Localized joule heating as a mask-free technique for the local synthesis of ZnO nanowires on silicon nanodevices.
We report a mask-free technique for the local synthesis of ZnO nanowires (NWs) on polysilicon nanobelts and polysilicon NW devices. First, we used localized joule heating to generate a poly(methyl methacrylate) (PMMA) nanotemplate, allowing the rapid and self-aligned ablation of PMMA within a short period of time (ca. 5 μs). Next, we used ion-beam sputtering to prepare an ultrathin Au film and a ZnO seed layer; a subsequent lift-off process left the seed layers selectively within the PMMA nanotemplate. Gold nanoparticles and ZnO NWs were formed selectively in the localized joule heating region.
Institute of Nanotechnology/Materials Science and Engineering, National Chiao Tung University, 1001 Ta-Hsueh Road, Hsinchu 30050, Taiwan.
C C
CC
Chen
Y S
YS
Lin
C H
CH
Sang
J-T
JT
Sheu
D003460:Crystallization / Q000379:methods*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D006361:Heating / Q000379:methods*; D008422:Materials Testing; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods*; D010316:Particle Size; D012825:Silicon / Q000737:chemistry*; D014025:Titanium / Q000737:chemistry*; D015034:Zinc Oxide / Q000737:chemistry*
C009495:titanium dioxide; D014025:Titanium; D015034:Zinc Oxide; D012825:Silicon