title: Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers.
abstract: Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach-Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0.002 nm resolution without line shape degradation. Field-induced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing.
authors.affiliation: University of California, San Diego, Mail Code 0407, La Jolla, California 92093, USA. yis004@ucsd.edu
authors.forename: Yiran
authors.initials: Y
authors.lastname: Shen
authors.forename: Ivan B
authors.initials: IB
authors.lastname: Divliansky
authors.forename: Dimitri N
authors.initials: DN
authors.lastname: Basov
authors.forename: Shayan
authors.initials: S
authors.lastname: Mookherjea