title: Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy.
abstract: Using a simple two step fabrication process substrates with a large and uniform Raman enhancement, based on flexible free standing nanopillars can be manufactured over large areas using readily available silicon processing equipment.
authors: Technical University of Denmark, Department of Micro- and Nanotechnology, Ørsteds Plads, Kgs. Lyngby, Denmark. Michael.schmidt@nanotech.dtu.dk
authors: Michael Stenbaek
authors: MS
authors: Schmidt
authors: Jörg
authors: J
authors: Hübner
authors: Anja
authors: A
authors: Boisen
mesh_terms: D049329:Nanostructures / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods*; D012825:Silicon / Q000737:chemistry*; D013059:Spectrum Analysis, Raman; D013499:Surface Properties
chemical_list: D012825:Silicon