title: Multiplexed SOI BioFETs.
abstract: Nanoscale Field Effect Transistors have emerged as a promising technology for ultrasensitive, unlabeled diagnostic applications. However, their use as quantitative sensors has been problematic because of the need for individual sensor calibration. In this work we demonstrate an internal calibration scheme for multiplexed nanoribbon field effect sensors by utilizing the initial current rates rather than end point detection. A linear response is observed consistent with initial binding kinetics. Moreover, we are able to show that top-down fabrication techniques yield reproducible device results with minimal fluctuations, enabling internal calibration.
authors.affiliation: Department of Electrical, Yale University, 15 Prospect St., New Haven, CT 06511, USA. aleksandar.vacic@yale.edu
authors.forename: Aleksandar
authors.initials: A
authors.lastname: Vacic
authors.forename: Jason M
authors.initials: JM
authors.lastname: Criscione
authors.forename: Eric
authors.initials: E
authors.lastname: Stern
authors.forename: Nitin K
authors.initials: NK
authors.lastname: Rajan
authors.forename: Tarek
authors.initials: T
authors.lastname: Fahmy
authors.forename: Mark A
authors.initials: MA
authors.lastname: Reed
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation*; D002138:Calibration; D036103:Nanotechnology; D012825:Silicon; D014173:Transistors, Electronic
chemical_list: D012825:Silicon