Development of a new dynamic gas flow-control system in the pressure range of 1 Pa-133 Pa.
A new flow-control system (FCS-705) has been developed at Korea Research Institute of Standards and Science. The system is intended for calibration of vacuum gauges in the pressure range of 1 Pa-133 Pa by comparison method. This paper describes some basic characteristics of the system including; (1) the design and construction of the system, (2) the generation of stable pressures in the chamber, (3) achieving high upstream pressure limit by installing a short duct in the by-pass pumping line, and (4) investigation of the gas flow regimes within the short duct.
Korea Research Institute of Standards and Science, Daejeon 305-340, South Korea. sshong@kriss.re.kr
S S
SS
Hong
Wakil
W
Khan
J W
JW
Chung