title: Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm.
abstract: Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition.
authors: Institute of Physics, Academia Sinica, Taipei 115, Taiwan.
authors: Tsung-Yu
authors: TY
authors: Chen
authors: Yu-Tung
authors: YT
authors: Chen
authors: Cheng-Liang
authors: CL
authors: Wang
authors: Ivan M
authors: IM
authors: Kempson
authors: Wah-Keat
authors: WK
authors: Lee
authors: Yong S
authors: YS
authors: Chu
authors: Y
authors: Y
authors: Hwu
authors: G
authors: G
authors: Margaritondo
mesh_terms: D004563:Electrochemistry / Q000379:methods; D004583:Electrons; D004867:Equipment Design; D006046:Gold / Q000737:chemistry; D007909:Lenses; D053768:Metal Nanoparticles / Q000737:chemistry; D046529:Microscopy, Electron, Transmission / Q000379:methods; D008858:Microscopy, Phase-Contrast / Q000379:methods*; D055096:Optical Devices; D055095:Optics and Photonics / Q000379:methods; D017785:Photons; D014965:X-Rays
chemical_list: D006046:Gold