title: Fabrication of phase-change Ge2Sb2Te5 nano-rings.
abstract: Phase-change material Ge2Sb2Te5 rings with nanometer-scale thickness have been fabricated using the photo-thermal effect of a focused laser beam followed by differential chemical etching. Laser irradiation conditions and etching process parameters are varied to control the geometric characteristics of the rings. We demonstrate the possibility of arranging the rings in specific geometric patterns, and also their release from the original substrate.
authors.affiliation: Department of Physics, National Taiwan University, Taipei 106, Taiwan.
authors.forename: Cheng Hung
authors.initials: CH
authors.lastname: Chu
authors.forename: Ming Lun
authors.initials: ML
authors.lastname: Tseng
authors.forename: Chiun Da
authors.initials: CD
authors.lastname: Shiue
authors.forename: Shuan Wei
authors.initials: SW
authors.lastname: Chen
authors.forename: Hai-Pang
authors.initials: HP
authors.lastname: Chiang
authors.forename: Masud
authors.initials: M
authors.lastname: Mansuripur
authors.forename: Din Ping
authors.initials: DP
authors.lastname: Tsai
mesh_terms: D000965:Antimony / Q000737:chemistry*; D003460:Crystallization / Q000379:methods; D005857:Germanium / Q000737:chemistry*; D016247:Information Storage and Retrieval / Q000379:methods; D007834:Lasers; D049329:Nanostructures; D036103:Nanotechnology / Q000379:methods*; D055095:Optics and Photonics / Q000379:methods*; D012822:Silicon Dioxide / Q000737:chemistry; D013440:Sulfides / Q000737:chemistry; D013691:Tellurium / Q000737:chemistry*; D017967:Zinc Compounds / Q000737:chemistry
chemical_list: D013440:Sulfides; D017967:Zinc Compounds; D005857:Germanium; D012822:Silicon Dioxide; D000965:Antimony; C031238:zinc sulfide; D013691:Tellurium