title: Advances in top-down and bottom-up surface nanofabrication: techniques, applications & future prospects.
abstract: This review highlights the most significant advances of the nanofabrication techniques reported over the past decade with a particular focus on the approaches tailored towards the fabrication of functional nano-devices. The review is divided into two sections: top-down and bottom-up nanofabrication. Under the classification of top-down, special attention is given to technical reports that demonstrate multi-directional patterning capabilities less than or equal to 100 nm. These include recent advances in lithographic techniques, such as optical, electron beam, soft, nanoimprint, scanning probe, and block copolymer lithography. Bottom-up nanofabrication techniques--such as, atomic layer deposition, sol-gel nanofabrication, molecular self-assembly, vapor-phase deposition and DNA-scaffolding for nanoelectronics--are also discussed. Specifically, we describe advances in the fabrication of functional nanocomposites and graphene using chemical and physical vapor deposition. Our aim is to provide a comprehensive platform for prominent nanofabrication tools and techniques in order to facilitate the development of new or hybrid nanofabrication techniques leading to novel and efficient functional nanostructured devices.
authors.affiliation: Center for Nano Science and Technology (NDnano), Department of Electrical Engineering, University of Notre Dame, Notre Dame, IN 46556, USA. abiswas@nd.edu
authors.forename: Abhijit
authors.initials: A
authors.lastname: Biswas
authors.forename: Ilker S
authors.initials: IS
authors.lastname: Bayer
authors.forename: Alexandru S
authors.initials: AS
authors.lastname: Biris
authors.forename: Tao
authors.initials: T
authors.lastname: Wang
authors.forename: Enkeleda
authors.initials: E
authors.lastname: Dervishi
authors.forename: Franz
authors.initials: F
authors.lastname: Faupel
mesh_terms: D004247:DNA / Q000737:chemistry; D004581:Electronics / Q000295:instrumentation; D005544:Forecasting; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D015394:Molecular Structure; D049329:Nanostructures / Q000737:chemistry*; D036103:Nanotechnology / Q000379:methods*; D044367:Phase Transition; D010777:Photochemistry; D011108:Polymers; D011327:Printing / Q000379:methods*; D013499:Surface Properties
chemical_list: D011108:Polymers; D004247:DNA