title: Optical interference lithography using azobenzene-functionalized polymers for micro- and nanopatterning of silicon.
authors.affiliation: Department of Applied Physics, Aalto University, Finland.
authors.forename: Aleksandr
authors.initials: A
authors.lastname: Kravchenko
authors.forename: Andriy
authors.initials: A
authors.lastname: Shevchenko
authors.forename: Victor
authors.initials: V
authors.lastname: Ovchinnikov
authors.forename: Arri
authors.initials: A
authors.lastname: Priimagi
authors.forename: Matti
authors.initials: M
authors.lastname: Kaivola
mesh_terms: D001391:Azo Compounds / Q000737:chemistry*; D055616:Microtechnology / Q000379:methods*; D036103:Nanotechnology / Q000379:methods*; D055620:Optical Phenomena; D011108:Polymers / Q000737:chemistry*; D011327:Printing / Q000379:methods*; D012825:Silicon / Q000737:chemistry*
chemical_list: D001391:Azo Compounds; D011108:Polymers; C009850:azobenzene; D012825:Silicon