Study of cobalt clusters with very narrow size distribution deposited by high-rate cluster source.
Co nanoparticles with an average diameter of 4.8 nm and a very narrow size distribution were prepared in a self-built gas aggregation cluster source without a size-selective filtering system. Ferromagnetic nanoparticle films with a thickness of several hundreds of nanometres were prepared at deposition rates up to 600 nm min(-1). Cluster properties and deposition characteristics were investigated for different deposition parameters. The as-deposited films exhibit high porosity compared to conventionally DC-sputtered films.
Institute for Materials Science-Multicomponent Materials, Faculty of Engineering, Christian-Albrechts-University of Kiel, Kaiserstraße 2, D-24143 Kiel, Germany.
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B
Gojdka
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V
Hrkac
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T
Strunskus
V
V
Zaporojtchenko
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L
Kienle
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Faupel