title: Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates.
abstract: A complementary metal-oxide-semico-nductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52 Ti0.48)O3 and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ≥30 nm, spheres with diameter ≥10 nm, and densities up to 213 Gb in(-2) are produced.
authors.affiliation: School of Physics, Georgia Institute of Technology, Atlanta, GA 30332, USA. suenne.kim@physics.gatech.edu.
authors.forename: Suenne
authors.initials: S
authors.lastname: Kim
authors.forename: Yaser
authors.initials: Y
authors.lastname: Bastani
authors.forename: Haidong
authors.initials: H
authors.lastname: Lu
authors.forename: William P
authors.initials: WP
authors.lastname: King
authors.forename: Seth
authors.initials: S
authors.lastname: Marder
authors.forename: Kenneth H
authors.initials: KH
authors.lastname: Sandhage
authors.forename: Alexei
authors.initials: A
authors.lastname: Gruverman
authors.forename: Elisa
authors.initials: E
authors.lastname: Riedo
authors.forename: Nazanin
authors.initials: N
authors.lastname: Bassiri-Gharb