title: Comparison of algorithms used for optical characterization of multilayer optical coatings.
abstract: Two algorithms used for the on-line and off-line characterization of multilayer optical coatings are experimentally compared using test samples produced by two different deposition processes and different monitoring approaches. One of these algorithms, called the triangular algorithm, demonstrates its superiority in all considered situations. We performed experiments with multilayer samples formed by high-density thin films, which allowed us to neglect possible errors in the film refractive indices and concentrate only on errors in the thicknesses of the layers of the produced coatings.
authors: Research Computing Center, Moscow State University, Leninskie Gory, 119992, Moscow, Russia.
authors: Tatiana V
authors: TV
authors: Amotchkina
authors: Michael K
authors: MK
authors: Trubetskov
authors: Vladimir
authors: V
authors: Pervak
authors: Sebastian
authors: S
authors: Schlichting
authors: Henrik
authors: H
authors: Ehlers
authors: Detlev
authors: D
authors: Ristau
authors: Alexander V
authors: AV
authors: Tikhonravov