title: Scanning electron microscope image enhancement using spread spectrum through dither signal imposition.
abstract: Noise is a primary issue in obtaining an image in a scanning microscope. This noise needs to be minimized in order to have a clear image of the sample in case of a nanosize level measurement. In this work, we propose a method to improve the image quality by applying dither signal injection to the scanning signal. This method involves minimizing the noise that occurs in scan control circuits, which results in a blurry or distorted image. The collected secondary electrons are first multiplied through a photomultiplier tube and are then converted into digital form using an analog/digital (A/D) converter. We propose a solution for the noise from the scan control circuit that appears on the image by adopting the spread spectrum method.
authors: Graduate School of NID Fusion Technology, Seoul National University of Science and Technology, Seoul 139-743, South Korea.
authors: Kwang Oh
authors: KO
authors: Jung
authors: Wonjong
authors: W
authors: Joo
authors: Dong Hwan
authors: DH
authors: Kim
mesh_terms: D000703:Analog-Digital Conversion; D007089:Image Enhancement / Q000295:instrumentation*; D008855:Microscopy, Electron, Scanning / Q000295:instrumentation* / Q000379:methods; D013048:Specimen Handling