title: Controlled manipulation of carbon nanopillars and cantilevers by focused ion beam.
abstract: We explore a novel phenomenon of focused ion beam (FIB) induced bending of carbon nanopillars or cantilever structures. The bending occurs towards the ion beam during scanning. The explanation of this bending has been sought on the basis of a model which considers temperature rise and gradients caused by the impinging ion beam. The process is controllable and reversible, which makes it highly suitable for in situ manipulation to make desired 3D shapes by the piecewise bending of the nanopillars and cantilever structures during their fabrication using electron beam or FIB chemical vapor deposition (EB-CVD or FIB-CVD). Its usefulness in the fabrication of nanosize mechanical components has been demonstrated by making a branch structure from a single cantilever.
authors.affiliation: Department of Physics, Indian Institute of Technology Kanpur, Kanpur 208016, India.
authors.forename: Sarvesh K
authors.initials: SK
authors.lastname: Tripathi
authors.forename: Neeraj
authors.initials: N
authors.lastname: Shukla
authors.forename: S
authors.initials: S
authors.lastname: Dhamodaran
authors.forename: Vishwas N
authors.initials: VN
authors.lastname: Kulkarni