title: Note: High speed optical profiler based on a phase-shifting technique using frequency-scanning lasers.
abstract: We present a high speed optical profiler (HSOP) using frequency-scanning lasers for three-dimensional profile measurements of microscopic structures. To improve upon previous techniques for implementing the HSOP, we developed frequency-scanning lasers and a compact microscopic interferometer. The controller of the HSOP was also modified to generate proper phase-shifting steps. For measurements of step height specimens, the HSOP showed results comparable with a commercial optical profiler, even with much higher measurement speeds (up to 30 Hz). The typical repeatability of step height measurement was less than 1 nm. We also present measurements of microscopic structures to verify the HSOP's ability to perform high speed inline inspection for the semiconductor and flat-panel display industries.
authors: Center for Length, Korea Research Institute of Standards and Science, Yuseong-gu, Daejeon, South Korea.
authors: Jong-Ahn
authors: JA
authors: Kim
authors: Chu-Shik
authors: CS
authors: Kang
authors: Jonghan
authors: J
authors: Jin
authors: Cheon
authors: C
authors: Eom
authors: Roma
authors: R
authors: Jang
authors: Jae Wan
authors: JW
authors: Kim