title: Toward local growth of individual nanowires on three-dimensional microstructures by using a minimally invasive catalyst templating method.
abstract: We present a novel minimally invasive postprocessing method for catalyst templating based on focused charged particle beam structuring, which enables a localized vapor-liquid-solid (VLS) growth of individual nanowires on prefabricated three-dimensional micro- and nanostructures. Gas-assisted focused electron beam induced deposition (FEBID) was used to deposit a SiO(x) surface layer of about 10 × 10 μm(2) on top of a silicon atomic force microscopy cantilever. Gallium focused ion beam (FIB) milling was used to make a hole through the SiO(x) layer into the underlying silicon. The hole was locally filled with a gold catalyst via FEBID using either Me(2)Au(tfac) or Me(2)Au(acac) as precursor. Subsequent chemical vapor deposition (CVD)-induced VLS growth using a mixture of SiH(4) and Ar resulted in individual high quality crystalline nanowires. The process, its yield, and the resulting angular distribution/crystal orientation of the silicon nanowires are discussed. The presented combined FIB/FEBID/CVD-VLS process is currently the only proven method that enables the growth of individual monocrystalline Si nanowires on prestructured substrates and devices.
authors: EMPA, Swiss Federal Laboratories for Materials Science and Technology , Feuerwerkerstr. 39, CH-3602 Thun, Switzerland.
authors: Martin Günter
authors: MG
authors: Jenke
authors: Damiana
authors: D
authors: Lerose
authors: Christoph
authors: C
authors: Niederberger
authors: Johann
authors: J
authors: Michler
authors: Silke
authors: S
authors: Christiansen
authors: Ivo
authors: I
authors: Utke