title: Formation of SiC nanoparticles in an atmospheric microwave plasma.
abstract: We describe the formation of SiC nanopowder using an atmospheric argon microwave plasma with tetramethylsilane (TMS) as precursor. The impact of several process conditions on the particle size of the product is experimentally investigated. Particles with sizes ranging from 7 nm to about 20 nm according to BET and XRD measurements are produced. The dependency of the particle size on the process parameters is evaluated statistically and explained with growth-rate equations derived from the theory of Ostwald ripening. The results show that the particle size is mainly influenced by the concentration of the precursor material in the plasma.
authors: TU Dresden, Faculty of Science, Department of Chemistry and Food Chemistry, 01062 Dresden, Germany.
authors: Martin
authors: M
authors: Vennekamp
authors: Ingolf
authors: I
authors: Bauer
authors: Matthias
authors: M
authors: Groh
authors: Evgeni
authors: E
authors: Sperling
authors: Susanne
authors: S
authors: Ueberlein
authors: Maksym
authors: M
authors: Myndyk
authors: Gerrit
authors: G
authors: Mäder
authors: Stefan
authors: S
authors: Kaskel