title: A standard CMOS humidity sensor without post-processing.
abstract: A 2 μW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Intervia Photodielectric 8023-10 humidity-sensitive layer, and a CMOS capacitance to voltage converter.
authors.affiliation: Maenaka Human-sensing Fusion Project, Himeji-shi, Hyogo-ken, Japan. oleg@eratokm.jp
authors.forename: Oleg
authors.initials: O
authors.lastname: Nizhnik
authors.forename: Kohei
authors.initials: K
authors.lastname: Higuchi
authors.forename: Kazusuke
authors.initials: K
authors.lastname: Maenaka
mesh_terms: D011211:Electric Power Supplies; D004563:Electrochemistry / Q000379:methods; D004566:Electrodes; D004867:Equipment Design; D006813:Humidity; D055617:Micro-Electrical-Mechanical Systems / Q000379:methods; D008838:Microcomputers; D011108:Polymers / Q000737:chemistry; D011758:Pyrroles / Q000737:chemistry; D015203:Reproducibility of Results; D012984:Software; D013696:Temperature
chemical_list: D011108:Polymers; D011758:Pyrroles