title: Two-scale simulation of drop-induced failure of polysilicon MEMS sensors.
abstract: In this paper, an industrially-oriented two-scale approach is provided to model the drop-induced brittle failure of polysilicon MEMS sensors. The two length-scales here investigated are the package (macroscopic) and the sensor (mesoscopic) ones. Issues related to the polysilicon morphology at the micro-scale are disregarded; an upscaled homogenized constitutive law, able to describe the brittle cracking of silicon, is instead adopted at the meso-scale. The two-scale approach is validated against full three-scale Monte-Carlo simulations, which allow for stochastic effects linked to the microstructural properties of polysilicon. Focusing on inertial MEMS sensors exposed to drops, it is shown that the offered approach matches well the experimentally observed failure mechanisms.
authors.affiliation: Dipartimento di Ingegneria Strutturale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy. stefano.mariani@polimi.it
authors.forename: Stefano
authors.initials: S
authors.lastname: Mariani
authors.forename: Aldo
authors.initials: A
authors.lastname: Ghisi
authors.forename: Alberto
authors.initials: A
authors.lastname: Corigliano
authors.forename: Roberto
authors.initials: R
authors.lastname: Martini
authors.forename: Barbara
authors.initials: B
authors.lastname: Simoni
mesh_terms: D004867:Equipment Design; D020342:Finite Element Analysis; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation* / Q000379:methods; D009010:Monte Carlo Method; D012825:Silicon / Q000737:chemistry*
chemical_list: D012825:Silicon