannels is important for most chemical reactions conducted in microfluidic chips. To obtain a rigid and chemically resistant micromixer system at low cost, we fabricated a Y-shaped microchannel with built-in mixer structures by static liquid photolithography (SLP) from methacrylated polyvinylsilazane (MPVSZ) as an inorganic polymer photoresist which was then converted to a silicate phase by hydrolysis in vaporized ammonia atmosphere at 80 °C. The microchannel incorporating herringbone mixer structures was bonded with a matching polydimethylsiloxane (PDMS) open channel which was pre-coated by perhydropolysilazane (PHPS)-based mixture, and finally treated by additional hydrolysis at room temperature to convert the PHPS layer to a silica phase. Finally, the chemical resistance of the microfluidic system with embedded micromixer was confirmed with various solvents, and the excellent mixing performance in a short mixing length of 2.3 cm was demonstrated by injecting two different colored fluids into the microchannel.
authors.affiliation: Department of Chemistry and Biology, College of Science, National University of Defence Technology, Changsha, 410073, People's Republic of China.
authors.forename: Qingling
authors.initials: Q
authors.lastname: Fang
authors.forename: Dong-Pyo
authors.initials: DP
authors.lastname: Kim
authors.forename: Xiaodong
authors.initials: X
authors.lastname: Li
authors.forename: Tae-Ho
authors.initials: TH
authors.lastname: Yoon
authors.forename: Yihe
authors.initials: Y
authors.lastname: Li
mesh_terms: D004129:Dimethylpolysiloxanes / Q000138:chemical synthesis / Q000737:chemistry*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D011108:Polymers / Q000138:chemical synthesis / Q000737:chemistry*; D012822:Silicon Dioxide / Q000737:chemistry
chemical_list: D004129:Dimethylpolysiloxanes; D011108:Polymers; D012822:Silicon Dioxide