title: Surface nanoscale axial photonics: robust fabrication of high-quality-factor microresonators.
abstract: Recently introduced surface nanoscale axial photonics (SNAP) makes it possible to fabricate high-Q-factor microresonators and other photonic microdevices by dramatically small deformation of the optical fiber surface. To become a practical and robust technology, the SNAP platform requires methods enabling reproducible modification of the optical fiber radius at nanoscale. In this Letter, we demonstrate superaccurate fabrication of high-Q-factor microresonators by nanoscale modification of the optical fiber radius and refractive index using CO2 laser and UV excimer laser beam exposures. The achieved fabrication accuracy is better than 2 Å in variation of the effective fiber radius.
authors.affiliation: OFS Laboratories, Somerset, New Jersey 08873, USA. sumetski@ofsoptics.com
authors.forename: M
authors.initials: M
authors.lastname: Sumetsky
authors.forename: D J
authors.initials: DJ
authors.lastname: DiGiovanni
authors.forename: Y
authors.initials: Y
authors.lastname: Dulashko
authors.forename: J M
authors.initials: JM
authors.lastname: Fini
authors.forename: X
authors.initials: X
authors.lastname: Liu
authors.forename: E M
authors.initials: EM
authors.lastname: Monberg
authors.forename: T F
authors.initials: TF
authors.lastname: Taunay