title: Electrodeposition in capillaries: bottom-up micro- and nanopatterning of functional materials on conductive substrates.
abstract: A cost-effective and versatile methodology for bottom-up patterned growth of inorganic and metallic materials on the micro- and nanoscale is presented. Pulsed electrodeposition was employed to deposit arbitrary patterns of Ni, ZnO, and FeO(OH) of high quality, with lateral feature sizes down to 200-290 nm. The pattern was defined by an oxygen plasma-treated patterned PDMS mold in conformal contact with a conducting substrate and immersed in an electrolyte solution, so that the solid phases were deposited from the solution in the channels of the patterned mold. It is important that the distance between the entrance of the channels, and the location where deposition is needed, is kept limited. The as-formed patterns were characterized by high resolution scanning electron microscope, energy-dispersive X-ray analysis, atomic force microscopy, and X-ray diffraction.
authors.affiliation: Inorganic Materials Science, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands.
authors.forename: Antony
authors.initials: A
authors.lastname: George
authors.forename: A Wouter
authors.initials: AW
authors.lastname: Maijenburg
authors.forename: Michiel G
authors.initials: MG
authors.lastname: Maas
authors.forename: Dave H A
authors.initials: DH
authors.lastname: Blank
authors.forename: Johan E
authors.initials: JE
authors.lastname: Ten Elshof
mesh_terms: D004129:Dimethylpolysiloxanes / Q000737:chemistry; D004595:Electroplating / Q000379:methods*; D005296:Ferrous Compounds / Q000737:chemistry; D006046:Gold / Q000737:chemistry; D018625:Microscopy, Atomic Force; D036103:Nanotechnology; D009532:Nickel / Q000737:chemistry; D014961:X-Ray Diffraction; D015034:Zinc Oxide / Q000737:chemistry
chemical_list: D004129:Dimethylpolysiloxanes; D005296:Ferrous Compounds; C013830:baysilon; D006046:Gold; D009532:Nickel; C034236:ferrous oxide; D015034:Zinc Oxide