title: Synthesis of few-layer graphene via microwave plasma-enhanced chemical vapour deposition.
abstract: If graphene is ever going to live up to the promises of future nanoelectronic devices, an easy and cheap route for mass production is an essential requirement. A way to extend the capabilities of plasma-enhanced chemical vapour deposition to the synthesis of freestanding few-layer graphene is presented. Micrometre-wide flakes consisting of four to six atomic layers of stacked graphene sheets have been synthesized by controlled recombination of carbon radicals in a microwave plasma. A simple and highly reproducible technique is essential, since the resulting flakes can be synthesized without the need for a catalyst on the surface of any substrate that withstands elevated temperatures up to 700 °C. A thorough structural analysis of the flakes is performed with electron microscopy, x-ray diffraction, Raman spectroscopy and scanning tunnelling microscopy. The resulting graphene flakes are aligned vertically to the substrate surface and grow according to a three-step process, as revealed by the combined analysis of electron microscopy and x-ray photoelectron spectroscopy.
authors.affiliation: VITO Materials, Flemish Institute for Technological Research, Boeretang 200, BE-2400 Mol, Belgium. Laboratory of Solid-State Physics and Magnetism, Katholieke Universiteit Leuven, Celestijnenlaan 200 D, BE-3001 Leuven, Belgium.
authors.forename: Alexander
authors.initials: A
authors.lastname: Malesevic
authors.forename: Roumen
authors.initials: R
authors.lastname: Vitchev
authors.forename: Koen
authors.initials: K
authors.lastname: Schouteden
authors.forename: Alexander
authors.initials: A
authors.lastname: Volodin
authors.forename: Liang
authors.initials: L
authors.lastname: Zhang
authors.forename: Gustaaf Van
authors.initials: GV
authors.lastname: Tendeloo
authors.forename: Annick
authors.initials: A
authors.lastname: Vanhulsel
authors.forename: Chris Van
authors.initials: CV
authors.lastname: Haesendonck