title: Application of image spectrometer to in situ infrared broadband optical monitoring for thin film deposition.
abstract: A path-folded infrared image spectrometer with five sub-gratings and five linear-array detectors was applied to a broadband optical monitoring (BOM) system for thin film deposition. Through in situ BOM, we can simultaneously acquire the thickness and refractive index of each layer in real time by fitting the measured spectra, and modify the deposition parameters during deposition process according to the fitting results. An effective data processing method was proposed and applied in the BOM process, and it shortened the data processing time and improved the monitoring efficiency greatly. For demonstration, a narrow band-pass filter (NBF) at 1540 nm with ~10 nm full width at half-maximum (FWHM) had been manufactured using the developed BOM system, and the results showed that this BOM method was satisfying for monitoring deposition of thin film devices.
authors: Key Laboratory of Micro and Nano Photonic Structures, Ministry of Education, Department of Optical Science and Engineering, Fudan University, Shanghai, China.
authors: Qing-Yuan
authors: QY
authors: Cai
authors: Yu-Xiang
authors: YX
authors: Zheng
authors: Dong-Xu
authors: DX
authors: Zhang
authors: Wei-Jie
authors: WJ
authors: Lu
authors: Rong-Jun
authors: RJ
authors: Zhang
authors: Wei
authors: W
authors: Lin
authors: Hai-Bin
authors: HB
authors: Zhao
authors: Liang-Yao
authors: LY
authors: Chen
mesh_terms: D007259:Infrared Rays; D008420:Manufactured Materials / Q000528:radiation effects*; D008567:Membranes, Artificial; D012031:Refractometry / Q000295:instrumentation*; D013055:Spectrophotometry, Infrared / Q000706:statistics & numerical data*
chemical_list: D008567:Membranes, Artificial