title: Easy fabrication of electrically insulating nanogaps by transfer printing.
abstract: An easy and cost-effective method to reproducibly fabricate nanogaps over a large area is introduced. Gold is evaporated on low-aspect-ratio polydimethylsiloxane (PDMS) stamps at an angle of 60°. Afterwards, the stamp is brought into contact with a silicon/silicon dioxide substrate and subsequently peeled at rates varying from 1 to 3 mm s(-1), resulting in the fabrication of nanogaps between two gold electrodes. The fabrication of insulating nanogaps with a width down to 50 nm is demonstrated.
authors.affiliation: attocube systems AG, Königinstr. 11a RGB, 80539, Munich, Germany; Lehrstuhl für Nanoelektronik, Technische Universität München, Arcisstrasse 21, 80333, Munich, Germany. omar.fakhr@suss.com.
authors.forename: Omar
authors.initials: O
authors.lastname: Fakhr
authors.forename: Philipp
authors.initials: P
authors.lastname: Altpeter
authors.forename: Khaled
authors.initials: K
authors.lastname: Karrai
authors.forename: Paolo
authors.initials: P
authors.lastname: Lugli