title: Si micro-ring MUX/DeMUX WDM filters.
abstract: We demonstrate 3rd order micro-ring filters, 100 GHz-spaced 16 channels and 50 GHz-spaced 32 channels. Fabrication-induced resonant wavelength errors, σ = 0.237 nm, and temperature-dependent wavelength shift, 0.043 nm/°C tolerable to ΔT>10 °C, has been measured on filters based on the fundamental TM mode. The problem of CMOS-compatible photolithography is solved, while maintaining a small radius, R = 9 μm. As some dummy channels are arranged, it is shown that an on-chip optical network for many cores CPU can be constructed by 16 channel ring filters with the currently available technology.
authors: Electronics and Telecommunications Research Institute, Yusong-gu, Daejeon, Korea. sahnggi@etri.re.kr
authors: Sahnggi
authors: S
authors: Park
authors: Kap-Joong
authors: KJ
authors: Kim
authors: In-Gyoo
authors: IG
authors: Kim
authors: Gyungock
authors: G
authors: Kim
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D005374:Filtration / Q000295:instrumentation*; D008027:Light; D008904:Miniaturization; D055096:Optical Devices; D012031:Refractometry / Q000295:instrumentation*; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation*; D013685:Telecommunications / Q000295:instrumentation*