title: Combined simulation of a micro permanent magnetic linear contactless displacement sensor.
abstract: The permanent magnetic linear contactless displacement (PLCD) sensor is a new type of displacement sensor operating on the magnetic inductive principle. It has many excellent properties and has already been used for many applications. In this article a Micro-PLCD sensor which can be used for microelectromechanical system (MEMS) measurements is designed and simulated with the CST EM STUDIO(®) software, including building a virtual model, magnetostatic calculations, low frequency calculations, steady current calculations and thermal calculations. The influence of some important parameters such as air gap dimension, working frequency, coil current and eddy currents etc. is studied in depth.
authors.affiliation: Graduate School Computational Engineering, TU Darmstadt, Dolivostraße 15, D-64293 Darmstadt Germany. gao@gsc.tu-darmstadt.de
authors.forename: Jing
authors.initials: J
authors.lastname: Gao
authors.forename: Wolfgang F O
authors.initials: WF
authors.lastname: Müller
authors.forename: Felix
authors.initials: F
authors.lastname: Greiner
authors.forename: Dirk
authors.initials: D
authors.lastname: Eicher
authors.forename: Thomas
authors.initials: T
authors.lastname: Weiland
authors.forename: Helmut F
authors.initials: HF
authors.lastname: Schlaak
mesh_terms: D003198:Computer Simulation; D004574:Electromagnetic Fields; D004867:Equipment Design; D008280:Magnetics / Q000295:instrumentation* / Q000379:methods*; D055617:Micro-Electrical-Mechanical Systems; D055616:Microtechnology / Q000295:instrumentation*; D008962:Models, Theoretical