title: Collisionless bounce resonance heating in dual-frequency capacitively coupled plasmas.
abstract: We present the experimental evidence of the collisionless electron bounce resonance heating (BRH) in low-pressure dual-frequency capacitively coupled plasmas. In capacitively coupled plasmas at low pressures when the discharge frequency and gap satisfy a certain resonant condition, the high energy beamlike electrons can be generated by fast sheath expansion, and heated by the two sheaths coherently, thus the BRH occurs. By using a combined measurement of a floating double probe and optical emission spectroscopy, we demonstrate the effect of BRH on plasma properties, such as plasma density and light emission, especially in dual-frequency discharges.
authors.affiliation: School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian, China.
authors.forename: Yong-Xin
authors.initials: YX
authors.lastname: Liu
authors.forename: Quan-Zhi
authors.initials: QZ
authors.lastname: Zhang
authors.forename: Wei
authors.initials: W
authors.lastname: Jiang
authors.forename: Lu-Jing
authors.initials: LJ
authors.lastname: Hou
authors.forename: Xiang-Zhan
authors.initials: XZ
authors.lastname: Jiang
authors.forename: Wen-Qi
authors.initials: WQ
authors.lastname: Lu
authors.forename: You-Nian
authors.initials: YN
authors.lastname: Wang