title: A calibrator based on the use of low-coherent light source straightness interferometer and compensation method.
abstract: A calibrator utilizing a low-coherent light source straightness interferometer and a compensation method is introduced for straightness measurements in this paper. Where the interference pattern, which is modulated by an envelope function, generated by the interferometer undergoes a shifting as the Wolaston prism of the interferometer experiences a lateral displacement, and the compensation method senses the displacement by driving the prism back to the position to restore the pattern. A setup, which is with a measurement sensitivity of 36.6°/μm, constructed for realizing the calibrator is demonstrated. The experimental results from the uses of the setup reveal that the setup is with a measurement resolution and stability of 0.019 and 0.08 μm, respectively, validate the calibrator, and confirm the calibrator's applicability of straightness measurements and advantage of extensible working distance.
authors: Department of Electro-optical Engineering, National Taipei University of Technology, 1, Sec.3, Chung-Hsiao East Road, Taipei 10608, Taiwan. f10402@ntut.edu.tw
authors: Shyh-Tsong
authors: ST
authors: Lin
authors: Sheng-Lih
authors: SL
authors: Yeh
authors: Chi-Shang
authors: CS
authors: Chiu
authors: Mou-Shan
authors: MS
authors: Huang