title: High-resolution quantitative phase microscopic imaging in deep UV with phase retrieval.
abstract: High-resolution three-dimensional (3D) microscopic imaging requires the use of short wavelengths. Quantitative 3D imaging techniques, such as digital holographic microscopy, require interference between the object beam and a known reference background for the extraction of phase information. At shorter wavelengths, due to short coherence lengths, it may be difficult to implement a two-beam off-axis setup. Thus, a single-beam technique, which provides complete phase information, may be better suited for short wavelengths. This Letter describes the development of a quantitative microscopy technique at 193 nm using multiple intensity samplings and phase retrieval.
authors.affiliation: Applied Physics Department, Faculty of Technology & Engineering, MS University of Baroda, Vadodara, India. arun_nair_in@yahoo.com
authors.forename: Arun
authors.initials: A
authors.lastname: Anand
authors.forename: Ahmad
authors.initials: A
authors.lastname: Faridian
authors.forename: Vani
authors.initials: V
authors.lastname: Chhaniwal
authors.forename: Giancarlo
authors.initials: G
authors.lastname: Pedrini
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Osten
authors.forename: Bahram
authors.initials: B
authors.lastname: Javidi
mesh_terms: D021621:Imaging, Three-Dimensional / Q000379:methods*; D008853:Microscopy / Q000379:methods*; D014466:Ultraviolet Rays