title: A compact vertical scanner for atomic force microscopes.
abstract: A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner's performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.
authors.affiliation: NEMS and Bio Team, National Nano-fab Center, 335, Gwahangno, Yuseong-gu, Daejeon-si, 305-806, Korea. jhpark@nnfc.re.kr
authors.forename: Jae Hong
authors.initials: JH
authors.lastname: Park
authors.forename: Jaesool
authors.initials: J
authors.lastname: Shim
authors.forename: Dong-Yeon
authors.initials: DY
authors.lastname: Lee
mesh_terms: D002138:Calibration; D004738:Engineering / Q000379:methods; D004867:Equipment Design; D020342:Finite Element Analysis; D018625:Microscopy, Atomic Force / Q000295:instrumentation* / Q000379:methods* / Q000592:standards; D008954:Models, Biological; D008962:Models, Theoretical; D011846:Radio Waves; D014732:Vibration