title: Thermal stability of Mg/Co multilayer with B4C, Mo or Zr diffusion barrier layers.
abstract: The efficiency of B(4)C, Mo and Zr barrier layers to improve thermal stability of Mg/Co multilayer up to 400 °C is investigated. Multilayers were deposited by direct current magnetron sputtering and characterized using X-ray and extreme ultraviolet reflection. The results suggest that B(4)C barrier layer is not effective due to drastic diffusion at Mg-B(4)C interface. Although introducing Mo barriers improves the thermal stability from 200 to 300 °C, it increases the interface roughness and thus degrades the optical performances. On the contrary, Zr barriers can significantly increase the thermal stability of Mg/Co up to 400 °C without optical performance degradation. Thus, Mg/Zr/Co/Zr is suitable for EUV applications requiring both optimal optical performances and heat resistance.
authors: Department Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092, China.
authors: Jingtao
authors: J
authors: Zhu
authors: Sika
authors: S
authors: Zhou
authors: Haochuan
authors: H
authors: Li
authors: Zhanshan
authors: Z
authors: Wang
authors: Philippe
authors: P
authors: Jonnard
authors: Karine
authors: K
authors: Le Guen
authors: Min-Hui
authors: MH
authors: Hu
authors: Jean-Michel
authors: JM
authors: André
authors: Hongjun
authors: H
authors: Zhou
authors: Tonglin
authors: T
authors: Huo