title: Ultra-high quality factor planar Si3N4 ring resonators on Si substrates.
abstract: We demonstrate planar Si3N4 ring resonators with ultra-high quality factors (Q) of 19 million, 28 million, and 7 million at 1060 nm, 1310 nm, and 1550 nm, respectively. By integrating the ultra-low-loss Si3N4 ring resonators with laterally offset planar waveguide directional couplers, optical add-drop and notch filters are demonstrated to have ultra-narrow bandwidths of 16 MHz, 38 MHz, and 300 MHz at 1060 nm, 1310 nm, and 1550 nm, respectively. These are the highest Qs reported for ring resonators with planar directional couplers, and ultra-narrowband microwave photonic filters can be realized based on these high-Q ring resonators.
authors: Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106, USA. jtien@ece.ucsb.edu
authors: Ming-Chun
authors: MC
authors: Tien
authors: Jared F
authors: JF
authors: Bauters
authors: Martijn J R
authors: MJ
authors: Heck
authors: Daryl T
authors: DT
authors: Spencer
authors: Daniel J
authors: DJ
authors: Blumenthal
authors: John E
authors: JE
authors: Bowers
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D055096:Optical Devices; D017655:Silicon Compounds / Q000737:chemistry*; D020349:Surface Plasmon Resonance / Q000295:instrumentation*; D013685:Telecommunications / Q000295:instrumentation*; D014159:Transducers
chemical_list: D017655:Silicon Compounds; C032734:silicon nitride