title: Electrolysis-based diaphragm actuators.
abstract: This work presents a new electrolysis-based microelectromechanical systems (MEMS) diaphragm actuator. Electrolysis is a technique for converting electrical energy to pneumatic energy. Theoretically electrolysis can achieve a strain of 136 000% and is capable of generating a pressure above 200 MPa. Electrolysis actuators require modest electrical power and produce minimal heat. Due to the large volume expansion obtained via electrolysis, small actuators can create a large force. Up to 100 µm of movement was achieved by a 3 mm diaphragm. The actuator operates at room temperature and has a latching and reversing capability.
authors: Caltech Micromachining Lab, California Institute of Technology, Pasadena, CA 91125, USA.
authors: C
authors: C
authors: Pang
authors: Y-C
authors: YC
authors: Tai
authors: J W
authors: JW
authors: Burdick
authors: R A
authors: RA
authors: Andersen