title: Parallel-plate wet denuder coupled ion chromatograph for near-real-time detection of trace acidic gases in clean room air.
abstract: This paper describes the performance of our automated acidic (CH(3)COOH, HCOOH, HCl, HNO(2), SO(2), and HNO(3)) gases monitor utilizing a parallel-plate wet denuder (PPWD). The PPWD quantitatively collects gaseous contaminants at a high sample flow rate (∼8 dm(3) min(-1)) compared to the conventional methods used in a clean room. Rapid response to any variability in the sample concentration enables near-real-time monitoring. In the developed monitor, the analyte collected with the PPWD is pumped into one of two preconcentration columns for 15 min, and determined by means of ion chromatography. While one preconcentration column is used for chromatographic separation, the other is used for loading the sample solution. The system allows continuous monitoring of the common acidic gases in an advanced semiconductor manufacturing clean room.
authors.affiliation: Institute of Health Biosciences, The University of Tokushima Graduate School, 1-78-1 Shomachi, Tokushima 770-8505, Japan. takeuchi@ph.tokushima-u.ac.jp
authors.forename: Masaki
authors.initials: M
authors.lastname: Takeuchi
authors.forename: Hiromichi
authors.initials: H
authors.lastname: Tsunoda
authors.forename: Hideji
authors.initials: H
authors.lastname: Tanaka
authors.forename: Yoshimi
authors.initials: Y
authors.lastname: Shiramizu
mesh_terms: D019342:Acetic Acid / Q000032:analysis; D000388:Air / Q000032:analysis*; D002849:Chromatography, Gas / Q000295:instrumentation*; D005561:Formates / Q000032:analysis; D005740:Gases / Q000032:analysis* / Q000737:chemistry; D006851:Hydrochloric Acid / Q000032:analysis; D017942:Nitric Acid / Q000032:analysis; D009608:Nitrous Acid / Q000032:analysis; D013458:Sulfur Dioxide / Q000032:analysis; D017155:Wettability
chemical_list: D005561:Formates; D005740:Gases; D013458:Sulfur Dioxide; D017942:Nitric Acid; D019342:Acetic Acid; D006851:Hydrochloric Acid; D009608:Nitrous Acid