title: High-finesse cavities fabricated by buckling self-assembly of a-Si/SiO2 multilayers.
abstract: Arrays of half-symmetric Fabry-Perot micro-cavities were fabricated by controlled formation of circular delamination buckles within a-Si/SiO(2) multilayers. Cavity height scales approximately linearly with diameter, in reasonable agreement with predictions based on elastic buckling theory. The measured finesse (F > 10(3)) and quality factors (Q > 10(4) in the 1550 nm range) are close to reflectance limited predictions, indicating that the cavities have low roughness and few defects. Degenerate Hermite-Gaussian and Laguerre-Gaussian modes were observed, suggesting a high degree of cylindrical symmetry. Given their silicon-based fabrication, these cavities hold promise as building blocks for integrated optical sensing systems.
authors: ECE Department, University of Alberta, 2nd Floor, 9107-116 St. NW, Edmonton, AB, T6G 2V4, Canada.
authors: T W
authors: TW
authors: Allen
authors: J
authors: J
authors: Silverstone
authors: N
authors: N
authors: Ponnampalam
authors: T
authors: T
authors: Olsen
authors: A
authors: A
authors: Meldrum
authors: R G
authors: RG
authors: DeCorby
mesh_terms: D003198:Computer Simulation; D004867:Equipment Design; D008420:Manufactured Materials / Q000032:analysis*; D008962:Models, Theoretical; D036103:Nanotechnology / Q000379:methods*; D055096:Optical Devices; D017785:Photons; D012542:Scattering, Radiation; D012825:Silicon / Q000737:chemistry*; D012822:Silicon Dioxide / Q000737:chemistry*
chemical_list: D012822:Silicon Dioxide; D012825:Silicon