title: Profiling of barrier capacitance and spreading resistance using a transient linearly increasing voltage technique.
abstract: A technique for the combined measurement of barrier capacitance and spreading resistance profiles using a linearly increasing voltage pulse is presented. The technique is based on the measurement and analysis of current transients, due to the barrier and diffusion capacitance, and the spreading resistance, between a needle probe and sample. To control the impact of deep traps in the barrier capacitance, a steady state bias illumination with infrared light was employed. Measurements of the spreading resistance and barrier capacitance profiles using a stepwise positioned probe on cross sectioned silicon pin diodes and pnp structures are presented.
authors: Vilnius University, Institute of Applied Research, Vilnius, Lithuania. eugenijus.gaubas@ff.vu.lt
authors: E
authors: E
authors: Gaubas
authors: T
authors: T
authors: Ceponis
authors: J
authors: J
authors: Kusakovskij