title: Ultrathin single crystal diamond nanomechanical dome resonators.
abstract: We present the first nanomechanical resonators microfabricated in single-crystal diamond. Shell-type resonators only 70 nm thick, the thinnest single crystal diamond structures produced to date, demonstrate a high-quality factor (Q ≈ 1000 at room temperature, Q ≈ 20 000 at 10 K) at radio frequencies (50-600 MHz). Quality factor dependence on temperature and frequency suggests an extrinsic origin to the dominant dissipation mechanism and methods to further enhance resonator performance.
authors.affiliation: U.S. Naval Research Laboratory, U.S. Naval Research Laboratory, 4555 Overlook Avenue SW, Washington, D.C. 20375 United States. maxim.zalalutdinov@nrl.navy.mil
authors.forename: Maxim K
authors.initials: MK
authors.lastname: Zalalutdinov
authors.forename: Matthew P
authors.initials: MP
authors.lastname: Ray
authors.forename: Douglas M
authors.initials: DM
authors.lastname: Photiadis
authors.forename: Jeremy T
authors.initials: JT
authors.lastname: Robinson
authors.forename: Jeffrey W
authors.initials: JW
authors.lastname: Baldwin
authors.forename: James E
authors.initials: JE
authors.lastname: Butler
authors.forename: Tatyana I
authors.initials: TI
authors.lastname: Feygelson
authors.forename: Bradford B
authors.initials: BB
authors.lastname: Pate
authors.forename: Brian H
authors.initials: BH
authors.lastname: Houston