title: Monolithic integration of continuously tunable plasmonic nanostructures.
abstract: We demonstrate precise three-dimensional integration of smooth bumps, grooves, and apertures in optically thick metal films using template stripping. Patterned silicon wafers are used as high-quality, reusable templates. The heights or depths of the metallic features are controlled to within 2 nm, giving continuously tunable optical properties with sharp and intense plasmonic resonances. Furthermore, we demonstrate a pick-and-place template stripping method in situ, enabling versatile three-dimensional micromanipulation, imaging, and characterization of nanoscale devices.
authors.affiliation: Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, Minnesota 55455, United States.
authors.forename: Nathan C
authors.initials: NC
authors.lastname: Lindquist
authors.forename: Timothy W
authors.initials: TW
authors.lastname: Johnson
authors.forename: David J
authors.initials: DJ
authors.lastname: Norris
authors.forename: Sang-Hyun
authors.initials: SH
authors.lastname: Oh
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation / Q000379:methods*; D004867:Equipment Design; D007477:Ions; D008670:Metals; D008855:Microscopy, Electron, Scanning / Q000379:methods; D036103:Nanotechnology / Q000379:methods*; D055095:Optics and Photonics; D012825:Silicon / Q000737:chemistry
chemical_list: D007477:Ions; D008670:Metals; D012825:Silicon