title: A piezoelectric goniometer inside a transmission electron microscope goniometer.
abstract: Piezoelectric nanoactuators, which can provide extremely stable and reproducible positioning, are rapidly becoming the dominant means for position control in transmission electron microscopy. Here we present a second-generation miniature goniometric nanomanipulation system, which is fully piezo-actuated with ultrafine step size for translation and rotation, programmable, and can be fitted inside a hollowed standard specimen holder for a transmission electron microscope (TEM). The movement range of this miniaturized drive is composed of seven degrees of freedom: three fine translational movements (X, Y, and Z axes), three coarse translational movements along all three axes, and one rotational movement around the X-axis with an integrated angular sensor providing absolute rotation feedback. The new piezoelectric system independently operates as a goniometer inside the TEM goniometer. In situ experiments, such as tomographic tilt without missing wedge and differential tilt between two specimens, are demonstrated.
authors.affiliation: NanoLAB Centre, Department of Materials Science and Engineering, University of Sheffield, Sheffield S1 3JD, UK.
authors.forename: Wei
authors.initials: W
authors.lastname: Guan
authors.forename: Aiden
authors.initials: A
authors.lastname: Lockwood
authors.forename: Beverley J
authors.initials: BJ
authors.lastname: Inkson
authors.forename: Günter
authors.initials: G
authors.lastname: Möbus