title: Selective tuning of high-Q silicon photonic crystal nanocavities via laser-assisted local oxidation.
abstract: We examine the cavity resonance tuning of high-Q silicon photonic crystal heterostructures by localized laser-assisted thermal oxidation using a 532 nm continuous wave laser focused to a 2.5 μm radius spot-size. The total shift is consistent with the parabolic rate law. A tuning range of up to 8.7 nm is achieved with ∼ 30 mW laser powers. Over this tuning range, the cavity Qs decreases from 3.2×10(5) to 1.2×10(5). Numerical simulations model the temperature distributions in the silicon photonic crystal membrane and the cavity resonance shift from oxidation.
authors.affiliation: Optical Nanostructures Laboratory, Columbia University, New York 10027, USA. cww2104@columbia.edu
authors.forename: Charlton J
authors.initials: CJ
authors.lastname: Chen
authors.forename: Jiangjun
authors.initials: J
authors.lastname: Zheng
authors.forename: Tingyi
authors.initials: T
authors.lastname: Gu
authors.forename: James F
authors.initials: JF
authors.lastname: McMillan
authors.forename: Mingbin
authors.initials: M
authors.lastname: Yu
authors.forename: Guo-Qiang
authors.initials: GQ
authors.lastname: Lo
authors.forename: Dim-Lee
authors.initials: DL
authors.lastname: Kwong
authors.forename: Chee Wei
authors.initials: CW
authors.lastname: Wong
mesh_terms: D003460:Crystallization / Q000295:instrumentation / Q000379:methods*; D020342:Finite Element Analysis; D007834:Lasers; D008855:Microscopy, Electron, Scanning; D008962:Models, Theoretical; D049329:Nanostructures; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods*; D055095:Optics and Photonics / Q000295:instrumentation / Q000379:methods*; D010084:Oxidation-Reduction; D012825:Silicon / Q000737:chemistry*; D012822:Silicon Dioxide / Q000737:chemistry*; D013696:Temperature; D014867:Water / Q000737:chemistry
chemical_list: D014867:Water; D012822:Silicon Dioxide; D012825:Silicon