title: Basic angles in microelectromechanical system scanning grating spectrometers.
abstract: Modern miniaturized scanning grating spectrometers (SGSs) are often based on microelectromechanical system devices. In contrast to classical spectrometers, such systems exhibit additional design constraints, like a symmetrical motion of the grating with a limited deflection. A detailed mathematical analysis of typical SGS configurations based on the grating equation considering these constraints is presented. Equations that relate the basic angles on a scanning grating to the grating properties and the attainable wavelength range of a spectrometer are derived, and the solution set is examined. Furthermore, the analytical description can be used to optimize SGSs with symmetrically moving gratings. The attainable spectral range for a given deflection amplitude of the grating can be calculated. Alternatively, the required grating properties can be determined for a given spectral range.
authors.affiliation: Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Strasse 2, 01109 Dresden, Germany. tino.puegner@s2001.tu‐chemnitz.de
authors.forename: Tino
authors.initials: T
authors.lastname: Puegner
authors.forename: Jens
authors.initials: J
authors.lastname: Knobbe
authors.forename: Hubert
authors.initials: H
authors.lastname: Lakner