title: Self-heating in piezoresistive cantilevers.
abstract: We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature.
authors: Joseph C
authors: JC
authors: Doll
authors: Elise A
authors: EA
authors: Corbin
authors: William P
authors: WP
authors: King
authors: Beth L
authors: BL
authors: Pruitt