title: Method for designing phase-calculation algorithms for two-dimensional grating phase-shifting interferometry.
abstract: We propose a design method of phase-analysis algorithms based on two-dimensional grating phase shifting for Talbot interferometry, Talbot-Lau imaging, or the Ronchi test. These algorithms are designed to separate the two orthogonal shearing wavefronts and eliminate error effects of unwanted diffraction orders, simultaneously. Taking the effect of multidiffraction into account, moving the two-dimensional grating along a certain pass leads to a series of phase-shifted interfrograms, from which two orthogonal shearing wavefronts are derived, for the tested wavefront to be retrieved. The designing process is demonstrated, and the residual errors are analyzed via simulation works and experimental comparison.
authors.affiliation: Core Technology Center, Nikon Corporation, 6-3, Nishiohi 1-chome, Shinagawa-ku, Tokyo 140-8601, Japan. zhu.yucong@nikon.co.jp
authors.forename: Yucong
authors.initials: Y
authors.lastname: Zhu
authors.forename: Satoru
authors.initials: S
authors.lastname: Odate
authors.forename: Ayako
authors.initials: A
authors.lastname: Sugaya
authors.forename: Katsura
authors.initials: K
authors.lastname: Otaki
authors.forename: Katsumi
authors.initials: K
authors.lastname: Sugisaki
authors.forename: Chiaki
authors.initials: C
authors.lastname: Koike
authors.forename: Tetsuya
authors.initials: T
authors.lastname: Koike
authors.forename: Kiyoshi
authors.initials: K
authors.lastname: Uchikawa