title: MEMS based hair flow-sensors as model systems for acoustic perception studies.
abstract: Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors, allowing for capacitive read-out. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance).
authors: Transducers Science and Technology group, MESA+ Research Institute, University of Twente, PO Box 217, 7500AE, Enschede, The Netherlands.
authors: Gijs J M
authors: GJ
authors: Krijnen
authors: Marcel
authors: M
authors: Dijkstra
authors: John J
authors: JJ
authors: van Baar
authors: Siripurapu S
authors: SS
authors: Shankar
authors: Winfred J
authors: WJ
authors: Kuipers
authors: Rik J H
authors: RJ
authors: de Boer
authors: Dominique
authors: D
authors: Altpeter
authors: Theo S J
authors: TS
authors: Lammerink
authors: Remco
authors: R
authors: Wiegerink