title: Etch-free low loss silicon waveguides using hydrogen silsesquioxane oxidation masks.
abstract: An etch-free fabrication technique for creating low loss silicon waveguides in the silicon-on-insulator material system is proposed and demonstrated. The approach consists of local oxidation of a silicon-on-insulator chip covered with a e-beam patterned hydrogen silsesquioxane mask. A single oxidation step converts hydrogen silsesquioxane to a glass-like compound and simultaneously defines the waveguides, bypassing the need for any wet or dry etching steps. The spectral response of ring resonators fabricated using this technique was used to characterize the waveguide losses. Intrinsic Q-factors as high as 1.57 × 10(6), corresponding to a waveguide loss of 0.35 dB/cm, were measured.
authors: ECE Department, University of California San Diego, 9500 Gilman Drive, MC 0440, La Jolla, California 92093-0440, USA. maziar@ucsd.edu
authors: Maziar P
authors: MP
authors: Nezhad
authors: Olesya
authors: O
authors: Bondarenko
authors: Mercedeh
authors: M
authors: Khajavikhan
authors: Aleksandar
authors: A
authors: Simic
authors: Yeshaiahu
authors: Y
authors: Fainman
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D005336:Fiber Optic Technology / Q000295:instrumentation*; D005898:Glass / Q000737:chemistry*; D012031:Refractometry / Q000379:methods*; D012825:Silicon / Q000737:chemistry*
chemical_list: D012825:Silicon