title: Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing.
authors: School of Mechanical Engineering, Yonsei University, Seoul, Republic of Korea.
authors: Youngkee
authors: Y
authors: Eun
authors: Jae-Ik
authors: JI
authors: Lee
authors: Jungwook
authors: J
authors: Choi
authors: Youngsup
authors: Y
authors: Song
authors: Jongbaeg
authors: J
authors: Kim
mesh_terms: D000269:Adhesives / Q000737:chemistry*; D004566:Electrodes; D006358:Hot Temperature; D037742:Nanotubes, Carbon / Q000737:chemistry*; D012825:Silicon / Q000737:chemistry*
chemical_list: D000269:Adhesives; D037742:Nanotubes, Carbon; D012825:Silicon