title: Micro/nanosized refractive lens arrays formed by means of conformal thin film deposition.
abstract: We provide a 'growing' method for fabricating a microlens array with lateral size of a few microns or less. Instead of using complicated etching techniques, the method forms a spherical profile of the lens using conformal chemical vapor deposition. We have fabricated two lens arrays. One has a pitch of 1200 nm, a circular aperture 1000 nm in diameter and a sag height of 130 nm. The other array has a pitch of 600 nm, and a square aperture of 600 nm × 600 nm, with a fill factor close to 100%. The maximum profile deviation between the fabricated lens and an ideal sphere is about 11% and 14% respectively. The calculation indicates that the curvature difference of the profile of the square lens in the orthogonal and diagonal direction is 5.5%. The roughness of the lens is measured as approximately 6 nm.
authors.affiliation: Department of Electrical and Computer Engineering, University of Illinois at Chicago, Chicago, IL 60607, USA.
authors.forename: Hongjun
authors.initials: H
authors.lastname: Zeng
authors.forename: Robert
authors.initials: R
authors.lastname: Lajos
authors.forename: Ed
authors.initials: E
authors.lastname: Elzy
authors.forename: Vitali
authors.initials: V
authors.lastname: Metlushko