title: A tunable strain sensor using nanogranular metals.
abstract: This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements are prepared by the maskless lithography technique of focused electron-beam-induced deposition (FEBID) employing the precursor trimethylmethylcyclopentadienyl platinum [MeCpPt(Me)(3)]. We use a cantilever-based deflection technique to determine the sensitivity (gauge factor) of the sensor element. We find that its sensitivity depends on the electrical conductivity and can be continuously tuned, either by the thickness of the deposit or by electron-beam irradiation leading to a distinct maximum in the sensitivity. This maximum finds a theoretical rationale in recent advances in the understanding of electronic charge transport in nano-granular metals.
authors.affiliation: Physikalisches Institut, Goethe Universität, Max-von-Laue-Str 1, 60438 Frankfurt am Main, Germany. schwalb@em.uni-frankfurt.de
authors.forename: Christian H
authors.initials: CH
authors.lastname: Schwalb
authors.forename: Christina
authors.initials: C
authors.lastname: Grimm
authors.forename: Markus
authors.initials: M
authors.lastname: Baranowski
authors.forename: Roland
authors.initials: R
authors.lastname: Sachser
authors.forename: Fabrizio
authors.initials: F
authors.lastname: Porrati
authors.forename: Heiko
authors.initials: H
authors.lastname: Reith
authors.forename: Pintu
authors.initials: P
authors.lastname: Das
authors.forename: Jens
authors.initials: J
authors.lastname: Müller
authors.forename: Friedemann
authors.initials: F
authors.lastname: Völklein
authors.forename: Alexander
authors.initials: A
authors.lastname: Kaya
authors.forename: Michael
authors.initials: M
authors.lastname: Huth
mesh_terms: D053768:Metal Nanoparticles / Q000737:chemistry*; D055617:Micro-Electrical-Mechanical Systems / Q000379:methods; D036103:Nanotechnology / Q000379:methods*