title: Novel microcantilever design for versatile mass sensor application.
abstract: This study presents a new microcantilever design for versatile mass sensor application. The novel comb-type cantilever provides a sensitive microcantilever structure for normal sensor application, and its sensing responses are compared with those of a commercial cantilever. While the comb-type cantilever has a similar total surface area to the commercial cantilever, there is a distinct difference in the design of the regional surface area. The results for a static charge interaction, used to compare the sensitivity of normal sensor applications, show a significant resonant frequency change for the comb-type cantilever when compared with that for the commercial cantilever, indicating the importance of the large surface area in the highly sensitive cantilever region. Thus, a schematic structure of a microcantilever for fabricating a highly sensitive mass sensor is proposed.
authors.affiliation: Department of Chemical Engineering, Dong-A University, 840 Hadan-dong, Saha, Busan 604-714, Korea.
authors.forename: J M
authors.initials: JM
authors.lastname: Kim
authors.forename: S M
authors.initials: SM
authors.lastname: Chang
authors.forename: H
authors.initials: H
authors.lastname: Muramatsu
authors.forename: T
authors.initials: T
authors.lastname: Ohashi
authors.forename: O
authors.initials: O
authors.lastname: Matsuzawa
authors.forename: Y
authors.initials: Y
authors.lastname: Shirakawabe
authors.forename: I H
authors.initials: IH
authors.lastname: Kim
authors.forename: W S
authors.initials: WS
authors.lastname: Kim
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D008365:Manometry / Q000295:instrumentation*; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation*; D008904:Miniaturization; D008970:Molecular Weight; D036103:Nanotechnology / Q000295:instrumentation*