title: Image blurring of thick specimens due to MeV transmission electron scattering: a Monte Carlo study.
abstract: Image blurring of MeV transmission electrons for gold nanoparticles on the top surface of micrometer-thick specimens has been investigated using the Monte Carlo simulation. Both the simulated line density profile and therefore image blurring were in good agreement with the experimental ones in the ultrahigh voltage electron microscope. Quantitative effects of specimen thickness and electron energy on image blurring were presented, in which the specimen thickness had a greater influence. Image blurring was demonstrated to be caused mainly by multiple elastic scattering, but it could be reduced to several nanometers for a 5 µm thick epoxy-resin specimen at the electron energy of 2 MeV.
authors.affiliation: Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Department of Electronic Science and Technology, Xi'an Jiaotong University, Xi'an, People's Republic of China.
authors.forename: Fang
authors.initials: F
authors.lastname: Wang
authors.forename: Hai-Bo
authors.initials: HB
authors.lastname: Zhang
authors.forename: Meng
authors.initials: M
authors.lastname: Cao
authors.forename: Ryuji
authors.initials: R
authors.lastname: Nishi
authors.forename: Akio
authors.initials: A
authors.lastname: Takaoka