title: A portable, benchtop photolithography system based on a solid-state light source.
authors: Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA.
authors: Mark D
authors: MD
authors: Huntington
authors: Teri W
authors: TW
authors: Odom
mesh_terms: D044085:Microfluidics / Q000295:instrumentation* / Q000379:methods*; D008855:Microscopy, Electron, Scanning; D014466:Ultraviolet Rays