title: Long-wave infrared 1 × 2 MMI based on air-gap beneath silicon rib waveguides.
abstract: The undercut long-wave infrared (LWIR) waveguide components with air-gap beneath are analyzed and fabricated on the Si-wafer with simple manufacturing process. A 1 × 2 multimode interference (MMI) splitter based on this structure is presented and measured under the 10.6 μm wavelength experimental setup. The uniformity of the MMI fabricated is 0.76 dB. The relationship among the output power, slab thickness and air-gap width is also fully discussed. Furthermore, undercut straight waveguides based on SOI platform are fabricated for propagation loss evaluation. Ways to reduce the loss are discussed either.
authors.affiliation: Department of Information Science and Electronics Engineering, Zhejiang University, Hangzhou, 310027, China.
authors.forename: Yuxin
authors.initials: Y
authors.lastname: Wei
authors.forename: Guoyi
authors.initials: G
authors.lastname: Li
authors.forename: Yinlei
authors.initials: Y
authors.lastname: Hao
authors.forename: Yubo
authors.initials: Y
authors.lastname: Li
authors.forename: Jianyi
authors.initials: J
authors.lastname: Yang
authors.forename: Minghua
authors.initials: M
authors.lastname: Wang
authors.forename: Xiaoqing
authors.initials: X
authors.lastname: Jiang