title: Electrochemical development of hydrogen silsesquioxane by applying an electrical potential.
abstract: We present a new method for developing hydrogen silsesquioxane (HSQ) by using electrical potentials and deionized water. Nested-L test structures with a pitch as small as 9 nm were developed using this electrochemical technique in saline solution without adding hydroxyl ions. Furthermore, we showed that high-resolution structures can be electrochemically developed in deionized water alone. Electrochemical development is controlled by the applied voltage and may overcome several of the limitations discussed for alkaline developers, such as poor hydroxyl anion diffusion and charge repulsion effects in small trenches.
authors.affiliation: Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA 02139, USA. strobel@mit.edu
authors.forename: Sebastian
authors.initials: S
authors.lastname: Strobel
authors.forename: Katherine J
authors.initials: KJ
authors.lastname: Harry
authors.forename: Huigao
authors.initials: H
authors.lastname: Duan
authors.forename: Joel K W
authors.initials: JK
authors.lastname: Yang
authors.forename: Vitor R
authors.initials: VR
authors.lastname: Manfrinato
authors.forename: Karl K
authors.initials: KK
authors.lastname: Berggren