title: Fabrication of a mid-IR wire-grid polarizer by direct imprinting on chalcogenide glass.
abstract: A mid-IR wire-grid polarizer with a 500 nm pitch was fabricated on a low toxic chalcogenide glass (Sb-Ge-Sn-S system) by the thermal imprinting of periodic grating followed by the thermal evaporation of Al metal. After imprinting, deposition of Al on the grating at an oblique angle produced a wire-grid polarizer. The fabricated polarizer showed polarization with TM transmittance greater than 60% at 5-9 μm wavelengths and an extinction ratio greater than 20 dB at 3.5-11 μm wavelengths. This polarizer with a high extinction ratio can be fabricated more simply and less expensively than conventional IR polarizers.
authors.affiliation: Department of Electronic Systems Engineering School of Engineering, the University of Shiga Prefecture, Hikone, Shiga, 522-8533, Japan. yamada.i@e.usp.ac.jp
authors.forename: Itsunari
authors.initials: I
authors.lastname: Yamada
authors.forename: Naoto
authors.initials: N
authors.lastname: Yamashita
authors.forename: Kunihiko
authors.initials: K
authors.lastname: Tani
authors.forename: Toshihiko
authors.initials: T
authors.lastname: Einishi
authors.forename: Mitsunori
authors.initials: M
authors.lastname: Saito
authors.forename: Kouhei
authors.initials: K
authors.lastname: Fukumi
authors.forename: Junji
authors.initials: J
authors.lastname: Nishii