title: Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices.
abstract: We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO(2) for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.
authors.forename: Satoru
authors.initials: S
authors.lastname: Matsuda
authors.forename: Motoaki
authors.initials: M
authors.lastname: Hara
authors.forename: Michio
authors.initials: M
authors.lastname: Miura
authors.forename: Takashi
authors.initials: T
authors.lastname: Matsuda
authors.forename: Masanori
authors.initials: M
authors.lastname: Ueda
authors.forename: Yoshio
authors.initials: Y
authors.lastname: Satoh
authors.forename: Ken-Ya
authors.initials: KY
authors.lastname: Hashimoto