title: Micro cantilever movement detection with an amorphous silicon array of position sensitive detectors.
abstract: The movement of a micro cantilever was detected via a self constructed portable data acquisition prototype system which integrates a linear array of 32 1D amorphous silicon position sensitive detectors (PSD). The system was mounted on a microscope using a metal structure platform and the movement of the 30 μm wide by 400 μm long cantilever was tracked by analyzing the signals acquired by the 32 sensor array electronic readout system and the relevant data algorithm. The obtained results show a linear behavior of the photocurrent relating X and Y movement, with a non-linearity of about 3%, a spatial resolution of less than 2 μm along the lateral dimension of the sensor as well as of less than 3 μm along the perpendicular dimension of the sensor, when detecting just the micro-cantilever, and a spatial resolution of less than 1 μm when detecting the holding structure.
authors.affiliation: CENIMAT, Department of Materials Science, Faculty of Science and Technology of New University of Lisbon and CEMOP/UNINOVA, Campus da Caparica, 2928-516 Caparica, Portugal. ja@uninova.pt
authors.forename: Javier
authors.initials: J
authors.lastname: Contreras
authors.forename: Daniel
authors.initials: D
authors.lastname: Costa
authors.forename: Sonia
authors.initials: S
authors.lastname: Pereira
authors.forename: Elvira
authors.initials: E
authors.lastname: Fortunato
authors.forename: Rodrigo
authors.initials: R
authors.lastname: Martins
authors.forename: Rafal
authors.initials: R
authors.lastname: Wierzbicki
authors.forename: Holger
authors.initials: H
authors.lastname: Heerlein
authors.forename: Isabel
authors.initials: I
authors.lastname: Ferreira
mesh_terms: D004867:Equipment Design; D008853:Microscopy / Q000295:instrumentation*; D012666:Semiconductors / Q000295:instrumentation*; D012815:Signal Processing, Computer-Assisted; D012825:Silicon / Q000737:chemistry*
chemical_list: D012825:Silicon