title: X-ray pushing of a mechanical microswing.
abstract: We report here for the first time the combination of x-ray synchrotron light and a micro-electro-mechanical system (MEMS). We show how it is possible to modulate in real time a MEMS mass distribution to induce a nanometric and tunable mechanical oscillation. The quantitative experimental demonstration we present here uses periodic thermal dilatation of a Ge microcrystal attached to a Si microlever, induced by controlled absorption of an intensity modulated x-ray microbeam. The mechanism proposed can be envisaged either for the detection of small heat flux or for the actuation of a mechanical system.
authors.affiliation: Institut Néel, CNRS-Université Joseph Fourier Grenoble, BP 166, F-38042 Grenoble Cedex 9, France. CEA-LETI, 17 Avenue des Martyrs, F-38054 Grenoble Cedex 9, France.
authors.forename: A
authors.initials: A
authors.lastname: Siria
authors.forename: M S
authors.initials: MS
authors.lastname: Rodrigues
authors.forename: O
authors.initials: O
authors.lastname: Dhez
authors.forename: W
authors.initials: W
authors.lastname: Schwartz
authors.forename: G
authors.initials: G
authors.lastname: Torricelli
authors.forename: S
authors.initials: S
authors.lastname: Ledenmat
authors.forename: N
authors.initials: N
authors.lastname: Rochat
authors.forename: G
authors.initials: G
authors.lastname: Auvert
authors.forename: O
authors.initials: O
authors.lastname: Bikondoa
authors.forename: T H
authors.initials: TH
authors.lastname: Metzger
authors.forename: D
authors.initials: D
authors.lastname: Wermeille
authors.forename: R
authors.initials: R
authors.lastname: Felici
authors.forename: F
authors.initials: F
authors.lastname: Comin
authors.forename: J
authors.initials: J
authors.lastname: Chevrier