title: Electroplated CoPt magnets for actuation of stiff cantilevers.
abstract: A cantilever has been microfabricated for use in non-contact Atomic Force Microscopy (AFM) using a very thick magnetic film to actuate the cantilever motion. The thick magnetic block is deposited electrochemically over a defined area of the cantilever. This cantilever is particularly suitable for driving stiff AFM cantilevers in a liquid environment. Clean mechanical resonances are easily observed. Examples are given of a hard (CoPt) magnet of dimension 29 × 21 × 6 μm(3) electroplated on Silicon cantilevers of stiffness ~22 N/m, giving a static displacement of ~0.2 nm in an applied field of 10(-3) T.
authors: Institute of Materials Research and Engineering, Agency for Science Technology and Research (A∗STAR), 3 Research Link, 117602, Singapore.
authors: Y C
authors: YC
authors: Loke
authors: W
authors: W
authors: Hofbauer
authors: P
authors: P
authors: Lu
authors: K
authors: K
authors: Ansari
authors: X S
authors: XS
authors: Tang
authors: S J
authors: SJ
authors: O'Shea