title: A nanoscanning platform for bio-engineering: an in-plane probe with switchable stiffness.
abstract: Scanning probe microscopy (SPM) has been one of the most important tools to image and, hopefully, to manipulate bio-structures at micro/nanoscales. However, the current out-of-plane cantilever design makes it very difficult to extend the spectrum of the current SPM technology to meet many new functionalities arising from bio-engineering applications. An in-plane scanning probe concept is developed to accommodate the new functional requirements. It is designed to have a single-strand multi-walled carbon nanotube (CNT) tip assembled at the end of the probe, a built-in actuator and a tip deflection sensor, all in the same plane. The coplanar design is compatible with most of the standard MEMS processes and would facilitate the assembly of a carbon nanotube tip to the micromachined probe. The in-plane design features a switchable stiffness which adapts the scanning probe's stiffness to the changing surface hardness of the sample. This paper describes how the variable stiffness is accomplished by engaging or disengaging electrostatically actuated clutches, in addition to the discussions on many possible benefits of the in-plane scanning platform.
authors: Micro and Nano Systems Laboratory, Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
authors: Clemens
authors: C
authors: Mueller-Falcke
authors: Sunil D
authors: SD
authors: Gouda
authors: Soohyung
authors: S
authors: Kim
authors: Sang-Gook
authors: SG
authors: Kim