title: Highly mass-sensitive thin film plate acoustic resonators (FPAR).
abstract: The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequently coated with hexamethyl-disiloxane(HMDSO)-plasma-polymerized thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented. FPARs demonstrate high mass-loading sensitivity as well as good tolerance towards the HMDSO viscous losses. Initial measurements in gas phase environment are further presented.
authors.affiliation: Department of Solid State Electronics, Uppsala University, 751 21 Uppsala, Sweden. liar@angstrom.uu.se
authors.forename: Lilia
authors.initials: L
authors.lastname: Arapan
authors.forename: Gergana
authors.initials: G
authors.lastname: Alexieva
authors.forename: Ivan D
authors.initials: ID
authors.lastname: Avramov
authors.forename: Ekaterina
authors.initials: E
authors.lastname: Radeva
authors.forename: Vesseline
authors.initials: V
authors.lastname: Strashilov
authors.forename: Ilia
authors.initials: I
authors.lastname: Katardjiev
authors.forename: Ventsislav
authors.initials: V
authors.lastname: Yantchev