title: Characterization and air pressure sensing of doubly clamped multi-walled carbon nanotubes.
abstract: We report the fabrication and characterization of doubly clamped multi-walled carbon nanotubes (MWNTs). The devices were assembled by applying an electric field while the MWNTs were firmly clamped and suspended at both ends of a thick metal trench electrode in solution. The contacts were further processed using a focused ion beam. Final dimensions ranged from 100 to 150 nm in diameter and 1.5-4 µm in length. The fabricated devices were characterized by I-V curves, impedance measurements, and their mechanical deformation under a high pressure airflow. In the latter case, the resistance of a MWNT device varied linearly with the magnitude of the air pressure. These characteristics strongly suggest potential applications in fields such as nanoelectronics and sensors.
authors: Nano-Mechanical Systems Research Center, Korea Institute of Machinery and Materials, Daejeon 305-343, Korea.
authors: Jin-Won
authors: JW
authors: Song
authors: Jong-Hong
authors: JH
authors: Lee
authors: Hee Won
authors: HW
authors: Seo
authors: Chang-Soo
authors: CS
authors: Han