title: Fabrication of layered nanostructures by successive electron beam induced deposition with two precursors: protective capping of metallic iron structures.
abstract: We report on the stepwise generation of layered nanostructures via electron beam induced deposition (EBID) using organometallic precursor molecules in ultra-high vacuum (UHV). In a first step a metallic iron line structure was produced using iron pentacarbonyl; in a second step this nanostructure was then locally capped with a 2-3 nm thin titanium oxide-containing film fabricated from titanium tetraisopropoxide. The chemical composition of the deposited layers was analyzed by spatially resolved Auger electron spectroscopy. With spatially resolved x-ray absorption spectroscopy at the Fe L₃ edge, it was demonstrated that the thin capping layer prevents the iron structure from oxidation upon exposure to air.
authors: Lehrstuhl für Physikalische Chemie II, Universität Erlangen-Nürnberg, Egerlandstraße 3, D-91058 Erlangen, Germany.
authors: M
authors: M
authors: Schirmer
authors: M-M
authors: MM
authors: Walz
authors: C
authors: C
authors: Papp
authors: F
authors: F
authors: Kronast
authors: A X
authors: AX
authors: Gray
authors: B
authors: B
authors: Balke
authors: S
authors: S
authors: Cramm
authors: C S
authors: CS
authors: Fadley
authors: H-P
authors: HP
authors: Steinrück
authors: H
authors: H
authors: Marbach