title: Phase-conjugate holographic lithography based on micromirror array recording.
abstract: We present phase-conjugate holographic lithography with a hologram recorded by a digital micromirror device (DMD) and a telecentric lens. In our lithography system, a phase-conjugate hologram is applied instead of conventional masks or reticles to form patterns. This method has the advantage of increasing focus range, and it is applicable to the formation of patterns on fairly uneven surfaces. The hologram pattern is dynamically generated by the DMD, and its resolution is mainly determined by the demagnification of the telecentric lens. We experimentally demonstrate that our holographic lithographic system has a large focus range, and it is feasible to make a large-area hologram by stitching each pattern generated by the DMD without a falling off in resolution.
authors.affiliation: National Creative Research Center for Active Plasmonics Application Systems, Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National University, Gwanak-Gu Gwanakro 1, Seoul 151-744, South Korea.
authors.forename: Yongjun
authors.initials: Y
authors.lastname: Lim
authors.forename: Joonku
authors.initials: J
authors.lastname: Hahn
authors.forename: Byoungho
authors.initials: B
authors.lastname: Lee