title: Density doubling of block copolymer templated features.
abstract: Block copolymers can be used to template large arrays of nanopatterns with periodicities equal to the characteristic spacing of the polymer. Here we demonstrate a technique capitalizing on the multilayered arrangement of cylindrical domains to effectively double the pattern density templated by a given polymer. By controlling the initial thickness of the film and the solvent annealing conditions, it was possible to reproducibly create density doubled lines by swelling the film with solvent until bilayers of horizontal cylinders were obtained. This process was also demonstrated to be compatible with graphoepitaxy.
authors.affiliation: National Institute for Nanotechnology (NINT), National Research Council, 11421 Saskatchewan Drive, Edmonton, Alberta T6G 2M9, Canada.
authors.forename: Nathanael L Y
authors.initials: NL
authors.lastname: Wu
authors.forename: Xiaojiang
authors.initials: X
authors.lastname: Zhang
authors.forename: Jeffrey N
authors.initials: JN
authors.lastname: Murphy
authors.forename: Jinan
authors.initials: J
authors.lastname: Chai
authors.forename: Kenneth D
authors.initials: KD
authors.lastname: Harris
authors.forename: Jillian M
authors.initials: JM
authors.lastname: Buriak
mesh_terms: D003460:Crystallization / Q000379:methods*; D046911:Macromolecular Substances / Q000737:chemistry; D008422:Materials Testing; D008968:Molecular Conformation; D054802:Molecular Imprinting / Q000379:methods*; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D011108:Polymers / Q000737:chemistry*; D013046:Specific Gravity; D013499:Surface Properties
chemical_list: D046911:Macromolecular Substances; D011108:Polymers