Mapping of near field light and fabrication of complex nanopatterns by diffraction lithography.
We report a single-step lithographic approach for precisely mapping near field light diffraction in photoresist and fabricating complex subwavelength structures. This method relies on the diffraction of UV light from opaque patterns on a photomask, and utilizes the central diffraction maximum (known as the 'Poisson spot' for an opaque disk) and its higher orders. By correlating pattern geometries with the resulting diffraction, we demonstrate that the near field light intensity can be quantified to high precision and is in good agreement with theory. The method is further extended to capture higher order diffraction, which is utilized to fabricate unconventional subwavelength nanostructures with three-dimensional topographies. The simplicity of this process and its capability for light mapping suggest it to be an important tool for near field optical lithography.
Department of Electrical Engineering and Applied Physics, Yale University, New Haven, CT 06520, USA. yeonwoong.jung@yale.edu
Yeonwoong
Y
Jung
Aleksandar
A
Vacic
Yong
Y
Sun
Evangelos
E
Hadjimichael
Mark A
MA
Reed