title: A statistical model of signal-noise in scanning electron microscopy.
abstract: A statistical model describing signal-noise generation and development along the signal formation process in a standard scanning electron microscope (SEM) using an Everhart-Thornley secondary electron detector is derived. Noise in the detector signal is modeled to originate from a cascade of five signal conversion stages. Based on the derived model, general conclusions are drawn concerning the total signal-to-noise ratio (SNR) at each stage, and the influence of each stage on the total SNR of the detector signal. The model is furthermore applied to a real-world SEM, and verified by experimental data.
authors: JEOL Technics Ltd, Akishima-shi, Tokyo, Japan. ftimisch@jeol.co.jp
authors: F
authors: F
authors: Timischl
authors: M
authors: M
authors: Date
authors: S
authors: S
authors: Nemoto