title: MEMS Bragg grating force sensor.
abstract: We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which is several times higher than what is obtained in conventional fiber Bragg grating force sensors.
authors: Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345 East, DK-2800 Kongens Lyngby, Denmark. kasper.reck@nanotech.dtu.dk
authors: Kasper
authors: K
authors: Reck
authors: Erik V
authors: EV
authors: Thomsen
authors: Ole
authors: O
authors: Hansen
mesh_terms: D004867:Equipment Design; D005336:Fiber Optic Technology / Q000295:instrumentation*; D055617:Micro-Electrical-Mechanical Systems; D055100:Optical Fibers; D012031:Refractometry / Q000295:instrumentation*; D015203:Reproducibility of Results; D014159:Transducers