title: SnO2/Pt thin film laser ablated gas sensor array.
abstract: A gas sensor array was developed in a 10 × 10 mm(2) space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO(2) and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O(2). A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times.
authors.affiliation: Electrical and Electronic Department, Engineering Faculty, Universiti Putra Malaysia 43400, Serdang, Selangor, Malaysia. mhshahrokh@gmail.com
authors.forename: Mohammad Hadi
authors.initials: MH
authors.lastname: Shahrokh Abadi
authors.forename: Mohd Nizar
authors.initials: MN
authors.lastname: Hamidon
authors.forename: Abdul Halim
authors.initials: AH
authors.lastname: Shaari
authors.forename: Norhafizah
authors.initials: N
authors.lastname: Abdullah
authors.forename: Rahman
authors.initials: R
authors.lastname: Wagiran
mesh_terms: D004563:Electrochemistry / Q000379:methods; D004566:Electrodes; D004867:Equipment Design; D005740:Gases; D007834:Lasers; D008422:Materials Testing; D018625:Microscopy, Atomic Force / Q000379:methods; D008855:Microscopy, Electron, Scanning / Q000379:methods; D010984:Platinum / Q000737:chemistry; D013696:Temperature; D017971:Tin Compounds / Q000737:chemistry*; D014961:X-Ray Diffraction
chemical_list: D005740:Gases; D017971:Tin Compounds; D010984:Platinum; C045358:stannic oxide