title: Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude.
abstract: We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom.
authors.affiliation: GAP-Biophotonics, Université de Genève, 20 rue de l'Ecole de Médecine, 1211 Genève 4, Switzerland.
authors.forename: Stefan M
authors.initials: SM
authors.lastname: Weber
authors.forename: Luigi
authors.initials: L
authors.lastname: Bonacina
authors.forename: Wilfried
authors.initials: W
authors.lastname: Noell
authors.forename: Denis
authors.initials: D
authors.lastname: Kiselev
authors.forename: Jérôme
authors.initials: J
authors.lastname: Extermann
authors.forename: Fabio
authors.initials: F
authors.lastname: Jutzi
authors.forename: Sébastien
authors.initials: S
authors.lastname: Lani
authors.forename: Ondrej
authors.initials: O
authors.lastname: Nenadl
authors.forename: Jean-Pierre
authors.initials: JP
authors.lastname: Wolf
authors.forename: Nico F
authors.initials: NF
authors.lastname: de Rooij
mesh_terms: D002138:Calibration; D004867:Equipment Design; D055096:Optical Devices; D055672:Static Electricity; D013314:Stress, Mechanical; D013997:Time Factors