title: TiO2 micro-devices fabricated by laser direct writing.
abstract: Constructing micro/nanostructures based on TiO2 has attracted increasing attention due to the excellent properties of TiO2. In this study, we report a simple method to directly fabricate TiO2 micro-devices, including Fresnel lens, gear structures and suspended beams only by laser direct writing and selective-etching processing. This route shows great potential in fabricating TiO2 structures for micro-electro-mechanical systems, diffractive optical elements and bio-applications, owing to its maskless process, low cost, and flexible dry/wet alternative etching treatment.
authors.affiliation: National Center for Nanoscience and Technology, Beijing, China.
authors.forename: Yongsheng
authors.initials: Y
authors.lastname: Wang
authors.forename: Junjie
authors.initials: J
authors.lastname: Miao
authors.forename: Ye
authors.initials: Y
authors.lastname: Tian
authors.forename: Chuanfei
authors.initials: C
authors.lastname: Guo
authors.forename: Jianming
authors.initials: J
authors.lastname: Zhang
authors.forename: Tianling
authors.initials: T
authors.lastname: Ren
authors.forename: Qian
authors.initials: Q
authors.lastname: Liu