title: Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning.
abstract: For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102 nm in the range of 1550 nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5 mW and is > 2 mW over the entire tuning range. The sidemode suppression ratios are > 45 dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).
authors.affiliation: Technische Universitaet Darmstadt, Institut fuer Mikrowellentechnik und Photonik, Darmstadt, Germany. gierl@imp.tu-darmstadt.de
authors.forename: C
authors.initials: C
authors.lastname: Gierl
authors.forename: T
authors.initials: T
authors.lastname: Gruendl
authors.forename: P
authors.initials: P
authors.lastname: Debernardi
authors.forename: K
authors.initials: K
authors.lastname: Zogal
authors.forename: C
authors.initials: C
authors.lastname: Grasse
authors.forename: H A
authors.initials: HA
authors.lastname: Davani
authors.forename: G
authors.initials: G
authors.lastname: Böhm
authors.forename: S
authors.initials: S
authors.lastname: Jatta
authors.forename: F
authors.initials: F
authors.lastname: Küppers
authors.forename: P
authors.initials: P
authors.lastname: Meissner
authors.forename: M-C
authors.initials: MC
authors.lastname: Amann