title: A single-walled carbon nanotube network gas sensing device.
abstract: The goal of this research was to develop a chemical gas sensing device based on single-walled carbon nanotube (SWCNT) networks. The SWCNT networks are synthesized on Al(2)O(3)-deposted SiO(2)/Si substrates with 10 nm-thick Fe as the catalyst precursor layer using microwave plasma chemical vapor deposition (MPCVD). The development of interconnected SWCNT networks can be exploited to recognize the identities of different chemical gases by the strength of their particular surface adsorptive and desorptive responses to various types of chemical vapors. The physical responses on the surface of the SWCNT networks cause superficial changes in the electric charge that can be converted into electronic signals for identification. In this study, we tested NO(2) and NH(3) vapors at ppm levels at room temperature with our self-made gas sensing device, which was able to obtain responses to sensitivity changes with a concentration of 10 ppm for NO(2) and 24 ppm for NH(3).
authors.affiliation: Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30013, Taiwan. rubsico@ms28.hinet.net
authors.forename: Li-Chun
authors.initials: LC
authors.lastname: Wang
authors.forename: Kea-Tiong
authors.initials: KT
authors.lastname: Tang
authors.forename: I-Ju
authors.initials: IJ
authors.lastname: Teng
authors.forename: Cheng-Tzu
authors.initials: CT
authors.lastname: Kuo
authors.forename: Cheng-Long
authors.initials: CL
authors.lastname: Ho
authors.forename: Han-Wen
authors.initials: HW
authors.lastname: Kuo
authors.forename: Tseng-Hsiung
authors.initials: TH
authors.lastname: Su
authors.forename: Shang-Ren
authors.initials: SR
authors.lastname: Yang
authors.forename: Gia-Nan
authors.initials: GN
authors.lastname: Shi
authors.forename: Chang-Ping
authors.initials: CP
authors.lastname: Chang
mesh_terms: D000042:Absorption; D000537:Aluminum Oxide / Q000737:chemistry; D000641:Ammonia / Q000737:chemistry; D004566:Electrodes; D004867:Equipment Design; D005740:Gases; D008670:Metals; D008855:Microscopy, Electron, Scanning / Q000379:methods; D046529:Microscopy, Electron, Transmission / Q000379:methods; D036103:Nanotechnology / Q000379:methods*; D037742:Nanotubes, Carbon / Q000737:chemistry; D009585:Nitrogen Dioxide / Q000737:chemistry; D010825:Physics / Q000379:methods; D012666:Semiconductors; D012822:Silicon Dioxide / Q000737:chemistry; D013059:Spectrum Analysis, Raman / Q000379:methods
chemical_list: D005740:Gases; D008670:Metals; D037742:Nanotubes, Carbon; D012822:Silicon Dioxide; D000641:Ammonia; D000537:Aluminum Oxide; D009585:Nitrogen Dioxide