title: Micro-sized syringes for single-cell fluidic access integrated on a micro-electrode array CMOS chip.
abstract: Very-large scale integration and micro-machining have enabled the development of novel platforms for advanced and automated examination of cells and tissues in vitro. In this paper, we present a CMOS chip designed in a commercial 0.18 μm technology with integrated micro-syringes combined with micro-nail shaped electrodes and readout electronics. The micro-syringes could be individually addressed by a through-wafer micro-fluidic channel with an inner diameter of 1 μm. We demonstrated the functionality of the micro-fluidic access by diffusion of fluorescent species through the channels. Further, hippocampal neurons were cultured on top of an array of micro-syringes, and focused ion beam-scanning electron microscopy cross-sections revealed protrusion of the cells inside the channels, creating a strong interface between the membrane and the chip surface. This principle demonstrates a first step towards a novel type of automated in vitro platforms, allowing local delivery of substances to cells or advanced planar patch clamping.
authors.affiliation: Imec, Bio-Electronic Systems Group, Kapeldreef 75, 3001 Leuven, Heverlee. huys@imec.be
authors.forename: Roeland
authors.initials: R
authors.lastname: Huys
authors.forename: Dries
authors.initials: D
authors.lastname: Braeken
authors.forename: Liesbeth
authors.initials: L
authors.lastname: Micholt
authors.forename: Danny
authors.initials: D
authors.lastname: Jans
authors.forename: Andim
authors.initials: A
authors.lastname: Stassen
authors.forename: Nadine
authors.initials: N
authors.lastname: Collaert
authors.forename: Josine
authors.initials: J
authors.lastname: Loo
authors.forename: Carmen
authors.initials: C
authors.lastname: Bartic
authors.forename: Kris
authors.initials: K
authors.lastname: Verstreken
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Eberle
mesh_terms: D000818:Animals; D002478:Cells, Cultured; D005453:Fluorescence; D051379:Mice; D008839:Microelectrodes; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation*; D008855:Microscopy, Electron, Scanning; D008904:Miniaturization / Q000295:instrumentation*; D009474:Neurons / Q000166:cytology; D010087:Oxides / Q000737:chemistry*; D012666:Semiconductors; D059010:Single-Cell Analysis / Q000295:instrumentation*; D013594:Syringes
chemical_list: D010087:Oxides