title: Single-nanometer focusing of hard x-rays by Kirkpatrick-Baez mirrors.
abstract: We have constructed an extremely precise optical system for hard-x-ray nanofocusing in a synchrotron radiation beamline. Precision multilayer mirrors were fabricated, tested, and employed as Kirkpatrick-Baez mirrors with a novel phase error compensator. In the phase compensator, an at-wavelength wavefront error sensing method based on x-ray interferometry and an in situ phase compensator mirror, which adaptively deforms with nanometer precision, were developed to satisfy the Rayleigh criterion to achieve diffraction-limited focusing in a single-nanometer range. The performance of the optics was tested at BL29XUL of SPring-8 and was confirmed to realize a spot size of approximately 7 nm.
authors.affiliation: Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-1871, Japan. yamauchi@prec.eng.osaka-u.ac.jp
authors.forename: Kazuto
authors.initials: K
authors.lastname: Yamauchi
authors.forename: Hidekazu
authors.initials: H
authors.lastname: Mimura
authors.forename: Takashi
authors.initials: T
authors.lastname: Kimura
authors.forename: Hirokatsu
authors.initials: H
authors.lastname: Yumoto
authors.forename: Soichiro
authors.initials: S
authors.lastname: Handa
authors.forename: Satoshi
authors.initials: S
authors.lastname: Matsuyama
authors.forename: Kenta
authors.initials: K
authors.lastname: Arima
authors.forename: Yasuhisa
authors.initials: Y
authors.lastname: Sano
authors.forename: Kazuya
authors.initials: K
authors.lastname: Yamamura
authors.forename: Koji
authors.initials: K
authors.lastname: Inagaki
authors.forename: Hiroki
authors.initials: H
authors.lastname: Nakamori
authors.forename: Jangwoo
authors.initials: J
authors.lastname: Kim
authors.forename: Kenji
authors.initials: K
authors.lastname: Tamasaku
authors.forename: Yoshinori
authors.initials: Y
authors.lastname: Nishino
authors.forename: Makina
authors.initials: M
authors.lastname: Yabashi
authors.forename: Tetsuya
authors.initials: T
authors.lastname: Ishikawa