title: All-silica nanofluidic devices for DNA-analysis fabricated by imprint of sol-gel silica with silicon stamp.
abstract: We present a simple and cheap method for fabrication of silica nanofluidic devices for single-molecule studies. By imprinting sol-gel materials with a multi-level stamp comprising micro- and nanofeatures, channels of different depth are produced in a single process step. Calcination of the imprinted hybrid sol-gel material produces purely inorganic silica, which has very low autofluorescence and can be fusion bonded to a glass lid. Compared to top-down processing of fused silica or silicon substrates, imprint of sol-gel silica enables fabrication of high-quality nanofluidic devices without expensive high-vacuum lithography and etching techniques. The applicability of the fabricated device for single-molecule studies is demonstrated by measuring the extension of DNA molecules of different lengths confined in the nanochannels.
authors.affiliation: DTU Nanotech, Technical University of Denmark, DK-2800, Kongens Lyngby, Denmark.
authors.forename: Morten Bo
authors.initials: MB
authors.lastname: Mikkelsen
authors.forename: Alban A
authors.initials: AA
authors.lastname: Letailleur
authors.forename: Elin
authors.initials: E
authors.lastname: Søndergård
authors.forename: Etienne
authors.initials: E
authors.lastname: Barthel
authors.forename: Jérémie
authors.initials: J
authors.lastname: Teisseire
authors.forename: Rodolphe
authors.initials: R
authors.lastname: Marie
authors.forename: Anders
authors.initials: A
authors.lastname: Kristensen
mesh_terms: D004247:DNA / Q000032:analysis*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D054802:Molecular Imprinting; D036103:Nanotechnology / Q000295:instrumentation*; D058428:Silica Gel / Q000737:chemistry*; D012825:Silicon / Q000737:chemistry*; D013696:Temperature
chemical_list: D058428:Silica Gel; D004247:DNA; D012825:Silicon