title: Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution.
abstract: Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 μm CMOS technology is reported. The resonator frequency is ∼13.2 MHz and exhibits a sensitivity magnitude of ∼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.
authors: Department of Physics, Universitat de les Illes Balears, Palma (Illes Balears), 07122, Spain. jaume.verd@uib.es
authors: J
authors: J
authors: Verd
authors: M
authors: M
authors: Sansa
authors: A
authors: A
authors: Uranga
authors: F
authors: F
authors: Perez-Murano
authors: J
authors: J
authors: Segura
authors: N
authors: N
authors: Barniol
mesh_terms: D006813:Humidity; D008670:Metals / Q000737:chemistry*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation / Q000379:methods*; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods*; D014835:Volatilization; D014867:Water / Q000737:chemistry*
chemical_list: D008670:Metals; D014867:Water