title: Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography.
abstract: This paper reports the feasibility of optical coherence tomography (OCT) technology for inspection of bonding quality of microfluidic devices in manufacturing environments. A compact optical-fiber-based OCT is developed and its measurement performance is characterized. A series of microfluidic devices respectively bonded by adhesive tape, thermal method, and oxygen plasma, are inspected. The defects of geometry deformation and sealing completeness are emphasized during measurements. Based on the inspection results, some discoveries related to the production of microfluidic devices are discussed.
authors: Singapore-MIT Alliance, N3.2-01-36, 65 Nanyang Drive, Singapore. lishiguang@tsinghua.org.cn
authors: Shiguang
authors: S
authors: Li
authors: Zhiguang
authors: Z
authors: Xu
authors: Soon Fatt
authors: SF
authors: Yoon
authors: Zhong Ping
authors: ZP
authors: Fang
mesh_terms: D005240:Feasibility Studies; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000592:standards*; D012680:Sensitivity and Specificity; D041623:Tomography, Optical Coherence