title: Realization of single-mode telluride rib waveguides for mid-IR applications between 10 and 20 μm.
abstract: The feasibility of all-telluride integrated optics devices based on waveguides presenting a single-mode behavior in the spectral range (10-20 μm) is demonstrated. These waveguides are constituted of a several micrometer thick Te(82)Ge(18) film deposited onto a Te(75)Ge(15)Ga(10) bulk glass substrate by thermal coevaporation and further etched by reactive ion etching under the CHF(3)/O(2)/Ar atmosphere. The obtained structures were proven to behave as channel waveguides with a good single-mode transmission over the whole spectral range. These results allowed validating our technological solution for the fabrication of integrated optics modal filters for spatial interferometry.
authors.affiliation: Institut Charles Gerhardt de Montpellier, UMR 5253, Université Montpellier II, Place Eugène Bataillon, 34095 Montpellier 5, France. cvigreux@lpmc.univ‑montp2.fr
authors.forename: Caroline
authors.initials: C
authors.lastname: Vigreux
authors.forename: Eléonore
authors.initials: E
authors.lastname: Barthélémy
authors.forename: Lionel
authors.initials: L
authors.lastname: Bastard
authors.forename: Jean-Emmanuel
authors.initials: JE
authors.lastname: Broquin
authors.forename: Marc
authors.initials: M
authors.lastname: Barillot
authors.forename: Stéphane
authors.initials: S
authors.lastname: Ménard
authors.forename: Gilles
authors.initials: G
authors.lastname: Parent
authors.forename: Annie
authors.initials: A
authors.lastname: Pradel
mesh_terms: D017097:Electric Impedance; D005898:Glass / Q000737:chemistry; D007259:Infrared Rays; D055096:Optical Devices; D013691:Tellurium / Q000737:chemistry*
chemical_list: D013691:Tellurium