title: Laser direct writing of rotationally symmetric high-resolution structures.
abstract: We present a laser direct writing system for the efficient fabrication of high-resolution axicon structures. The setup makes use of scanning beam interference lithography incorporated with a fringe locking scheme for tight fringe phase control and allows us to fabricate large area structures with a period down to 450 nm.
authors.affiliation: Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany. haefner@ito.uni‐stuttgart.de
authors.forename: Matthias
authors.initials: M
authors.lastname: Haefner
authors.forename: Christof
authors.initials: C
authors.lastname: Pruss
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Osten