title: Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses.
abstract: Hard x-ray microscopy with nanometer resolution will open frontiers in the study of materials and devices, environmental sciences, and life sciences by utilizing the unique characterization capabilities of x-rays. Here we report two-dimensional nanofocusing by multilayer Laue lenses (MLLs), a type of diffractive optics that is in principle capable of focusing x-rays to 1 nm. We demonstrate focusing to a 25 × 27 nm(2) FWHM spot with an efficiency of 2% at a photon energy of 12 keV, and to a 25 × 40 nm(2) FWHM spot with an efficiency of 17% at a photon energy of 19.5 keV.
authors.affiliation: Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439, USA.
authors.forename: Hanfei
authors.initials: H
authors.lastname: Yan
authors.forename: Volker
authors.initials: V
authors.lastname: Rose
authors.forename: Deming
authors.initials: D
authors.lastname: Shu
authors.forename: Enju
authors.initials: E
authors.lastname: Lima
authors.forename: Hyon Chol
authors.initials: HC
authors.lastname: Kang
authors.forename: Ray
authors.initials: R
authors.lastname: Conley
authors.forename: Chian
authors.initials: C
authors.lastname: Liu
authors.forename: Nima
authors.initials: N
authors.lastname: Jahedi
authors.forename: Albert T
authors.initials: AT
authors.lastname: Macrander
authors.forename: G Brian
authors.initials: GB
authors.lastname: Stephenson
authors.forename: Martin
authors.initials: M
authors.lastname: Holt
authors.forename: Yong S
authors.initials: YS
authors.lastname: Chu
authors.forename: Ming
authors.initials: M
authors.lastname: Lu
authors.forename: Jörg
authors.initials: J
authors.lastname: Maser
mesh_terms: D000818:Animals; D004867:Equipment Design; D006801:Humans; D007909:Lenses; D008853:Microscopy / Q000379:methods*; D008855:Microscopy, Electron, Scanning / Q000379:methods; D008856:Microscopy, Fluorescence / Q000379:methods; D036103:Nanotechnology / Q000379:methods*; D055095:Optics and Photonics / Q000379:methods; D017785:Photons; D014965:X-Rays