High efficiency GaN-based light-emitting diodes with embedded air voids/SiO2 nanomasks.
In this paper, the high performance GaN-based light-emitting diodes (LEDs) with embedded microscale air voids and an SiO(2) nanomask by metal-organic chemical vapor deposition (MOCVD) were demonstrated. Microscale air voids and an SiO(2) nanomask were clearly observed at the interface between GaN nanorods (NRs) and the overgrown GaN layer by scanning electron microscopy (SEM). From the reflectance spectra we show strong reflectance differences due to the different refractive index gradient between the GaN grown on the nanotemplate and sapphire. It can increase the light extraction efficiency due to additional light scattering. The transmission electron microscopy (TEM) images show the threading dislocations were suppressed by nanoscale epitaxial lateral overgrowth (NELOG). The LEDs with embedded microscale air voids and an SiO(2) nanomask exhibit smaller reverse-bias current and large enhancement of the light output (65% at 20 mA) compared with conventional LEDs.
Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan, Republic of China.
Ching-Hsueh
CH
Chiu
Chien-Chung
CC
Lin
Hau-Vei
HV
Han
Che-Yu
CY
Liu
Yan-Hao
YH
Chen
Yu-Pin
YP
Lan
Peichen
P
Yu
Hao-Chung
HC
Kuo
Tien-Chang
TC
Lu
Shing-Chung
SC
Wang
Chun-Yen
CY
Chang