title: Fabrication of concave microlens arrays using controllable dielectrophoretic force in template holes.
abstract: This Letter presents a method for fabricating concave microlens arrays of UV-curable polymer by using the dielectrophoresis (DEP) force. The DEP force, generated by a voltage between the patterned conductive template and substrate, acting on the polymer-air interface, can drive the dielectric liquid polymer into the template holes and change the shape of the polymer-air interface. The upper polymer surface of fabricated microlens is super smooth, which can reduce optical noise. The upper surface geometry is measured approximately as parabolic in general, which can lead to a negligible spherical aberration, compared to spherical surfaces.
authors: State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China.
authors: Xiangming
authors: X
authors: Li
authors: Yucheng
authors: Y
authors: Ding
authors: Jinyou
authors: J
authors: Shao
authors: Hongzhong
authors: H
authors: Liu
authors: Hongmiao
authors: H
authors: Tian
mesh_terms: D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design / Q000379:methods*; D007909:Lenses; D044085:Microfluidics / Q000295:instrumentation; D008904:Miniaturization; D008962:Models, Theoretical; D055095:Optics and Photonics / Q000379:methods*; D011108:Polymers / Q000737:chemistry
chemical_list: D011108:Polymers