title: High-temperature langasite SAW oxygen sensor.
abstract: High-temperature langasite SAW oxygen sensors using sputtered ZnO as a resistive gas-sensing layer were fabricated and tested. Sensitivity to oxygen gas was observed between 500°C to 700°C, with a sensitivity peak at about 625°C, consistent with the theoretical predictions of the acoustoelectric effect.
authors.affiliation: National Energy Technology Laboratory, Carnegie Mellon University, Pittsburgh, PA, USA. pengzheng@alumni.cmu.edu
authors.forename: Peng
authors.initials: P
authors.lastname: Zheng
authors.forename: Tao-Lun
authors.initials: TL
authors.lastname: Chin
authors.forename: David
authors.initials: D
authors.lastname: Greve
authors.forename: Irving
authors.initials: I
authors.lastname: Oppenheim
authors.forename: Vanessa
authors.initials: V
authors.lastname: Malone
authors.forename: Limin
authors.initials: L
authors.lastname: Cao
mesh_terms: D000162:Acoustics; D004553:Electric Conductivity; D006358:Hot Temperature; D010100:Oxygen / Q000032:analysis*; D012680:Sensitivity and Specificity; D017640:Silicates / Q000737:chemistry*; D015034:Zinc Oxide / Q000737:chemistry
chemical_list: C470742:La3Ga5SiO14; D017640:Silicates; D010100:Oxygen; D015034:Zinc Oxide