title: Monte Carlo simulation of secondary electron images for real sample structures in scanning electron microscopy.
abstract: Monte Carlo simulation methods for the study of electron beam interaction with solids have been mostly concerned with specimens of simple geometry. In this article, we propose a simulation algorithm for treating arbitrary complex structures in a real sample. The method is based on a finite element triangular mesh modeling of sample geometry and a space subdivision for accelerating simulation. Simulation of secondary electron image in scanning electron microscopy has been performed for gold particles on a carbon substrate. Comparison of the simulation result with an experiment image confirms that this method is effective to model complex morphology of a real sample.
authors.affiliation: Hefei National Laboratory for Physical Sciences at Microscale, Department of Physics, University of Science and Technology of China, Hefei, Anhui, People's Republic of China.
authors.forename: P
authors.initials: P
authors.lastname: Zhang
authors.forename: H Y
authors.initials: HY
authors.lastname: Wang
authors.forename: Y G
authors.initials: YG
authors.lastname: Li
authors.forename: S F
authors.initials: SF
authors.lastname: Mao
authors.forename: Z J
authors.initials: ZJ
authors.lastname: Ding