title: Silicon-nanowire-based CMOS-compatible field-effect transistor nanosensors for ultrasensitive electrical detection of nucleic acids.
abstract: We herein report the design of a novel semiconducting silicon nanowire field-effect transistor (SiNW-FET) biosensor array for ultrasensitive label-free and real-time detection of nucleic acids. Highly responsive SiNWs with narrow sizes and high surface-to-volume-ratios were "top-down" fabricated with a complementary metal oxide semiconductor compatible anisotropic self-stop etching technique. When SiNWs were covalently modified with DNA probes, the nanosensor showed highly sensitive concentration-dependent conductance change in response to specific target DNA sequences. This SiNW-FET nanosensor revealed ultrahigh sensitivity for rapid and reliable detection of 1 fM of target DNA and high specificity single-nucleotide polymorphism discrimination. As a proof-of-concept for multiplex detection with this small-size and mass producible sensor array, we demonstrated simultaneous selective detection of two pathogenic strain virus DNA sequences (H1N1 and H5N1) of avian influenza.
authors.affiliation: State Key Laboratories of Transducer Technology & Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
authors.forename: Anran
authors.initials: A
authors.lastname: Gao
authors.forename: Na
authors.initials: N
authors.lastname: Lu
authors.forename: Pengfei
authors.initials: P
authors.lastname: Dai
authors.forename: Tie
authors.initials: T
authors.lastname: Li
authors.forename: Hao
authors.initials: H
authors.lastname: Pei
authors.forename: Xiuli
authors.initials: X
authors.lastname: Gao
authors.forename: Yibin
authors.initials: Y
authors.lastname: Gong
authors.forename: Yuelin
authors.initials: Y
authors.lastname: Wang
authors.forename: Chunhai
authors.initials: C
authors.lastname: Fan
mesh_terms: D016880:Anisotropy; D015374:Biosensing Techniques / Q000379:methods*; D004279:DNA, Viral / Q000737:chemistry; D053118:Influenza A Virus, H1N1 Subtype / Q000235:genetics; D053124:Influenza A Virus, H5N1 Subtype / Q000235:genetics; D053768:Metal Nanoparticles / Q000737:chemistry; D008956:Models, Chemical; D053770:Nanowires / Q000737:chemistry*; D009696:Nucleic Acids / Q000032:analysis*; D010087:Oxides / Q000737:chemistry; D015203:Reproducibility of Results; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry*
chemical_list: D004279:DNA, Viral; D009696:Nucleic Acids; D010087:Oxides; D012825:Silicon