title: Structural, optical and electrical properties of nitrogen ion implanted ZnO nanorods.
abstract: This study examined the micro-structural and electrical properties of N+-ion-implanted ZnO nanorods. Nitrogen ions with energies of 10-90 keV and beam fluxes of 10(13)-10(16) ions/cm2 were implanted on vertically-aligned ZnO nanorods. Energy dispersive X-ray spectroscopy measurements showed that N+ ions were spread uniformly over the nanorods. Extended X-ray absorption fine structure measurements revealed that the implanted N+s had partially substituted for the oxygen sites. Photoluminescence measurements showed a neutral-donor bound exciton peak at 3.36 eV and a two-electron-satellite peak at 3.33 eV independent of the ion energy and flux. The I-V characteristic curves showed that the current density was not changed by the N+ ion energy and flux much. These results strongly suggested that the N ions substituted for the oxygen sites were neutral.
authors: Department of Materials Science and Engineering, Pohang University of Science and Technology, Pohang 790-784, Korea.
authors: C-H
authors: CH
authors: Kwak
authors: Y-B
authors: YB
authors: Lee
authors: S-Y
authors: SY
authors: Seo
authors: S-H
authors: SH
authors: Kim
authors: C-I
authors: CI
authors: Park
authors: B-H
authors: BH
authors: Kim
authors: Zhenlan
authors: Z
authors: Jin
authors: S-W
authors: SW
authors: Han