Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing.
The creation of complex three-dimensional (3D) microfluidic systems has attracted significant attention from both scientific and applied research communities. However, it is still a formidable challenge to build 3D microfluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. Here, we demonstrate rapid fabrication of high-aspect-ratio microfluidic channels with various 3D configurations in glass substrates by femtosecond laser direct writing. Based on this approach, we demonstrate a 3D passive microfluidic mixer and characterize its functionalities. This technology will enable rapid construction of complex 3D microfluidic devices for a wide array of lab-on-a-chip applications.
State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, P. R. China.
Yang
Y
Liao
Jiangxin
J
Song
En
E
Li
Yong
Y
Luo
Yinglong
Y
Shen
Danping
D
Chen
Ya
Y
Cheng
Zhizhan
Z
Xu
Koji
K
Sugioka
Katsumi
K
Midorikawa
D005898:Glass; D007834:Lasers; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*