title: Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high harmonic source.
abstract: New diffractive imaging techniques using coherent x-ray beams have made possible nanometer-scale resolution imaging by replacing the optics in a microscope with an iterative phase retrieval algorithm. However, to date very high resolution imaging (< 40 nm) was limited to large-scale synchrotron facilities. Here, we present a significant advance in image resolution and capabilities for desktop soft x-ray microscopes that will enable widespread applications in nanoscience and nanotechnology. Using 13 nm high harmonic beams, we demonstrate a record 22 nm spatial resolution for any tabletop x-ray microscope. Finally, we show that unique information about the sample can be obtained by extracting 3-D information at very high numerical apertures.
authors: JILA, University of Colorado, Boulder, Colorado 80309-0440, USA. matthew.seaberg@colorado.edu
authors: Matthew D
authors: MD
authors: Seaberg
authors: Daniel E
authors: DE
authors: Adams
authors: Ethan L
authors: EL
authors: Townsend
authors: Daisy A
authors: DA
authors: Raymondson
authors: William F
authors: WF
authors: Schlotter
authors: Yanwei
authors: Y
authors: Liu
authors: Carmen S
authors: CS
authors: Menoni
authors: Lu
authors: L
authors: Rong
authors: Chien-Chun
authors: CC
authors: Chen
authors: Jianwei
authors: J
authors: Miao
authors: Henry C
authors: HC
authors: Kapteyn
authors: Margaret M
authors: MM
authors: Murnane