title: Toward quantitative core-loss EFTEM tomography.
abstract: Core-loss EFTEM tomography provides three-dimensional structural and chemical information. Multiple inelastic scattering occurring in thick specimens as well as orientation-dependent diffraction contrast due to multiple elastic scattering, however, often limit its applications. After demonstrating the capability of core-loss EFTEM tomography to reconstruct just a few monolayers thin carbon layer covering a Fe catalyst particle we discuss its application to thicker samples. We propose an approximate multiple-scattering correction method based on the use of zero-loss images and apply it successfully to copper whiskers, providing a significant improvement of the reconstructed 3D elemental distribution. We conclude this paper by a general discussion on experimental parameters affecting the accuracy of EFTEM 3D elemental mapping.
authors.affiliation: Stuttgart Center for Electron Microscopy, Max-Planck-Institut für Metallforschung, Heisenbergstr. 3, 70569 Stuttgart, Germany. nyjin@mf.mpg.de
authors.forename: N Y
authors.initials: NY
authors.lastname: Jin-Phillipp
authors.forename: C T
authors.initials: CT
authors.lastname: Koch
authors.forename: P A
authors.initials: PA
authors.lastname: van Aken