title: Rolled-up tubes and cantilevers by releasing SrRuO3-Pr0.7Ca0.3MnO3 nanomembranes.
abstract: Three-dimensional micro-objects are fabricated by the controlled release of inherently strained SrRuO3/Pr0.7Ca0.3MnO3/SrRuO3 nanometer-sized trilayers from SrTiO3(001) substrates. Freestanding cantilevers and rolled-up microtubes with a diameter of 6 to 8 μm are demonstrated. The etching behavior of the SrRuO3 film is investigated, and a selectivity of 1:9,100 with respect to the SrTiO3 substrate is found. The initial and final strain states of the rolled-up oxide layers are studied by X-ray diffraction on an ensemble of tubes. Relaxation of the sandwiched Pr0.7Ca0.3MnO3 layer towards its bulk lattice parameter is observed as the major driving force for the roll-up of the trilayers. Finally, μ-diffraction experiments reveal that a single object can represent the ensemble proving a good homogeneity of the rolled-up tubes.PACS: 81.07.-b; 68.60.-p; 68.37.Lp; 81.16.Dn.
authors.affiliation: Laboratorio Nacional de Nanotecnologia, Rua Giuseppe Máximo Scolfaro 10000, Campinas, São Paulo, 13083-100, Brazil. christoph.deneke@lnls.br.
authors.forename: Christoph
authors.initials: C
authors.lastname: Deneke
authors.forename: Elisabeth
authors.initials: E
authors.lastname: Wild
authors.forename: Ksenia
authors.initials: K
authors.lastname: Boldyreva
authors.forename: Stefan
authors.initials: S
authors.lastname: Baunack
authors.forename: Peter
authors.initials: P
authors.lastname: Cendula
authors.forename: Ingolf
authors.initials: I
authors.lastname: Mönch
authors.forename: Markus
authors.initials: M
authors.lastname: Simon
authors.forename: Angelo
authors.initials: A
authors.lastname: Malachias
authors.forename: Kathrin
authors.initials: K
authors.lastname: Dörr
authors.forename: Oliver G
authors.initials: OG
authors.lastname: Schmidt