title: Integrated LTCC pressure/flow/temperature multisensor for compressed air diagnostics.
abstract: We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be soldered onto an integrated electro-fluidic platform by using standard surface mount device (SMD) technology, e.g., as a standard electronic component would be on a printed circuit board, obviating the need for both wires and tubes and thus paving the road towards low-cost integrated electro-fluidic systems. Several performance aspects of this device are presented and discussed, together with electronics design issues.
authors.affiliation: Laboratoire de Production Microtechnique (LPM), École Polytechnique Fédérale de Lausanne (EPFL), Station 17, CH-1015 Lausanne, Switzerland. yannick.fournier@a3.epfl.ch
authors.forename: Yannick
authors.initials: Y
authors.lastname: Fournier
authors.forename: Thomas
authors.initials: T
authors.lastname: Maeder
authors.forename: Grégoire
authors.initials: G
authors.lastname: Boutinard-Rouelle
authors.forename: Aurélie
authors.initials: A
authors.lastname: Barras
authors.forename: Nicolas
authors.initials: N
authors.lastname: Craquelin
authors.forename: Peter
authors.initials: P
authors.lastname: Ryser
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods; D002516:Ceramics / Q000737:chemistry; D003080:Cold Temperature; D058868:Compressed Air; D004581:Electronics / Q000295:instrumentation*; D004867:Equipment Design / Q000379:methods; D006801:Humans; D057446:Hydrodynamics; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods; D008954:Models, Biological; D011312:Pressure; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation; D013696:Temperature