title: Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film.
abstract: UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.
authors.affiliation: Department of Materials Science and Engineering, Korea University, Anam-dong 5-ga, Seongbuk-gu, Seoul 136-713, South Korea. heonlee@korea.ac.kr.
authors.forename: Ju-Hyeon
authors.initials: JH
authors.lastname: Shin
authors.forename: Seong-Hwan
authors.initials: SH
authors.lastname: Lee
authors.forename: Kyeong-Jae
authors.initials: KJ
authors.lastname: Byeon
authors.forename: Kang-Soo
authors.initials: KS
authors.lastname: Han
authors.forename: Heon
authors.initials: H
authors.lastname: Lee
authors.forename: Kentaro
authors.initials: K
authors.lastname: Tsunozaki