title: Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide.
abstract: We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H(2) detection based on a microcantilever suspended above a Si(3)N(4) grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1% H(2) in N(2). The error in detection of the cantilever bending induced by absorption of H(2) is estimated to be approximately 10 nm. Significantly improved sensitivity (down to ∼33 pm) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.
authors.affiliation: Integrated Optical MicroSystems (IOMS) Group, University of Twente P.O. Box 217, 7500 AE Enschede, The Netherlands. s.v.pham@ewi.utwente.nl
authors.forename: So V
authors.initials: SV
authors.lastname: Pham
authors.forename: Meindert
authors.initials: M
authors.lastname: Dijkstra
authors.forename: Henk A G M
authors.initials: HA
authors.lastname: van Wolferen
authors.forename: Markus
authors.initials: M
authors.lastname: Pollnau
authors.forename: Gijs J M
authors.initials: GJ
authors.lastname: Krijnen
authors.forename: Hugo J W M
authors.initials: HJ
authors.lastname: Hoekstra