Review on the modeling of electrostatic MEMS.
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan. d96543004@ntu.edu.tw
Wan-Chun
WC
Chuang
Hsin-Li
HL
Lee
Pei-Zen
PZ
Chang
Yuh-Chung
YC
Hu
D004867:Equipment Design / Q000379:methods; D006801:Humans; D055617:Micro-Electrical-Mechanical Systems / Q000295:instrumentation* / Q000379:methods; D055616:Microtechnology; D008954:Models, Biological; D008962:Models, Theoretical; D055672:Static Electricity