title: Stand-alone diamond binary phase transmission gratings for the EUV band.
abstract: We report on the development of true free-standing phase transmission gratings for the extreme ultraviolet band. An ultra-nanocrystalline, 300 nm thin diamond film on a backside etched silicon wafer is structured by electron-beam lithography to periods of 1 μm. In this way, flat and stable gratings of 400 μm in diameter are fabricated. First-order net efficiencies up to 28% are obtained from measurements at a synchrotron beamline within a wavelength range from 5.0 nm to 8.3 nm, whereas the 0th order is suppressed to 1% near 6.8 nm. Higher diffraction orders up to the 3rd one contribute less than 7% in sum to the far-field pattern.
authors.affiliation: Friedrich-Schiller-Universität Jena, Institut für Angewandte Physik, Max-Wien-Platz 1, 07743 Jena, Germany. christoph.braig@uni-jena.de
authors.forename: C
authors.initials: C
authors.lastname: Braig
authors.forename: T
authors.initials: T
authors.lastname: Käsebier
authors.forename: E-B
authors.initials: EB
authors.lastname: Kley
authors.forename: A
authors.initials: A
authors.lastname: Tünnermann