title: SU8 3D prisms with ultra small inclined angle for low-insertion-loss fiber/waveguide interconnection.
abstract: This paper presents a simple method for fabricating SU8 three dimensional (3D) prisms with very small inclined-angles for optical-fiber/planar-waveguide interconnection with low insertion-loss by combining self-filling, molding and nano-lithography processes on plane surface. The prisms possess ultra low 3D inclined angle of 0.6° and a small surface roughness of 3.5 nm. It is demonstrated that the transmission efficiency of SOI waveguides improved about 4.6 times at the presence of SU8 prisms with a coupling loss of 11 dB per taper and radiation loss of 2.4 dB per taper.
authors: Department of Engineering and System Science, National TsingHua University, Hsinchu, Taiwan.
authors: Minh-Hang
authors: MH
authors: Nguyen
authors: Chia-Jung
authors: CJ
authors: Chang
authors: Ming-Chang
authors: MC
authors: Lee
authors: Fan-Gang
authors: FG
authors: Tseng
mesh_terms: D003198:Computer Simulation; D017076:Computer-Aided Design; D004867:Equipment Design; D008027:Light; D008962:Models, Theoretical; D055100:Optical Fibers; D012542:Scattering, Radiation