title: Scanning photoelectron microscope for nanoscale three-dimensional spatial-resolved electron spectroscopy for chemical analysis.
abstract: In order to achieve nondestructive observation of the three-dimensional spatially resolved electronic structure of solids, we have developed a scanning photoelectron microscope system with the capability of depth profiling in electron spectroscopy for chemical analysis (ESCA). We call this system 3D nano-ESCA. For focusing the x-ray, a Fresnel zone plate with a diameter of 200 μm and an outermost zone width of 35 nm is used. In order to obtain the angular dependence of the photoelectron spectra for the depth-profile analysis without rotating the sample, we adopted a modified VG Scienta R3000 analyzer with an acceptance angle of 60° as a high-resolution angle-resolved electron spectrometer. The system has been installed at the University-of-Tokyo Materials Science Outstation beamline, BL07LSU, at SPring-8. From the results of the line-scan profiles of the poly-Si/high-k gate patterns, we achieved a total spatial resolution better than 70 nm. The capability of our system for pinpoint depth-profile analysis and high-resolution chemical state analysis is demonstrated.
authors: Department of Applied Chemistry, The University of Tokyo, Tokyo 113-8656, Japan. horiba@sr.t.u-tokyo.ac.jp
authors: K
authors: K
authors: Horiba
authors: Y
authors: Y
authors: Nakamura
authors: N
authors: N
authors: Nagamura
authors: S
authors: S
authors: Toyoda
authors: H
authors: H
authors: Kumigashira
authors: M
authors: M
authors: Oshima
authors: K
authors: K
authors: Amemiya
authors: Y
authors: Y
authors: Senba
authors: H
authors: H
authors: Ohashi
mesh_terms: D004583:Electrons; D008855:Microscopy, Electron, Scanning / Q000295:instrumentation*; D036103:Nanotechnology / Q000295:instrumentation*; D013057:Spectrum Analysis / Q000295:instrumentation*