title: A simple method for fabricating a Mach-Zehnder type waveguide using sol-gel derived photopatternable hybrid materials for optical biosensors.
abstract: In this work, we report on a simple method to fabricate a Mach-Zehnder type waveguide pattern using photopatternable sol-gel organic-inorganic hybrid materials. The refractive indices and propagation losses of the gel films were measured using the prism coupling method. The refractive indices of the resulting films were significantly influenced by the 3-trimethoxysilylpropylmethacrylate (TMSPM) concentration, and the average propagation loss was 0.32-0.52 dB/cm at the wavelength of 632.8 nm. The waveguides were fabricated using spin-coating and a photolithography technique. The Y-branch and straight pattern of the Mach-Zehnder waveguide were well-defined and had high transparency (> 97%) in the visible region. The average thickness of the gel films was 10 microm, and the average width of the Mach-Zehnder pattern was 10 microm. The structural and optical properties of the fabricated patterns were analyzed using scanning electron microscopy (SEM), atomic force microscopy (AFM), near-infrared (IR) spectroscopy, and ultraviolet (UV)-visible spectroscopy.
authors.affiliation: Department of Chemistry and Research Institute for Natural Sciences, Hanyang University, 17 Haengdang-Dong, Seongdong-Gu, Seoul 133-791, Korea.
authors.forename: Bich Thi
authors.initials: BT
authors.lastname: Luong
authors.forename: Jin-Woo
authors.initials: JW
authors.lastname: Oh
authors.forename: Jongwan
authors.initials: J
authors.lastname: Choi
authors.forename: Nakjoong
authors.initials: N
authors.lastname: Kim
mesh_terms: D015374:Biosensing Techniques; D018625:Microscopy, Atomic Force; D055095:Optics and Photonics; D013056:Spectrophotometry, Ultraviolet; D017550:Spectroscopy, Fourier Transform Infrared