title: Chemical-assisted laser parallel nanostructuring of silicon in optical near fields.
abstract: The authors present a simple and efficient technique for producing hexagonal arrays of nanostructures on silicon surfaces in chemical solutions. It utilizes the effect of optical near-field enhancement by self-assembled particle-lens arrays and a thermally induced chemical reaction with an alkaline solution. About 10(8) features can be produced simultaneously by one single laser pulse. Furthermore, the shape of the structures was found to be controllable, from concave holes to convex bumps, by means of a post-etching process, in the same chemical solution.
authors.affiliation: Laser Processing Research Centre, School of Mechanical, Aerospace and Civil Engineering, University of Manchester, Sackville Street, Manchester M60 1QD, UK. Corrosion and Protection Centre, School of Materials, University of Manchester, The Mill, Manchester M60 1QD, UK.
authors.forename: Wei
authors.initials: W
authors.lastname: Guo
authors.forename: Zeng Bo
authors.initials: ZB
authors.lastname: Wang
authors.forename: Lin
authors.initials: L
authors.lastname: Li
authors.forename: Zhu
authors.initials: Z
authors.lastname: Liu
authors.forename: Boris
authors.initials: B
authors.lastname: Luk'yanchuk
authors.forename: David J
authors.initials: DJ
authors.lastname: Whitehead