Reduction of scattering loss of silicon slot waveguides by RCA smoothing.
Because of stronger optical confinement density, silicon slot waveguides tend to have higher scattering loss than normal ridge waveguides with same sidewall roughness. A wet chemical process is found to be highly effective in reducing the surface roughness and scattering loss. A reduction in scattering loss by 10.2 dB/cm for TE and 8.5 dB/cm for TM polarizations has been achieved.
Applied Physics Laboratory, University of Washington, Seattle, Washington 98105, USA.
Haishan
H
Sun
Antao
A
Chen
Don
D
Abeysinghe
Attila
A
Szep
Richard S
RS
Kim